SiC Wafer Boat / Tower

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Silicon carbide Wafer Boat ti wa ni lilo pupọ bi dimu wafer ni ilana itankale iwọn otutu giga.

Awọn anfani:

Idaabobo iwọn otutu giga:lilo deede ni 1800 ℃

Ga gbona elekitiriki:deede si awọn ohun elo graphite

Lile giga:líle keji nikan si diamond, boron nitride

Idaabobo ipata:acid ti o lagbara ati alkali ko ni ipata si rẹ, ipata resistance jẹ dara ju tungsten carbide ati alumina.

Iwọn iwuwo:kekere iwuwo, sunmo si aluminiomu

Ko si abuku: kekere olùsọdipúpọ ti gbona imugboroosi

Gbona mọnamọna resistance:o le withstand didasilẹ otutu ayipada, koju gbona mọnamọna, ati ki o ni idurosinsin išẹ

 

Ti ara Properties Of SiC

Ohun ini Iye Ọna
iwuwo 3,21 g/cc Rin-leefofo ati apa miran
Ooru pato 0,66 J/g °K Pulsed lesa filasi
Agbara Flexural 450 MPa560 MPa 4 ojuami tẹ, RT4 ojuami tẹ, 1300 °
Egugun lile 2,94 MPa m1/2 Microindentation
Lile 2800 Vicker ká, 500g fifuye
Rirọ ModulusYoung ká Modul 450 GPa430 GPA 4 pt tẹ, RT4 pt tẹ, 1300 °C
Iwọn ọkà 2 - 10 µm SEM

 

Gbona Properties Of SiC

Gbona Conductivity 250 W/m °K Lesa filasi ọna, RT
Imugboroosi Gbona (CTE) 4.5 x 10-6 °K Iwọn otutu yara si 950 °C, silica dilatometer

 

 

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