I-MOCVD Substrate Heater, Izinto Zokushisa ze-MOCVD

Incazelo emfushane:

Izingxenye ze-graphite heater zisetshenziswa esithandweni sokushisa esiphezulu esinezinga lokushisa elifinyelele ku-2200 degree endaweni ye-vacuum kanye ne-3000 degree endaweni yegesi ekhishwe futhi ifakwe.
Izici eziyinhloko ze-heater graphite:
1. ukufana kwesakhiwo sokushisa.
2. conductivity enhle kagesi kanye nomthwalo omkhulu kagesi.
3. ukumelana nokugqwala.
4. i-inoxidizability.
5. ukuhlanzeka kwamakhemikhali aphezulu.
6. amandla aphezulu emishini.
Inzuzo iyonga amandla, inani eliphakeme kanye nokugcinwa okuphansi.
Singakhiqiza i-anti-oxidation nempilo ende ye-graphite crucible, isikhunta se-graphite nazo zonke izingxenye ze-graphite heater.
Imingcele eyinhloko ye-heater graphite:


Imininingwane Yomkhiqizo

Omaka bomkhiqizo

I-MOCVD Substrate heater, Izinto zokushisisa ze-MOCVD,
graphite heater, ihitha, I-MOCVD Substrate heater,

I-SIC Coated Graphite Heater yempilo ende ye-MOCVD K465i

Igraphite heaterizingxenye zisetshenziswa esithandweni sokushisa esiphezulu esinezinga lokushisa elifinyelele ku-2200 degree endaweni ye-vacuum kanye ne-3000 degree endaweni yegesi deoxidized futhi ifakwe.
Izici eziyinhloko zegraphite heater:
1. ukufana kwesakhiwo sokushisa.
2. conductivity enhle kagesi kanye nomthwalo omkhulu kagesi.
3. ukumelana nokugqwala.
4. i-inoxidizability.
5. ukuhlanzeka kwamakhemikhali aphezulu.
6. amandla aphezulu emishini.
Inzuzo iyonga amandla, inani eliphakeme kanye nokugcinwa okuphansi.
Singakhiqiza i-anti-oxidation nempilo ende ye-graphite crucible, isikhunta se-graphite nazo zonke izingxenye ze-graphiteihitha.
Imingcele eyinhloko ye-graphiteihitha:

Ukucaciswa Kwezobuchwepheshe

I-VET-M3

Ukuminyana kwenqwaba (g/cm3)

≥1.85

Okuqukethwe komlotha (PPM)

≤500

Ukuqina Kwasogwini

≥45

Ukumelana Okuqondile (μ.Ω.m)

≤12

Amandla e-Flexural (Mpa)

≥40

Amandla Acindezelayo (Mpa)

≥70

Ubukhulu.Usayizi Wokusanhlamvu (μm)

≤43

I-Coefficient of Thermal Expansion Mm/°C

≤4.4*10-6

 

I-Graphite heater yesithando somlilo kagesi inezindawo zokumelana nokushisa, ukumelana ne-oxidation, ukuhamba kahle kukagesi kanye namandla angcono wemishini.Singakwazi umshini izinhlobo ezihlukahlukene ze-graphite heater ngokwemiklamo yamakhasimende.

I-SIC Coated Graphite Heater yempilo ende ye-MOCVD K465iI-SIC Coated Graphite Heater yempilo ende ye-MOCVD K465i


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