Ibikoresho bya Semiconductor bikubiyemo ahanini ibikoresho byihariye, imiyoboro ihuriweho hamwe nuburyo bwo gupakira.
Umusaruro wa Semiconductor urashobora kugabanywamo ibice bitatu: umusaruro wumubiri wibicuruzwa, ibicuruzwawafergukora no guteranya ibikoresho. Muri byo, umwanda ukabije ni urwego rwo gukora ibicuruzwa.
Imyanda ihumanya igabanyijemo ahanini amazi y’amazi, imyanda n’imyanda ikomeye.
Uburyo bwo gukora chip:
Silicon wafernyuma yo gusya hanze - gusukura - okiside - kurwanya kimwe - Photolithography - iterambere - guterana - gukwirakwiza, gutera ion - gushira imyuka ya chimique - gutekesha imashini - gutunganya ibyuma, n'ibindi.
Amazi mabi
Umubare munini wamazi y’amazi atangwa muri buri ntambwe yo gukora igice cya kabiri cyogukora no gupima ibicuruzwa, cyane cyane amazi y’amazi ashingiye kuri aside, amazi y’amazi arimo amoniya n’amazi mabi.
1. Amazi mabi arimo florine:
Acide Hydrofluoric ihinduka umusemburo wingenzi ukoreshwa muri okiside no guterwa bitewe na okiside hamwe na ruswa. Fluorine irimo amazi mabi muribwo buryo buturuka cyane cyane muburyo bwo gukwirakwiza no gutunganya imiti ya chimique mugikorwa cyo gukora chip. Mubikorwa byogusukura wafer ya silicon nibikoresho bifitanye isano, aside hydrochloric nayo ikoreshwa inshuro nyinshi. Izi nzira zose zirangizwa mubigega byabugenewe cyangwa ibikoresho byogusukura, bityo amazi y’amazi arimo fluor ashobora gusohoka wenyine. Ukurikije kwibumbira hamwe, irashobora kugabanywamo ibice byinshi bya fluor irimo amazi y’amazi hamwe n’amazi mabi ya amoniya arimo. Mubisanzwe, ubwinshi bwamazi menshi ya amoniya arimo amazi yanduye arashobora kugera kuri 100-1200 mg / L. Ibigo byinshi byongera gutunganya iki gice cyamazi yimyanda kubikorwa bidasaba amazi meza.
2. Amazi mabi ya acide:
Hafi ya buri gikorwa mubikorwa byo guhuza imashanyarazi bisaba guhuza chip. Kugeza ubu, aside sulfurike na hydrogène peroxide ni byo bikoreshwa cyane mu gukora isuku mu buryo bwo guhuza imashanyarazi. Muri icyo gihe, hakoreshejwe reagent ya aside-aside nka aside nitric, aside hydrochloric n'amazi ya amoniya.
Amazi y’amazi ashingiye kubikorwa byo gukora ahanini biva mubikorwa byogusukura mugukora chip. Muburyo bwo gupakira, chip ivurwa hamwe na acide-base yumuti mugihe cyo gukwirakwiza amashanyarazi no gusesengura imiti. Nyuma yo kuvurwa, igomba gukaraba namazi meza kugirango ikore aside-base yoza amazi mabi. Byongeye kandi, reagent ya aside-aside nka sodium hydroxide na aside hydrochloric nayo ikoreshwa mumazi meza kugirango yongere kubyara anion hamwe na cation kugirango itange amazi mabi asubirana. Gukaraba amazi umurizo nabyo bikorwa mugihe cyo gukaraba imyanda ya aside. Mu masosiyete akora inganda zuzuzanya, ubwinshi bwamazi y’amazi asukuye ni menshi cyane.
3. Amazi mabi kama:
Bitewe nuburyo butandukanye bwo gukora, ingano yumuti ukoreshwa munganda ziciriritse ziratandukanye cyane. Nyamara, nkibikoresho byogusukura, ibishishwa kama biracyakoreshwa cyane muburyo butandukanye bwo gupakira ibicuruzwa. Umuyoboro umwe uhinduka amazi mabi.
4. Andi mazi mabi:
Igikorwa cyo gutobora uburyo bwo gukora igice cya kabiri kizakoresha ammonia, fluor n'amazi meza cyane kugirango yanduze, bityo bibyare amazi menshi ya amoniya arimo imyanda.
