Intengo enesaphulelo i-GaN-Basedepitaxial ku-Sic Substrates 4′′

Incazelo emfushane:

Izithwali ze-wafer ezisetshenziswa ekucubunguleni ukukhula kwe-epitaxial kumele zibekezelele amazinga okushisa aphezulu kanye nokuhlanzwa kwamakhemikhali okunzima. I-CoorsTek Clear Carbon™ susceptors yakhelwe ngokukhethekile lezi zinhlelo zokusebenza zemishini ye-epitaxy. I-high-purity silicon carbide (i-SiC) ehlanganiswe nokwakhiwa kwegraphite inikeza ukumelana nokushisa okuphakeme, ngisho nokufana okushisayo kogqinsi nokumelana nongqimba lwe-epi, kanye nokumelana namakhemikhali okuhlala isikhathi eside. I-Fine SiC crystal coating inikeza indawo ehlanzekile, ebushelelezi, ebalulekile ekuphathweni njengoba ama-wafer ahlanzekile athinta i-susceptor ezindaweni eziningi kuyo yonke indawo yawo.

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Imininingwane Yomkhiqizo

Omaka bomkhiqizo

Manje sinabasebenzi abasebenza kahle kakhulu ukubhekana nemibuzo evela kubathengi. Umgomo wethu "ukugcwalisa umthengi ngo-100% ngomkhiqizo noma isevisi yethu ehamba phambili, intengo yokuthengisa kanye nesevisi yethu yabasebenzi" futhi sithole injabulo ngokuduma okukhulu phakathi kwamakhasimende. Ngamafekthri amaningi, singanikeza intengo ehlukene Yesaphulelo i-GaN-Basedepitaxial ku-Sic Substrates 4′′, Samukela ngemfudumalo osomabhizinisi abancane esibambisene nabo abavela kuzo zonke izigaba zokuphila, sithemba ukusungula ibhizinisi elinobungane nelibambisanayo ukuxhumana nawe futhi sikuzuze. inhloso yokuwina-win.
Manje sinabasebenzi abasebenza kahle kakhulu ukubhekana nemibuzo evela kubathengi. Umgomo wethu "ukugcwalisa umthengi ngo-100% ngomkhiqizo noma isevisi yethu ehamba phambili, intengo yokuthengisa kanye nesevisi yethu yabasebenzi" futhi sithole injabulo ngokuduma okukhulu phakathi kwamakhasimende. Ngamafekthri amaningi, singanikela ngokuhlukahluka okubanziI-China GaN Substrates ne-GaN Film, Sibheke ngabomvu ukubambisana namakhasimende emhlabeni wonke. Sikholelwa ukuthi singakwanelisa ngemikhiqizo yethu yekhwalithi ephezulu kanye nenkonzo ephelele. Samukela futhi amakhasimende ngokufudumele ukuthi avakashele inkampani yethu futhi athenge imikhiqizo yethu.

SiC enamathela graphite MOCVD Wafer abathwali

Wonke ama-susceptors ethu enziwe nge-graphite ye-isostatic ephezulu. Zuza ekuhlanzekeni okuphezulu kwamagraphite ethu - athuthukiswe ikakhulukazi izinqubo eziyinselele ezifana ne-epitaxy, ukukhula kwekristalu, ukufakwa kwe-ion kanye nokufakwa kwe-plasma, kanye nokukhiqizwa kwama-chips e-LED.

Incazelo Yomkhiqizo
Ukufakwa kwe-SiC ye-Graphite substrate yezinhlelo zokusebenza ze-Semiconductor kukhiqiza ingxenye enobumsulwa obuphakeme kanye nokumelana nomoya we-oxidizing.
I-CVD SiC noma i-CVI SiC isetshenziswa kuGraphite yezingxenye zokuklama ezilula noma eziyinkimbinkimbi. Ukumboza kungasetshenziswa ngobukhulu obuhlukahlukene kanye nezingxenye ezinkulu kakhulu.

Inhlanganisela

SiC enamathela graphite MOCVD Wafer abathwali

Izinzuzo ezikhethekile ze-SiC-coated graphite susceptors zihlanganisa ukuhlanzeka okuphezulu kakhulu, ukunamathela okufana nempilo yesevisi enhle kakhulu. Futhi banokuphikiswa okuphezulu kwamakhemikhali kanye nezakhiwo zokuzinza kokushisa.

Sigcina ukubekezelelana okuseduze kakhulu lapho sisebenzisa i-SiC coating, sisebenzisa ukunemba okuphezulu kwemishini ukuze siqinisekise iphrofayili ye-susceptor efanayo. Siphinde sikhiqize izinto ezinezakhiwo ezifanelekile zokumelana nogesi ukuze zisetshenziswe kumasistimu ashisayo ashisayo. Zonke izingxenye eziqediwe ziza nesitifiketi sokuhambisana nobumsulwa nesilinganiselo.

Isicelo:

Izici:
· I-Thermal Shock Resistance enhle kakhulu
· Ukumelana Nokushaqeka Okuhle Kakhulu Komzimba
· Excellent Chemical Resistance
· Super High Purity
· Ukutholakala kokuthi I-Complex Shape
· Isebenziseka ngaphansi kwe-Oxidizing AtmosphereIzici Ezijwayelekile Ze-Base Graphite Material:

Ukuminyana Okubonakalayo:	1.85 g/cm3
Ukungazweli Kagesi:	11 μΩm
I-Flexural Strenth:	49 MPa (500kgf/cm2)
Ukuqina Kwasogwini:	58
Umlotha:	<5ppm
I-Thermal Conductivity:	116 W/mK (100 kcal/mhr-℃)

Manje sinabasebenzi abasebenza kahle kakhulu ukubhekana nemibuzo evela kubathengi. Umgomo wethu "ukugcwalisa umthengi ngo-100% ngomkhiqizo noma isevisi yethu ehamba phambili, intengo yokuthengisa kanye nesevisi yethu yabasebenzi" futhi sithole injabulo ngokuduma okukhulu phakathi kwamakhasimende. Ngamafekthri amaningi, singanikeza intengo ehlukene Yesaphulelo i-GaN-Basedepitaxial ku-Sic Substrates 4′′, Samukela ngemfudumalo osomabhizinisi abancane esibambisene nabo abavela kuzo zonke izigaba zokuphila, sithemba ukusungula ibhizinisi elinobungane nelibambisanayo ukuxhumana nawe futhi sikuzuze. inhloso yokuwina-win.
Intengo esaphuleloI-China GaN Substrates ne-GaN Film, Sibheke ngabomvu ukubambisana namakhasimende emhlabeni wonke. Sikholelwa ukuthi singakwanelisa ngemikhiqizo yethu yekhwalithi ephezulu kanye nenkonzo ephelele. Samukela futhi amakhasimende ngokufudumele ukuthi avakashele inkampani yethu futhi athenge imikhiqizo yethu.