4 Inchi GaN pa SiC Wafer

Kufotokozera Kwachidule:

VET Energy's 4-inch GaN pa SiC wafer ndi chinthu chosintha pazamagetsi zamagetsi. Chophika ichi chimaphatikiza matenthedwe abwino kwambiri a silicon carbide (SiC) yokhala ndi mphamvu zambiri komanso kutayika kochepa kwa gallium nitride (GaN), kupangitsa kuti ikhale chisankho choyenera kupanga zida zothamanga kwambiri, zamphamvu kwambiri. VET Energy imatsimikizira kugwira ntchito bwino komanso kusasinthika kwa chophikacho kudzera muukadaulo wapamwamba wa MOCVD epitaxial.

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Tsatanetsatane wa Zamalonda

Zolemba Zamalonda

Mzere wazogulitsa wa VET Energy sungokhala ku GaN pa zowotcha za SiC. Timaperekanso zida zingapo za semiconductor gawo lapansi, kuphatikiza Si Wafer, SiC Substrate, SOI Wafer, SiN Substrate, Epi Wafer, ndi zina zotero. Kuphatikiza apo, tikupanganso zida zatsopano za semiconductor, monga Gallium Oxide Ga2O3 ndi AlN. Wafer, kuti akwaniritse zofuna zamakampani amagetsi amagetsi amtsogolo pazida zogwira ntchito kwambiri.

VET Energy imapereka ntchito zosinthika makonda, ndipo imatha kusintha magawo a GaN epitaxial makulidwe osiyanasiyana, mitundu yosiyanasiyana ya ma doping, ndi makulidwe osiyanasiyana ophatikizika malinga ndi zosowa za makasitomala. Kuphatikiza apo, timaperekanso chithandizo chaukadaulo chaukadaulo komanso ntchito yotsatsa pambuyo pogulitsa kuti tithandizire makasitomala kupanga zida zamagetsi zamagetsi zogwira ntchito kwambiri.

ZINTHU ZONSE

*n-Pm=n-type Pm-Grade,n-Ps=n-type Ps-Grade,Sl=Semi-lnsulating

Kanthu	8-inchi	6-inchi			4-inchi
Kanthu	nP	n-pm	n-Zam	SI	SI
TTV(GBIR)	≤6um	≤6um
Bow(GF3YFCD) - Mtengo Wonse	≤15μm	≤15μm	≤25μm		≤15μm
Warp(GF3YFER)	≤25μm	≤25μm	≤40μm		≤25μm
LTV(SBIR) -10mmx10mm	<2 mu
Wafer Edge	Beveling

PAMENE MALIZA

*n-Pm=n-type Pm-Grade,n-Ps=n-type Ps-Grade,Sl=Semi-lnsulating

Kanthu	8-inchi	6-inchi			4-inchi
	nP	n-pm	n-Zam	SI	SI
Pamwamba Pamwamba	Mbali ziwiri za Optical Polish, Si- Face CMP
SurfaceRoughness	(10um x 10um) Si-FaceRa≤0.2nm C-Face Ra≤ 0.5nm			(5umx5um) Si-Face Ra≤0.2nm C-Face Ra≤0.5nm
Chips za Edge	Palibe Chololedwa (kutalika ndi m'lifupi≥0.5mm)
Inde	Palibe Chololedwa
Zikwapu (Si-Face)	Unyinji.≤5, Zowonjezera Utali ≤0.5× wafer awiri	Unyinji.≤5, Zowonjezera Utali ≤0.5× wafer awiri			Unyinji.≤5, Zowonjezera Utali ≤0.5× wafer awiri
Ming'alu	Palibe Chololedwa
Kupatula M'mphepete	3 mm