I-TaC Coated Susceptor ye-Epitaxy Equipment

I-TaC Coated Susceptor Yesisetshenziswa se-Epitaxy Isithombe Esifakiwe

Incazelo emfushane:

I-VET ihlinzeka ngezingubo ezikhethekile ze-tantalum carbide (TaC) zezingxenye ezihlukahlukene nabathwali. Inqubo yokumboza ehamba phambili ye-VET yenza izimbobo ze-tantalum carbide (TaC) zifinyelele ubumsulwa obuphezulu, izinga lokushisa eliphakeme lokuzinza kanye nokubekezelela amakhemikhali aphezulu, ukuthuthukisa ikhwalithi yomkhiqizo wamakristalu e-SIC/GAN nezingqimba ze-EPI, nokwelula ukuphila kwezingxenye ezibalulekile ze-reactor. Ukusetshenziswa kwe-tantalum carbide TaC coating ukuxazulula inkinga enqenqemeni nokwenza ngcono ikhwalithi yokukhula kwekristalu, futhi i-VET iphumelele ekuxazululeni ubuchwepheshe be-tantalum carbide coating (CVD), yafinyelela ezingeni eliphezulu lamazwe ngamazwe.

Thumela i-imeyili kithi Landa njenge-PDF

Imininingwane Yomkhiqizo

Omaka bomkhiqizo

I-TaC ehlanganisiwei-substrate ifilimu encane eyenziwei-tantalum carbideimpahla, esetshenziswa ebusweni be-substrate yemishini ye-epitaxial.I-TaC coatinginezakhiwo eziningi ezinhle kakhulu, okwenza kube ukukhetha okuhle.

I-TaC coating iwuhlobo lwe-tantalum carbide (TaC) elungiselelwe ubuchwepheshe bokubeka umhwamuko ngokomzimba, inezici ezilandelayo:

1. Ubulukhuni obuphezulu: Ukuqina kwe-TaC enamathela kuphezulu, ngokuvamile kungafinyelela ku-2500-3000HV, kuwukunamathela okuhle kakhulu okuqinile.

2. Ukumelana nokugqoka: I-TaC enamathelayo ayigugi kakhulu, enganciphisa ngempumelelo ukuguga nokulimala kwezingxenye eziwumshini ngesikhathi sokusetshenziswa.

3. Ukumelana okuhle kwezinga lokushisa eliphezulu: I-TaC enamathelayo nayo ingagcina ukusebenza kwayo okuhle kakhulu ngaphansi kwendawo yokushisa ephezulu.

4. Ukuzinza okuhle kwamakhemikhali: I-TaC enamathelayo inokusimama okuhle kwamakhemikhali futhi ingamelana nokusabela kwamakhemikhali okuningi, njengama-asidi nezisekelo.

碳化钽涂层物理特性物理特性 Izici ezingokomzimba ze I-TaC enamathela
密度/ Ukuminyana	14.3 (g/cm³)
比辐射率 / Ukukhipha umoya okukhethekile	0.3
热膨胀系数 / I-coefficient yokwandisa ukushisa	6.3 10^-6/K
努氏硬度/ Ukuqina (HK)	2000 HK
电阻 / Ukumelana	1×10^-5 Om*cm
热稳定性 / Ukuzinza kwe-thermal	<2500℃
石墨尺寸变化 / Izinguquko zesayizi yegraphite	-10 ~ 20um
涂层厚度 / Ukuqina kwe-coating	≥20um inani elijwayelekile (35um±10um)

I-Ningbo VET Energy Technology Co., Ltd iyibhizinisi lobuchwepheshe obuphezulu eligxile ekukhiqizeni nasekuthengisweni kwezinto ezisezingeni eliphezulu, izinto zokwakha kanye nobuchwepheshe obumboza i-graphite, i-silicon carbide, i-ceramics, ukwelashwa kwendawo nokunye. Imikhiqizo isetshenziswa kabanzi ku-photovoltaic, semiconductor, amandla amasha, i-metallurgy, njll.

Ithimba lethu lezobuchwepheshe livela ezikhungweni eziphezulu zocwaningo lwasekhaya, lingakunikeza izixazululo zempahla echwepheshile.

Siyakwamukela ngokufudumele ukuthi uvakashele ifekthri yethu, ake sibe nengxoxo eyengeziwe!