I-Tantalum Carbide Coating Wafer Susceptor

Incazelo emfushane:

I-Tantalum Carbide Coating Wafer Susceptor yase-Vet-China ingumkhiqizo osebenza kahle kakhulu odizayinelwe izinga lokushisa eliphezulu nomoya ogqwalile, usebenzisa ubuchwepheshe bokumboza be-TaC obuthuthukisiwe ukuze kuqinisekiswe ukungangeni kwamakhemikhali okuhle kakhulu nokuzinza kokushisa. Sizibophezele ngokuqinile ekuhlinzekeni ngemikhiqizo yekhwalithi ephezulu ngamanani ancintisanayo futhi sibheke phambili ekubeni uzakwethu wesikhathi eside e-China.


Imininingwane Yomkhiqizo

Omaka bomkhiqizo

I-Vet-China iyakhiqizaI-Tantalum Carbide Coated Wafer Susceptor, esebenzisa ubuchwepheshe bokunamathela be-CVD obusezingeni eliphezulu futhi engenza kahle ngaphansi kwezimo zokusebenza ezidlulele. YakhoI-Tantalum Carbideimpahla ihlanganisa ukumelana nokugqoka kanye nokumelana nokugqwala, okwenza kube ukukhetha okuhle embonini yokukhiqiza ye-semiconductor.

Emazingeni okushisa aphezulu nasezindaweni ezonakalisayo,I-Tantalum Carbide Coated I-Wafer Susceptorikhombisa ukungabi namakhemikhali okuhle kakhulu nokuzinza kokushisa, futhi ingamelana ngokuphumelelayo nokuguguleka kwemithombo yamakhemikhali ehlukahlukene, iqinisekise ukusetshenziswa kwesikhathi eside ngaphansi kwezimo ezinzima. Lesi sici senza izindandatho zethu zomhlahlandlela zibe namandla amakhulu okusebenza ekucubungulweni kwe-semiconductor, ukusetshenziswa kwamakhemikhali nezinye izinkambu.

Ukukhetha i-Vet-China'sI-Tantalum Carbide Coated I-Wafer Susceptorayikwazi nje ukuthuthukisa ukusebenza kahle kwakho kokukhiqiza, kodwa futhi yandise impilo yesevisi yemishini. Imikhiqizo yethu ilawulwa ikhwalithi ngokuqinile ukuze kuqinisekiswe ukuthi ngayinye ihlangabezana nezindinganiso eziphakeme kakhulu zemboni ukuze ihlangabezane nezidingo ezihlukene zamakhasimende.

Ngokusungula izinto ezintsha zobuchwepheshe, i-Vet-China izibophezele ekunikezeni amakhasimende izixazululo ezinokwethenjelwa kanye nokukhuthaza inqubekelaphambili yomkhakha. I-Tantalum Carbide Coating yethuI-waferI-Susceptor inketho yakho ethembekile yezinga lokushisa eliphezulu nezimo ezonakalisayo, esiza izinhlelo zakho zokusebenza zifinyelele ukuphakama okusha.

I-TaC coating iwuhlobo lwe-tantalum carbide (TaC) elungiselelwe ubuchwepheshe bokubeka umhwamuko ngokomzimba, inezici ezilandelayo:

1. Ubulukhuni obuphezulu: Ukuqina kwe-TaC enamathela kuphezulu, ngokuvamile kungafinyelela ku-2500-3000HV, kuwukunamathela okuhle kakhulu okuqinile.

2. Ukumelana nokugqoka: I-TaC enamathelayo ayigugi kakhulu, enganciphisa ngempumelelo ukuguga nokulimala kwezingxenye eziwumshini ngesikhathi sokusetshenziswa.

3. Ukumelana okuhle kwezinga lokushisa eliphezulu: I-TaC enamathelayo nayo ingagcina ukusebenza kwayo okuhle kakhulu ngaphansi kwendawo yokushisa ephezulu.

4. Ukuzinza okuhle kwamakhemikhali: I-TaC enamathelayo inokusimama okuhle kwamakhemikhali futhi ingamelana nokusabela kwamakhemikhali okuningi, njengama-asidi nezisekelo.

6 (3)
6 (1)

碳化钽涂层物理特性物理特性

Izici ezingokomzimba ze I-TaC enamathela

密度 / Ukuminyana

14.3 (g/cm³)

比辐射率 / Ukukhipha umoya okukhethekile

0.3

热膨胀系数 / I-coefficient yokunweba okushisayo

6.3 10-6/K

努氏硬度 / Ukuqina (HK)

2000 HK

电阻 / Resistance

1×10-5Om*cm

热稳定性 / Ukuzinza kwe-thermal

<2500℃

石墨尺寸变化 / Usayizi weGraphite uyashintsha

-10 ~ 20um

涂层厚度 / Ukuqina kwe-Coating

≥20um inani elijwayelekile (35um±10um)

I-Ningbo VET Energy Technology Co., Ltd iyibhizinisi lobuchwepheshe obuphezulu eligxile ekukhiqizeni nasekuthengisweni kwezinto ezisezingeni eliphezulu, izinto zokwakha kanye nobuchwepheshe obumboza i-graphite, i-silicon carbide, i-ceramics, ukwelashwa kwendawo nokunye. Imikhiqizo isetshenziswa kabanzi ku-photovoltaic, semiconductor, amandla amasha, i-metallurgy, njll.

Ithimba lethu lezobuchwepheshe livela ezikhungweni eziphezulu zocwaningo lwasekhaya, lingakunikeza izixazululo zempahla echwepheshile.

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