I-SiC Coated Barrel Susceptor

Incazelo emfushane:

I-VET Energy SiC Coated Barrel Susceptor iwumkhiqizo osebenza kahle kakhulu oklanyelwe ukunikeza ukusebenza okungaguquki nokuthembekile esikhathini eside. Inokumelana nokushisa okuhle kakhulu nokufana okushisayo, ukuhlanzeka okuphezulu, ukumelana nokuguguleka, okuyenza ibe yisixazululo esiphelele sezinhlelo zokusebenza zokucubungula ama-wafer.


  • Indawo Yomsuka:China
  • Isakhiwo Sekristalu:Isigaba se-FCCβ
  • Ukuminyana :3.21 g/cm;
  • Ukuqina:2500 Vickers;
  • Usayizi Wokusanhlamvu:2~10μm;
  • I-Chemical Purity:99.99995%;
  • Amandla Okushisa :640J·kg-1·K-1;
  • I-Sublimation Temperature:2700 ℃;
  • Amandla E-Felexural :415 Mpa (RT 4-Point);
  • I-Young's Modulus:430 Gpa (4pt bend, 1300℃);
  • Ukunwetshwa kwe-Thermal (CTE) :4.5 10-6K-1;
  • I-Thermal Conductivity:300 (W/MK);
  • Imininingwane Yomkhiqizo

    Omaka bomkhiqizo

    I-barrel susceptor is a ukhiyeingxenye esetshenziswa ezinqubweni ezihlukahlukene zokukhiqiza ama-semiconductor.Sisebenzisa ubuchwepheshe bethu obunelungelo lobunikazi ukwenza iumgqomo susceptorngeubumsulwa obukhulu kakhulu,kuhleenamathelaukufanakanye nempilo yesevisi enhle kakhulu, kanye neukumelana namakhemikhali aphezulu kanye nezakhiwo zokuzinza ezishisayo.

    I-VET Energy yiyona iumkhiqizi wangempela wemikhiqizo eyenziwe ngokwezifiso ye-graphite ne-silicon carbide ene-CVD coating,angahlinzekaezihlukahlukeneizingxenye ezenziwe ngokwezifiso ze-semiconductor kanye nemboni ye-photovoltaic. OIthimba le-ur lochwepheshe livela ezikhungweni eziphezulu zocwaningo lwasekhaya, linganikeza izixazululo zempahla echwepheshilekwakho.

    Siyaqhubeka nokuthuthukisa izinqubo ezithuthukile ukuze sinikeze izinto ezithuthuke kakhulu,futhibenze ubuchwepheshe obukhethekile obunelungelo lobunikazi, obungenza ukubopha phakathi kokumboza ne-substrate kuqine futhi kungabi lula ukuhlukaniswa.

    Fukudla kwemikhiqizo yethu:

    1. Ukumelana nokushisa okuphezulu kwe-oxidation kufika ku-1700.
    2. Ukuhlanzeka okuphezulu kanyeukufana okushisayo
    3. Ukumelana nokugqwala okuhle kakhulu: i-asidi, i-alkali, usawoti kanye nama-organic reagents.
    4. Ukuqina okuphezulu, indawo ehlangene, izinhlayiya ezinhle.
    5. Impilo yesevisi ende futhi ihlala isikhathi eside

    I-CVD SiC薄膜基本物理性能

    Izakhiwo eziyisisekelo ze-CVD SiCenamathela

    性质 / Impahla

    典型数值 / Inani Elijwayelekile

    晶体结构 / Isakhiwo seCrystal

    I-FCC β isigaba多晶,主要為(111)取向

    密度 / Ukuminyana

    3.21 g/cm³

    硬度 / Ukuqina

    2500 维氏硬度 (500g umthwalo)

    晶粒大小 / Uhlamvu SiZe

    2 ~ 10μm

    纯度 / Ukuhlanzeka Kwamakhemikhali

    99.99995%

    热容 / Amandla Okushisa

    640 J·kg-1·K-1

    升华温度 / I-Sublimation Temperature

    2700 ℃

    抗弯强度 / Amandla Aguquguqukayo

    415 MPa RT 4-iphoyinti

    杨氏模量 / I-Modulus Encane

    430 Gpa 4pt ukugoba, 1300℃

    导热系数 / ThermalI-Conductivity

    300Wm-1·K-1

    热膨胀系数 / Ukwandiswa Kokushisa (CTE)

    4.5×10-6K-1

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