Mtundu wa Silicon Wafer wa 8 Inch P wochokera ku VET Energy ndi chofufumitsa cha silicon chapamwamba chopangidwa kuti chizigwiritsidwa ntchito zosiyanasiyana, kuphatikizapo maselo a dzuwa, zipangizo za MEMS, ndi maulendo ophatikizika. Wodziwika bwino chifukwa cha mphamvu zake zamagetsi zamagetsi komanso magwiridwe antchito osasinthasintha, chophatikizika ichi ndi chisankho chomwe chimakondedwa kwa opanga omwe akufuna kupanga zida zamagetsi zodalirika komanso zogwira mtima. VET Energy imatsimikizira milingo yolondola ya doping komanso kumaliza kwapamwamba kwambiri kuti apange zida zabwino kwambiri.
Ma Silicon Wafers awa a 8 Inch P amagwirizana kwathunthu ndi zida zosiyanasiyana monga SiC Substrate, SOI Wafer, SiN Substrate, ndipo ndi oyenera kukula kwa Epi Wafer, kuwonetsetsa kusinthasintha kwa njira zapamwamba zopangira semiconductor. Zophikazi zitha kugwiritsidwanso ntchito molumikizana ndi zida zina zapamwamba kwambiri monga Gallium Oxide Ga2O3 ndi AlN Wafer, zomwe zimawapangitsa kukhala abwino pamagetsi am'badwo wotsatira. Mapangidwe awo amphamvu amalumikizananso mosasunthika m'makina opangidwa ndi Cassette, kuwonetsetsa kuti kasamalidwe koyenera komanso kokwera kwambiri.
VET Energy imapatsa makasitomala mayankho osinthika makonda. Tikhoza makonda zopyapyala ndi resistivity osiyana, okhutira mpweya, makulidwe, etc. malinga ndi zosowa za makasitomala '. Kuphatikiza apo, timaperekanso chithandizo chaukadaulo chaukadaulo komanso ntchito yotsatsa pambuyo pogulitsa kuti tithandizire makasitomala kuthana ndi mavuto osiyanasiyana omwe amakumana nawo panthawi yopanga.
ZOCHITIKA ZONSE
*n-Pm=n-type Pm-Grade,n-Ps=n-type Ps-Grade,Sl=Semi-lnsulating
Kanthu | 8-inchi | 6-inchi | 4-inchi | ||
nP | n-pm | n-Zam | SI | SI | |
TTV(GBIR) | ≤6um | ≤6um | |||
Bow(GF3YFCD) - Mtengo Wonse | ≤15μm | ≤15μm | ≤25μm | ≤15μm | |
Warp(GF3YFER) | ≤25μm | ≤25μm | ≤40μm | ≤25μm | |
LTV(SBIR) -10mmx10mm | <2 mu | ||||
Wafer Edge | Beveling |
PAMENE MALIZA
*n-Pm=n-type Pm-Grade,n-Ps=n-type Ps-Grade,Sl=Semi-lnsulating
Kanthu | 8-inchi | 6-inchi | 4-inchi | ||
nP | n-pm | n-Zam | SI | SI | |
Pamwamba Pamwamba | Mbali ziwiri za Optical Polish, Si- Face CMP | ||||
SurfaceRoughness | (10um x 10um) Si-FaceRa≤0.2nm | (5umx5um) Si-Face Ra≤0.2nm | |||
Chips za Edge | Palibe Chololedwa (kutalika ndi m'lifupi≥0.5mm) | ||||
Inde | Palibe Chololedwa | ||||
Zikwapu (Si-Face) | Unyinji.≤5, Zowonjezera | Unyinji.≤5, Zowonjezera | Unyinji.≤5, Zowonjezera | ||
Ming'alu | Palibe Chololedwa | ||||
Kupatula M'mphepete | 3 mm |