Ibyiza bya silicon carbide inkunga yubwato ugereranije na quartz ubwato

Imikorere nyamukuru yasilicon carbide ubwatoinkunga hamwe na quartz ubwato bwinkunga nimwe.Silicon carbide ubwatoinkunga ifite imikorere myiza ariko igiciro kinini. Igizwe nubundi buryo hamwe nubwato bwa quartz mubikoresho byo gutunganya bateri hamwe nakazi katoroshye (nkibikoresho bya LPCVD nibikoresho byo gukwirakwiza boron). Mubikoresho byo gutunganya bateri hamwe nibikorwa bisanzwe byakazi, kubera umubano wibiciro, carbide ya silicon hamwe nubwato bwa quartz buba hamwe kandi ibyiciro birushanwe.

Relationship Isano yo gusimburana muri LPCVD nibikoresho byo gukwirakwiza boron

Ibikoresho bya LPCVD bikoreshwa mugukoresha bateri ya selile ya okiside hamwe na dopi polysilicon yo gutegura. Ihame ry'akazi:

Mugihe cyumuvuduko muke, hamwe nubushyuhe bukwiye, reaction ya chimique hamwe na firime yoherejwe bigerwaho mugutegura ultra-thin tunneling oxide layer na firime polysilicon. Muri okiside ya tunnel hamwe na dopi ya polysilicon yo gutegura igipande, inkunga yubwato ifite ubushyuhe bwinshi bwakazi kandi firime ya silicon izashyirwa hejuru. Coefficient yo kwagura ubushyuhe bwa quartz iratandukanye cyane na silicon. Iyo ikoreshejwe muribikorwa byavuzwe haruguru, birakenewe guhitamo buri gihe no kuvanaho silikoni yashyizwe hejuru kugirango wirinde ubwato bwa quartz kumeneka kubera kwaguka kwinshi no kugabanuka bitewe nuburinganire butandukanye bwo kwagura ubushyuhe bwa silikoni. Bitewe no gutoragura kenshi hamwe nubushyuhe buke bwo hejuru, ufite ubwato bwa quartz afite ubuzima bucye kandi bugasimburwa kenshi muri okiside ya tunnel hamwe na dop polysilicon yo gutegura igorofa, ibyo bikaba byongera cyane igiciro cyumusaruro wa selile ya batiri. Kwiyongera kwingingo yasilicon karbideni hafi ya silicon. Kwishyira hamwesilicon carbide ubwatouyifata ntisaba gutoragura muri okiside ya tunnel hamwe na dop polysilicon yogutegura. Ifite imbaraga zo hejuru-ubushyuhe hamwe nubuzima burebure. Nuburyo bwiza kubatwara ubwato bwa quartz.

Ibikoresho byo kwagura Boron bikoreshwa cyane cyane mugikorwa cyo gukuramo doping ya boron kuri N-silicon wafer substrate ya selile ya bateri kugirango bategure imyuka yo mu bwoko bwa P kugirango ihuze PN. Ihame ryakazi ni ukumenya reaction ya chimique hamwe na molekuliyumu yoherejwe na firime mubushyuhe bwo hejuru. Iyo firime imaze gushingwa, irashobora gukwirakwizwa nubushyuhe bwo hejuru kugirango tumenye imikorere ya doping yubuso bwa silicon. Bitewe nubushyuhe bwo hejuru bwibikoresho byo kwagura boron, ufite ubwato bwa quartz afite imbaraga nke zubushyuhe bwo hejuru hamwe nigihe gito cya serivisi mubikoresho byo kwagura boron. Kwishyira hamwesilicon carbide ubwatouyifite afite imbaraga zo hejuru yubushyuhe kandi nuburyo bwiza kubatwara ubwato bwa quartz mugikorwa cyo kwagura boron.

Relationship Isano yo gusimburana mubindi bikoresho

Inkunga ya SiC ifite ubushobozi buke bwo gukora kandi ikora neza. Igiciro cyabo muri rusange kiri hejuru yicy'ubwato bwa quartz. Muri rusange imiterere yakazi yibikoresho bitunganya selile, itandukaniro mubuzima bwa serivisi hagati yubwato bwa SiC hamwe nubwato bwa quartz ni buto. Abakiriya bo hasi cyane bagereranya kandi bagahitamo igiciro nigikorwa ukurikije inzira zabo nibikenewe. Ubwato bwa SiC bushigikira hamwe na quartz ubwato bwarabaye hamwe kandi burushanwa. Nyamara, inyungu rusange yubwato bwa SiC ishyigikiwe ni hejuru muri iki gihe. Hamwe nigabanuka ryikiguzi cyumusaruro wubwato bwa SiC, niba igiciro cyo kugurisha ubwato bwa SiC gishyigikira kugabanuka cyane, bizanateza imbere guhangana kurwego rwa quartz.

Ikigereranyo cyo gukoresha

Inzira yikoranabuhanga rya selile ni tekinoroji ya PERC nubuhanga bwa TOPCon. Umugabane wisoko ryikoranabuhanga rya PERC ni 88%, naho isoko ryikoranabuhanga rya TOPCon ni 8.3%. Umugabane rusange wamasoko yombi ni 96,30%.

Nkuko bigaragara ku gishushanyo gikurikira:

Muri tekinoroji ya PERC, inkunga yubwato irakenewe kugirango ikwirakwizwa rya fosifore imbere hamwe na annealing. Muri tekinoroji ya TOPCon, inkunga yubwato irakenewe kugirango ikwirakwizwa rya boron imbere, LPCVD, ikwirakwizwa rya fosifore yinyuma hamwe na annealing. Kugeza ubu, ubwato bwa silicon karbide bukoreshwa cyane cyane muri LPCVD ya tekinoroji ya TOPCon, kandi ikoreshwa ryayo muri gahunda yo gukwirakwiza boron ryaragenzuwe cyane.

Igishushanyo Gukoresha ubwato bufasha mugutunganya selile

Icyitonderwa: Nyuma yimbere yimbere ninyuma ya tekinoroji ya PERC na TOPCon, haracyari amahuza nko gucapisha ecran, gucumura no kugerageza no gutondeka, bitarimo no gukoresha ubwato bwubwato kandi ntiburutonde mubishusho byavuzwe haruguru.