Iriburiro ryibikoresho bya chimique (CVD) tekinoroji yo kubika firime

Imiti ya Vapor Deposition (CVD) nubuhanga bukomeye bwo kubika firime, akenshi bikoreshwa mugutegura firime zitandukanye zikora nibikoresho bito, kandi bikoreshwa cyane mubikorwa bya semiconductor nibindi bice.

1. Ihame ryakazi rya CVD

Mubikorwa bya CVD, gazi ibanziriza gaze (ibice kimwe cyangwa byinshi bya gaze ya preursor) ihuzwa nubutaka bwa substrate hanyuma igashyuha kubushyuhe runaka kugirango itere imiti yimiti hanyuma ishyire hejuru yubutaka kugirango ikore firime cyangwa igifuniko. urwego. Ibicuruzwa byiyi reaction yimiti irakomeye, mubisanzwe igizwe nibintu byifuzwa. Niba dushaka gufatira silikoni hejuru, dushobora gukoresha trichlorosilane (SiHCl3) nka gaze ibanziriza: SiHCl3 → Si + Cl2 + HCl Silicon izahambira ku buso bugaragara (haba imbere ndetse no hanze), mugihe imyuka ya chlorine na hydrochloric. gusezererwa mu cyumba.

2. Ibyiciro bya CVD

Ubushyuhe bwa CVD: Mugushyushya gaze ibanziriza kubora no kubishyira hejuru yubutaka. Plasma Yongerewe CVD (PECVD): Plasma yongewe kuri CVD yumuriro kugirango yongere igipimo cyimyitwarire kandi igenzure uburyo bwo kohereza. Metal Organic CVD (MOCVD): Gukoresha ibyuma kama kama nka gaze ya preursor, firime yoroheje yibyuma na semiconductor irashobora gutegurwa, kandi ikoreshwa kenshi mugukora ibikoresho nka LED.

3. Gusaba

(1) Gukora Semiconductor

Filime ya siliside: ikoreshwa mugutegura ibice, insimburangingo, ibice byo kwigunga, nibindi. Filime ya Nitride: ikoreshwa mugutegura nitride ya silicon, nitride ya aluminium, nibindi, ikoreshwa muri LED, ibikoresho byamashanyarazi, nibindi. ibice, n'ibindi.

(2) Erekana ikoranabuhanga

Filime ya ITO: Filime ikora neza ya okiside, ikunze gukoreshwa muburyo bwerekana neza no gukoraho. Filime y'umuringa: ikoreshwa mugutegura ibipfunyika, imirongo itwara, nibindi, kugirango tunoze imikorere yibikoresho byerekana.

(3) Indi mirima

Ibikoresho byiza: harimo ibirwanya anti-reflive, filteri optique, nibindi. Kurwanya ruswa: bikoreshwa mubice byimodoka, ibikoresho byindege, nibindi.

4. Ibiranga inzira ya CVD

Koresha ubushyuhe bwo hejuru kugirango uteze imbere umuvuduko. Mubisanzwe bikorerwa mubidukikije. Ibihumanya hejuru yigice bigomba kuvaho mbere yo gushushanya. Inzira irashobora kugira aho igarukira kuri substrate ishobora gutwikirwa, ni ukuvuga ubushyuhe bwubushyuhe cyangwa imbogamizi zidasanzwe. Igikoresho cya CVD kizaba gikubiyemo ibice byose byigice, harimo insinga, umwobo uhumye hamwe nimbere. Irashobora kugabanya ubushobozi bwo guhisha ahantu hagenewe intego. Ubunini bwa firime bugarukira kubikorwa nibintu bifatika. Kuruta.