Isakhiwo sangaphakathi semishini yeshubhu yesithando somlilo sichazwa ngokuningiliziwe

Njengoba kuboniswe ngenhla, kuyinto ejwayelekile

Ingxenye yokuqala:
I-Heating Element (ikhoyili yokushisa) : etholakala eduze kweshubhu yesithando somlilo, ngokuvamile eyenziwe ngezintambo zokumelana, ezisetshenziselwa ukushisa ingaphakathi leshubhu yesithando somlilo.
I-Quartz Tube: Ingqikithi yesithando somlilo esishisayo, eyenziwe nge-quartz ehlanzekile kakhulu engakwazi ukumelana namazinga okushisa aphezulu futhi ihlale ingenawo amakhemikhali.
Okuphakelayo Kwegesi: Kutholakala phezulu noma ohlangothini lweshubhu yesithando somlilo, kusetshenziselwa ukuthutha umoya-mpilo noma amanye amagesi ngaphakathi kweshubhu yesithando somlilo.
I-SS Flange: izingxenye ezixhuma amashubhu e-quartz nemigqa yegesi, iqinisekisa ukuqina nokuzinza koxhumano.
Ilayini Okuphakelayo Kwegesi: Amapayipi axhuma i-MFC endaweni yokuphakela igesi ukuze kudluliselwe igesi.
I-MFC (I-Mass Flow Controller) : Idivayisi elawula ukugeleza kwegesi ngaphakathi kweshubhu ye-quartz ukuze ilawule ngokunembile inani legesi elidingekayo.
I-Vent: Isetshenziselwa ukukhipha igesi ephuma ngaphakathi kweshubhu yesithando somlilo ukuya ngaphandle kwezinto zokusebenza.

Ingxenye engezansi
Ama-Silicon Wafers in Holder: Amawafa e-Silicon afakwa ku-Holder ekhethekile ukuze kuqinisekiswe ukushisa okufanayo ngesikhathi se-oxidation.
Isibambi se-Wafer: Isetshenziselwa ukubamba i-silicon wafer futhi iqinisekise ukuthi i-silicon wafer ihlala izinzile phakathi nenqubo.
I-Pedestal: Isakhiwo esibamba Isibambi se-silicon wafer, ngokuvamile esenziwe ngezinto ezimelana nezinga lokushisa eliphezulu.
I-Elevator: Isetshenziselwa ukuphakamisa izibambi ze-Wafer ukungena nokuphuma kumashubhu e-quartz ukuze kulayishwe ngokuzenzakalelayo futhi kulayishwe ama-wafer e-silicon.
I-Wafer Transfer Robot: etholakala eceleni kwedivayisi yeshubhu yomlilo, isetshenziselwa ukususa ngokuzenzakalelayo i-silicon wafer ebhokisini bese iyibeka eshubhu lomlilo, noma isuse ngemva kokucubungula.
I-Cassette Storage Carousel: I-cassette storage carousel isetshenziselwa ukugcina ibhokisi eliqukethe ama-silicon wafers futhi lingazungeziswa ukuze kufinyelele irobhothi.
I-wafer Cassette: i-wafer cassette isetshenziselwa ukugcina nokudlulisa amawafa e-silicon ukuze acutshungulwe.