I-MOCVD Substrate Heater, Izinto Zokushisa ze-MOCVD

I-MOCVD Substrate Heater, Izinto Zokushisa Zesithombe Esifakiwe se-MOCVD

Incazelo emfushane:

Izingxenye ze-graphite heater zisetshenziswa esithandweni sokushisa esiphezulu esinezinga lokushisa elifinyelele ku-2200 degree endaweni ye-vacuum kanye ne-3000 degree endaweni yegesi ekhishwe futhi ifakwe.
Izici eziyinhloko ze-heater graphite:
1. ukufana kwesakhiwo sokushisa.
2. conductivity enhle kagesi kanye nomthwalo omkhulu kagesi.
3. ukumelana nokugqwala.
4. i-inoxidizability.
5. ukuhlanzeka kwamakhemikhali aphezulu.
6. amandla aphezulu emishini.
Inzuzo iyonga amandla, inani eliphakeme kanye nokugcinwa okuphansi.
Singakhiqiza i-anti-oxidation nempilo ende ye-graphite crucible, isikhunta se-graphite nazo zonke izingxenye ze-graphite heater.
Imingcele eyinhloko ye-heater graphite:

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I-MOCVD Substrate heater, Izinto zokushisisa ze-MOCVD,
graphite heater, ihitha, I-MOCVD Substrate heater,

I-SIC Coated Graphite Heater yempilo ende ye-MOCVD K465i

Igraphite heaterizingxenye zisetshenziswa esithandweni sokushisa esiphezulu esinezinga lokushisa elifinyelele ku-2200 degree endaweni ye-vacuum kanye ne-3000 degree endaweni yegesi deoxidized futhi ifakwe.
Izici eziyinhloko ze-graphiteihitha:
1. ukufana kwesakhiwo sokushisa.
2. conductivity enhle kagesi kanye nomthwalo omkhulu kagesi.
3. ukumelana nokugqwala.
4. i-inoxidizability.
5. ukuhlanzeka kwamakhemikhali aphezulu.
6. amandla aphezulu emishini.
Inzuzo iyonga amandla, inani eliphakeme kanye nokugcinwa okuphansi.
Singakhiqiza i-anti-oxidation nempilo ende ye-graphite crucible, isikhunta se-graphite nazo zonke izingxenye ze-graphiteihitha.
Imingcele eyinhloko ye-heater graphite:

Ukucaciswa Kwezobuchwepheshe	I-VET-M3
Ukuminyana kwenqwaba (g/cm3)	≥1.85
Okuqukethwe komlotha (PPM)	≤500
Ukuqina Kwasogwini	≥45
Ukumelana Okuqondile (μ.Ω.m)	≤12
Amandla e-Flexural (Mpa)	≥40
Amandla Acindezelayo (Mpa)	≥70
Ubukhulu. Usayizi Wokusanhlamvu (μm)	≤43
I-Coefficient of Thermal Expansion Mm/°C	≤4.4*10-6

I-Graphite heater yesithando somlilo kagesi inezindawo zokumelana nokushisa, ukumelana ne-oxidation, ukuhamba kahle kukagesi kanye namandla angcono wemishini. Singakwazi umshini izinhlobo ezihlukahlukene ze-graphite heater ngokwemiklamo yamakhasimende.

I-SIC Coated Graphite Heater yempilo ende ye-MOCVD K465i