Isakhiwo sangaphakathi semishini yeshubhu yesithando somlilo sichazwa ngokuningiliziwe

Njengoba kuboniswe ngenhla, kuyinto ejwayelekile

Ingxenye yokuqala:

▪ I-Heating Element (ikhoyili yokushisisa):

etholakala eduze kweshubhu yesithando somlilo, ngokuvamile eyenziwe ngezintambo zokumelana, ezisetshenziselwa ukushisa ingaphakathi leshubhu lesithando somlilo.

▪ Ishubhu yequartz:

Umnyombo wesithando somlilo se-oxidation esishisayo, esenziwe nge-quartz ehlanzekile kakhulu engakwazi ukumelana namazinga okushisa aphezulu futhi ihlale ingenawo amakhemikhali.

▪ Okuphakelayo Kwegesi:

Itholakala phezulu noma ohlangothini lweshubhu yesithando somlilo, isetshenziselwa ukuthutha umoya-mpilo noma amanye amagesi ngaphakathi kweshubhu yesithando somlilo.

▪ I-SS Flange:

izingxenye ezixhuma amashubhu e-quartz nemigqa yegesi, iqinisekisa ukuqina nokuzinza koxhumano.

▪ Ilayini Okuphakelayo Kwegesi:

Amapayipi axhuma i-MFC esikhumulweni segesi sokuhambisa igesi.

▪ I-MFC (Isilawuli Sokugeleza Okuningi) :

Idivayisi elawula ukugeleza kwegesi ngaphakathi kweshubhu ye-quartz ukuze ilawule ngokunembile inani legesi elidingekayo.

▪ Isikhala:

Isetshenziselwa ukukhipha igesi ephuma ngaphakathi kweshubhu yesithando somlilo ukuya ngaphandle kwezinto zokusebenza.

Ingxenye engezansi:

▪ Ama-Silicon Wafers in Holder:

Ama-wafers e-silicon afakwa ku-Holder ekhethekile ukuqinisekisa ukushisa okufanayo ngesikhathi se-oxidation.

▪ Isibambi se-wafer:

Isetshenziselwa ukubamba i-silicon wafer futhi iqinisekise ukuthi i-silicon wafer ihlala izinzile phakathi nenqubo.

▪ Isisekelo:

Isakhiwo esibamba Isibambi se-silicon wafer, ngokuvamile esenziwe ngezinto ezimelana nezinga lokushisa eliphezulu.

▪ Ikheshi:

Isetshenziselwa ukuphakamisa izibambi ze-Wafer ukungena nokuphuma kumashubhu e-quartz ukuze kulayishwe ngokuzenzakalelayo futhi kulayishwe amawafa e-silicon.

▪ Irobhothi lokudlulisa i-Wafer:

ebekwe eceleni kwedivayisi yeshubhu yesithando somlilo, isetshenziselwa ukususa ngokuzenzakalelayo i-silicon wafer ebhokisini bese iyibeka kushubhu yesithando somlilo, noma ukuyisusa ngemva kokucubungula.

▪ I-Cassette Storage Carousel:

I-carousel yokugcina amakhasethi isetshenziselwa ukugcina ibhokisi eliqukethe ama-silicon wafers futhi lingazungeziswa ukuze kungene irobhothi.

▪ Ikhasethi le-Wafer:

I-wafer cassette isetshenziselwa ukugcina nokudlulisa amawafa e-silicon ukuze acutshungulwe.