I-SiC Coating Graphite MOCVD Wafer Carriers Susceptors

Incazelo emfushane:

I-VET Energy SiC Coated MOCVD Susceptor for Epitaxial Growth iwumkhiqizo osebenza kahle kakhulu oklanyelwe ukunikeza ukusebenza okungaguquki nokuthembekile esikhathini eside. Inokumelana nokushisa okuhle kakhulu nokufana okushisayo, ukuhlanzeka okuphezulu, ukumelana nokuguguleka, okuyenza ibe yisixazululo esiphelele sezinhlelo zokusebenza zokucubungula ama-wafer.

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Imininingwane Yomkhiqizo

Omaka bomkhiqizo

SiC enamathela graphite MOCVD Wafer abathwali / susceptor

Wonke ama-susceptors ethu enziwe nge-graphite ye-isostatic ephezulu. Zuza ekuhlanzekeni okuphezulu kwamagraphite ethu - athuthukiswe ikakhulukazi izinqubo eziyinselele ezifana ne-epitaxy, ukukhula kwekristalu, ukufakwa kwe-ion kanye nokufakwa kwe-plasma, kanye nokukhiqizwa kwama-chips e-LED.

Izici zemikhiqizo yethu:

1. Ukumelana nokushisa okuphezulu kwe-oxidation kufika ku-1700 ℃.
2. Ukuhlanzeka okuphezulu nokufana okushisayo
3. Ukumelana nokugqwala okuhle kakhulu: i-asidi, i-alkali, usawoti kanye nama-organic reagents.
4. Ukuqina okuphezulu, indawo ehlangene, izinhlayiya ezinhle.
5. Impilo yesevisi ende futhi ihlala isikhathi eside

I-CVD SiC薄膜基本物理性能 Izakhiwo eziyisisekelo ze-CVD SiCenamathela
性质 / Impahla	典型数值 / Inani Elijwayelekile
晶体结构 / Isakhiwo seCrystal	I-FCC β isigaba多晶，主要為（111）取向
密度 / Ukuminyana	3.21 g/cm³
硬度 / Ukuqina	2500 维氏硬度 (500g umthwalo)
晶粒大小 / Uhlamvu SiZe	2 ~ 10μm
纯度 / Ukuhlanzeka Kwamakhemikhali	99.99995%
热容 / Amandla Okushisa	640 J·kg^-1·K^-1
升华温度 / I-Sublimation Temperature	2700 ℃
抗弯强度 / Amandla Aguquguqukayo	415 MPa RT 4-iphoyinti
杨氏模量 / I-Modulus Encane	430 Gpa 4pt ukugoba, 1300℃
导热系数 / ThermalI-Conductivity	300Wm^-1·K^-1
热膨胀系数 / Ukwandiswa Kokushisa (CTE)	4.5×10^-6K^-1

I-VET Energy ingumkhiqizi wangempela wemikhiqizo eyenziwe ngokwezifiso ye-graphite ne-silicon carbide enezingubo ezihlukene ezifana ne-SiC coating, i-TaC coating, i-glassy carbon coating, i-pyrolytic carbon coating, njll., ingahlinzeka ngezingxenye ezihlukahlukene ezenziwe ngokwezifiso ze-semiconductor kanye nemboni ye-photovoltaic.

Ithimba lethu lezobuchwepheshe livela ezikhungweni eziphezulu zocwaningo lwasekhaya, lingakunikeza izixazululo zempahla echwepheshile.

Siyaqhubeka nokuthuthukisa izinqubo ezithuthukile ukuze sinikeze izinto ezithuthuke kakhulu, futhi senze ubuchwepheshe obukhethekile obunelungelo lobunikazi, obungenza ukuhlangana phakathi kokumboza ne-substrate kuqine futhi kungabi lula ukuhlukaniswa.

Siyakwamukela ngokufudumele ukuthi uvakashele ifekthri yethu, ake sibe nengxoxo eyengeziwe!