Bikunze gukoreshwa peste ya epapasi yicyuka

Mugihe cyimyuka yicyuka epitaxy (VPE), uruhare rwicyicaro ni ugushyigikira substrate no kwemeza ubushyuhe bumwe mugihe cyo gukura. Ubwoko butandukanye bwimyanya ikwiranye nuburyo butandukanye bwo gukura hamwe na sisitemu yibikoresho. Ibikurikira nuburyo bumwe bwakunze gukoreshwa mubyiciro byumwukaepitaxy:

Ikibaho

Inzira ya barrale ikoreshwa muburyo butambitse cyangwa bugoramye ibyuka bya epitaxy sisitemu. Barashobora gufata substrate hanyuma bakemerera gaze gutembera hejuru ya substrate, ifasha kugera kumikurire imwe ya epitaxial.

Ikibaho kimeze nka disiki (vertical pedestal)

Ibyuma bisa na disiki birakwiriye kuri sisitemu ya epicxy ya veritike ihagaritse, aho substrate ishyizwe muburyo buhagaritse. Igishushanyo gifasha kugabanya aho uhurira hagati ya substrate na susceptor, bityo bikagabanya gutakaza ubushyuhe nibishobora kwanduzwa.

Horizontal susceptor

Horizontal suseptors ntabwo ikunze kugaragara muri epitaxy yicyuka, ariko irashobora gukoreshwa muburyo bumwe bwo gukura kugirango yemere gukura epitaxial mu cyerekezo gitambitse.

Monolithic epitaxial reaction susceptor

Monolithic epitaxial reaction susceptor yagenewe substrate imwe, ishobora gutanga ubushyuhe bunoze bwo kugenzura ubushyuhe hamwe no kwigunga neza kwamashyanyarazi, bikwiranye no gukura kurwego rwo hejuru rwiza.

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