Inzira ya electroplating irasabwa murwego rwo gupakira igice. Chip igomba gusukurwa nyuma ya electroplating, kandi amashanyarazi azana amazi meza muri iki gikorwa. Kubera ko ibyuma bimwe bikoreshwa mugukwirakwiza amashanyarazi, hazabaho imyuka ya ion mu cyuma cya electroplating isukura amazi mabi, nka gurş, amabati, disiki, zinc, aluminium, nibindi.
Umwanda
Kubera ko inzira ya semiconductor ifite ibisabwa cyane kugirango isuku yicyumba ikoreramo, abafana bakunze gukoreshwa mugukuramo imyanda itandukanye yimyanda ihindagurika mugihe cyibikorwa. Kubwibyo, imyuka ihumanya ikirere mu nganda ziciriritse zirangwa nubunini bunini hamwe nubushyuhe buke bwoherezwa mu kirere. Imyuka yangiza imyanda nayo ahanini ihindagurika.
Ibyo byuka bihumanya ikirere bishobora kugabanywamo ibyiciro bine: gaze ya aside, gaze ya alkaline, imyanda kama na gaze yubumara.
1. Umwuka wa aside-fatizo:
Imyuka ya aside-ishingiye ahanini ikwirakwizwa,CVD, CMP hamwe na etching inzira, ikoresha igisubizo cyisuku-acide kugirango isukure wafer.
Kugeza ubu, ikoreshwa ryogusukura cyane mugikorwa cyo gukora igice cya kabiri ni uruvange rwa hydrogen peroxide na aside sulfurike.
Gazi yimyanda ikorwa muribi bikorwa irimo imyuka ya acide nka acide sulfurike, aside hydrofluoric, aside hydrochloric, aside nitric na aside fosifori, kandi gaze ya alkaline ni amoniya.
2. Gazi yimyanda kama:
Umwuka wa imyanda kama ahanini uturuka mubikorwa nka Photolithography, iterambere, kurigata no gukwirakwizwa. Muri ubwo buryo, igisubizo kama (nka alcool ya isopropyl) gikoreshwa mugusukura hejuru ya wafer, kandi imyanda yimyanda iterwa na volatilisation nimwe mumasoko ya gaze imyanda kama;
Muri icyo gihe, umufotozi (Photoresist) akoreshwa mugikorwa cyo gufotora no gutobora arimo imashanyarazi ihindagurika, nka butyl acetate, ihindagurika mukirere mugihe cyo gutunganya wafer, akaba ari andi masoko ya gaze yimyanda.
3. Imyanda yuburozi:
Imyuka yubumara yubumara ituruka ahanini mubikorwa nka kristu epitaxy, kuruma byumye na CVD. Muri ubu buryo, imyuka itandukanye-isukuye cyane ikoreshwa mugutunganya wafer, nka silicon (SiHj), fosifore (PH3), tetrachloride ya karubone (CFJ), borane, trioxide ya boron, nibindi bimwe na bimwe imyuka idasanzwe ni uburozi, guhumeka no kubora.
Muri icyo gihe, mugikorwa cyo gukama no gusukura nyuma yo gushira imyuka ya chimique munganda zikoresha igice cya kabiri, harasabwa umubare munini wa gaze yuzuye ya okiside (PFCS), nka NFS, C2F & CR, C3FS, CHF3, SF6, nibindi. gira imbaraga nyinshi mukarere ka mucyo kandi ugume mwikirere igihe kirekire. Mubisanzwe bafatwa nkisoko nyamukuru yingaruka zisi.
4. Gupakira inzira yimyanda:
Ugereranije nuburyo bwo gukora semiconductor, gaze yimyanda iterwa nuburyo bwo gupakira semiconductor iroroshye cyane, cyane cyane gaze ya acide, epoxy resin n ivumbi.
Gazi ya aside irike ikorwa cyane cyane nka electroplating;
Guteka imyanda itangwa mugikorwa cyo guteka nyuma yo gushira ibicuruzwa no gufunga;
Imashini isiga ibyuka itanga imyanda irimo ivumbi rya silicon mugihe cyo gukata wafer.
Ibibazo byangiza ibidukikije
Ku bibazo byangiza ibidukikije mu nganda ziciriritse, ibibazo nyamukuru bigomba gukemurwa ni:
· Imyuka minini y’ibyuka bihumanya ikirere hamwe n’ibinyabuzima bihindagurika (VOC) mu gihe cyo gufotora;
· Gusohora ibibyimba bitunganijwe neza (PFCS) muburyo bwo gutera plasma no gutumura imyuka ya chimique;
· Gukoresha ingufu nyinshi n’amazi mu musaruro no kurinda umutekano w'abakozi;
· Gutunganya no kugenzura umwanda ukomoka ku bicuruzwa;
· Ibibazo byo gukoresha imiti yangiza muburyo bwo gupakira.
