CVD TaC coated phaj susceptor

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VET Energy CVD TaC coated phaj susceptor yog cov khoom ua tau zoo tsim los muab kev ua tau zoo thiab txhim khu kev qha nyob rau lub sijhawm ntev. Nws muaj super zoo kub tsis kam thiab thermal uniformity, siab purity, yaig kuj, ua rau nws zoo meej tov rau wafer ua daim ntaub ntawv.


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CovCVD TaC CoatedPhaj Susceptor los ntawm vet-china yog engineered rau high-kev ua tau zoo nyob rau hauv tshuaj vapor deposition (CVD) txheej txheem. Qhov no susceptor nta ib tug robustTaC (Tantalum Carbide) txheej, muab tshwj xeeb thermal stability, tshuaj tiv thaiv, thiab kav ntev, ua rau nws yog ib qho zoo tagnrho tov rau semiconductor manufacturing thiab high-temperature daim ntaub ntawv. CovCVD TaC txheejUa kom muaj kev tiv thaiv zoo heev rau oxidation thiab hnav, tso cai rau cov susceptor tswj nws txoj kev ncaj ncees thiab kev ua haujlwm hauv qhov chaw hnyav.

cov vet-chinaCVD TaC CoatedPhaj Susceptor sawv tawm rau nws lub peev xwm los sib faib cov cua sov thaum lub sij hawm CVD cov txheej txheem, kom ntseeg tau cov txheej txheem meej thiab txhim khu kev ua haujlwm ntawm semiconductor fabrication. Lub Ta-C txheej muab kev tiv thaiv ntxiv rau cov tshuaj tiv thaiv corrosion, ncua lub neej ntawm cov susceptor thiab txhim kho kev ua haujlwm tag nrho. Nrog rau kev sib xyaw ua ke ntawm CVD susceptor thev naus laus zis thiab cov txheej txheem zoo TaC cov tshuaj, cov tshuaj tiv thaiv no yog cov khoom tseem ceeb rau kev lag luam uas xav tau qhov tseeb thiab kev ntseeg siab hauv qhov chaw kub kub.

Seb siv nyob rau hauv zus tau tej cov semiconductors los yog lwm yam high-tech daim ntaub ntawv, lubCVD TaC Coated Phaj Susceptoryog tsim los ua kom tau raws li qhov xav tau ntawm kev tsim khoom niaj hnub. Rov qab los ntawm Semicera lub koob npe nrov rau kev tsim kho tshiab thiab zoo, cov khoom no muaj kev ua tau zoo dua thiab siv tau ntev, ua rau nws muaj kev ntseeg siab rau cov txheej txheem CVD.

TaC txheej yog ib hom tantalum carbide (TaC) txheej npaj los ntawm lub cev vapor deposition tshuab, nws muaj cov yam ntxwv hauv qab no:

1. High hardness: TaC txheej hardness yog siab, feem ntau muaj peev xwm ncav cuag 2500-3000HV, yog ib qho zoo heev txheej txheej.

2. Hnav tsis kam: TaC txheej yog hnav-resistant, uas tuaj yeem txo qhov hnav thiab kev puas tsuaj ntawm cov khoom siv kho tshuab thaum siv.

3. Kev kub siab ua haujlwm zoo: TaC txheej kuj tuaj yeem tswj nws qhov kev ua tau zoo nyob rau hauv qhov kub thiab txias.

4. Kev ruaj ntseg tshuaj zoo: TaC txheej muaj tshuaj lom neeg ruaj khov thiab tuaj yeem tiv taus ntau yam tshuaj lom neeg, xws li cov kua qaub thiab cov hauv paus.

TAC txheej 13
TAC txheej 10

碳化钽涂层物理特性物理特性

Lub cev muaj zog ntawm TaC txheej

密度/ Ceev

14.3 (g / cm³)

比辐射率 / Tshwj xeeb emissivity

0.3

热膨胀系数 / Thermal expansion coefficient

6.3 10-6/K

努氏硬度/ Hardness (HK)

2000 HK

电阻 / Tsis kam

1 × 10-5 Aw* cm

热稳定性 / Thermal stability

≥2500 ℃

石墨尺寸变化 / Graphite loj hloov

-10 ~ 20 hli

涂层厚度 / Txheej thickness

≥20um tus nqi raug (35um ± 10um)

Ningbo VET Energy Technology Co., Ltd yog lub tuam txhab high-tech tsom rau kev tsim khoom thiab muag khoom ntawm cov khoom siv siab kawg, cov ntaub ntawv thiab thev naus laus zis npog graphite, silicon carbide, ceramics, kho deg thiab lwm yam. Cov khoom siv dav siv hauv photovoltaic, semiconductor, lub zog tshiab, metallurgy, thiab lwm yam ..

Peb pab neeg ua haujlwm los ntawm cov tsev kawm tshawb fawb sab saum toj hauv tebchaws, tuaj yeem muab cov ntaub ntawv tshaj lij tshaj lij rau koj.

Zoo siab txais tos koj tuaj xyuas peb lub Hoobkas, cia peb tham ntxiv!

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