SiC Coated Graphite Halfmoon Part Rau Silicon Carbide Epitaxial Equipment

Lus piav qhia luv luv:

Khoom taw qhia thiab kev siv: Txuas quartz raj, tuaj yeem kis tau roj los tsav lub phaj puag ncig, tswj qhov kub thiab txias

Ntaus qhov chaw ntawm cov khoom: nyob rau hauv cov tshuaj tiv thaiv chamber, tsis nyob rau hauv ncaj qha kev sib cuag nrog lub wafer

Cov khoom tseem ceeb hauv qab: cov khoom siv hluav taws xob

Kev lag luam tseem ceeb ntawm lub davhlau ya nyob twg: tsheb tshiab zog

 


Product Detail

Khoom cim npe

SiC Coated Graphite Halfmoon Partis a tus yuam sijtivthaiv siv nyob rau hauv semiconductor manufacturing txheej txheem, tshwj xeeb tshaj yog rau SiC epitaxial khoom.Peb siv peb cov patented technology los ua ib nrab hli nrogpurity siab heev,zootxheejtsis sib xwsthiab lub neej kev pabcuam zoo heev, zoo lisiab tshuaj tiv thaiv thiab thermal stability zog.

VET Energy yog tustiag tiag chaw tsim tshuaj paus ntawm customized graphite thiab silicon carbide khoom nrog CVD txheej,tuaj yeem muab tauntau yamcustomized qhov chaw rau semiconductor thiab photovoltaic kev lag luam. Our pab neeg ua haujlwm los ntawm cov tsev kawm tshawb fawb sab saum toj, tuaj yeem muab cov kev daws teeb meem zoo tshaj plawsrau koj.

Peb tsis tu ncua tsim cov txheej txheem siab heev los muab cov ntaub ntawv siab dua,thiabtau ua haujlwm tawm cov cuab yeej tshwj xeeb patented, uas tuaj yeem ua rau kev sib txuas ntawm cov txheej thiab cov substrate nruj dua thiab tsis tshua muaj detachment.

Fnoj ntawm peb cov khoom:

1. Kub kub oxidation tsis kam mus txog 1700.
2. High purity thiabthermal uniformity
3. Zoo heev corrosion kuj: acid, alkali, ntsev thiab organic reagents.
4. High hardness, compact nto, zoo hais.
5. Lub neej ua haujlwm ntev dua thiab ruaj khov dua

CVD SiC薄膜基本物理性能

Basic Physical Properties ntawm CVD SiCtxheej

性质 / Khoom

典型数值 / Tus nqi

晶体结构 / Crystal Structure

FCC β theem多晶, 主要为(111) Ib

密度 / Ceev

3.21 g / cm³

硬度 / Hardness

2500 维氏硬度 (500g load)

晶粒大小 / Grain SiZe

2 ~ 10 hli

纯度 / Tshuaj Purity

99.99995%

Cov duab / Kub Muaj Peev Xwm

6 40j kg-1· K-1

升华温度 / Sublimation kub

2700 ℃

抗弯强度 / Flexural zog

415 MPa RT 4-point

杨氏模量 / Young's Modulus

430 Gpa 4pt khoov, 1300 ℃

导热系数 / KublKev coj ua

300 Wm-1· K-1

热膨胀系数 / Thermal Expansion (CTE)

4.5 × 10-6K-1

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