Umusaruro usukuye
Igikoresho cya Semiconductor tekinoroji isukuye irashobora kunozwa uhereye kubikoresho fatizo, inzira no kugenzura inzira.
Gutezimbere ibikoresho fatizo ningufu
Icya mbere, ubuziranenge bwibikoresho bugomba kugenzurwa cyane kugirango hagabanuke kwinjiza umwanda nuduce.
Icya kabiri, ubushyuhe butandukanye, gutahura ibimeneka, kunyeganyega, guhagarika amashanyarazi menshi hamwe nibindi bizamini bigomba gukorwa kubice byinjira cyangwa ibicuruzwa byarangije igice mbere yuko bishyirwa mubikorwa.
Byongeye kandi, ubuziranenge bwibikoresho byingirakamaro bugomba kugenzurwa cyane. Hariho tekinoroji nyinshi zishobora gukoreshwa mugutanga ingufu zisukuye.
Hindura uburyo bwo gukora
Inganda za semiconductor ubwazo ziharanira kugabanya ingaruka zayo kubidukikije hifashishijwe iterambere ryikoranabuhanga.
Kurugero, mu myaka ya za 70, ibishishwa kama byakoreshwaga cyane cyane mugusukura waferi muburyo bwikoranabuhanga bwogukora isuku. Mu myaka ya za 1980, acide na alkali ibisubizo nka acide sulfurike byakoreshwaga mu gusukura wafer. Kugeza mu myaka ya za 90, hifashishijwe ikoranabuhanga rya plasma ogisijeni.
Ku bijyanye no gupakira, amasosiyete menshi kuri ubu akoresha ikoranabuhanga rya electroplating, rizatera umwanda mwinshi ibyuma byangiza ibidukikije.
Nyamara, ibihingwa bipakira muri Shanghai ntibigikoresha ikoranabuhanga rya electroplating, bityo rero nta ngaruka z’ibyuma biremereye ku bidukikije. Turashobora kubona ko inganda ziciriritse zigenda zigabanya ingaruka zayo ku bidukikije binyuze mu kunoza imikorere no gusimbuza imiti mu iterambere ryayo bwite, ibyo bikaba binakurikiza inzira igezweho y’iterambere ry’isi yose yo kunganira inzira no gushushanya ibicuruzwa bishingiye ku bidukikije.
Kugeza ubu, ibikorwa byinshi byaho bitezimbere birimo gukorwa, harimo:
· Gusimbuza no kugabanya gaze ya amonium ya PFCS yose, nko gukoresha gaze ya PFC ningaruka za parike nkeya kugirango isimbuze gaze ningaruka za pariki nyinshi, nko kunoza imigendekere no kugabanya umubare wa gaze ya PFCS ikoreshwa muriki gikorwa;
· Kunoza isuku ya wafer nyinshi kugirango isuku ya wafer imwe igabanye kugabanya ibikoresho byogusukura imiti ikoreshwa mugikorwa cyogusukura.
· Igenzura rikomeye:
a. Kumenya gutangiza ibikorwa byinganda, zishobora kumenya gutunganya neza no gutunganya ibyiciro, no kugabanya igipimo kinini cyamakosa yimikorere yintoki;
b. Ultra-isuku yuburyo bwibidukikije, hafi 5% cyangwa munsi yo gutakaza umusaruro biterwa nabantu nibidukikije. Ibikorwa by’ibidukikije byangiza cyane cyane birimo isuku y’ikirere, amazi meza cyane, umwuka uhumanye, CO2, N2, ubushyuhe, ubushuhe, n’ibindi. umwuka, ni ukuvuga ibice byo kubara kwibanda;
c. Shimangira gutahura, hanyuma uhitemo ingingo zingenzi zikenewe kugirango ubone aho ukorera hamwe n’imyanda myinshi mugihe cyo gukora.
Ikaze abakiriya bose baturutse impande zose zisi kugirango badusure kugirango tuganire kubindi biganiro!
https://www.vet-china.com/
https://www.facebook.com/abantu/Ningbo-Miami-Yongerewe-Ibikoresho-Ikoranabuhanga-Co-Ltd/100085673110923/
https://www.linkedin.com/company/100890232/admin/page-posts/yatangajwe/
https://www.youtube.com/@user-oo9nl2qp6j
Igihe cyo kohereza: Kanama-13-2024