Awọn 6 Inch Semi Insulating SiC Wafer lati VET Energy jẹ ipinnu ilọsiwaju fun agbara-giga ati awọn ohun elo igbohunsafẹfẹ giga, ti o funni ni ifarapa igbona giga ati idabobo itanna. Awọn wafer ologbele-idabobo wọnyi jẹ pataki ni idagbasoke awọn ẹrọ bii awọn amplifiers RF, awọn iyipada agbara, ati awọn paati foliteji giga miiran. Agbara VET ṣe idaniloju didara deede ati iṣẹ ṣiṣe, ṣiṣe awọn wafers wọnyi jẹ apẹrẹ fun ọpọlọpọ awọn ilana iṣelọpọ semikondokito.
Ni afikun si awọn ohun-ini idabobo ti o tayọ wọn, awọn wafer SiC wọnyi ni ibamu pẹlu ọpọlọpọ awọn ohun elo pẹlu Si Wafer, SiC Substrate, SOI Wafer, SiN Substrate, ati Epi Wafer, ṣiṣe wọn wapọ fun awọn oriṣiriṣi awọn ilana iṣelọpọ. Pẹlupẹlu, awọn ohun elo to ti ni ilọsiwaju bi Gallium Oxide Ga2O3 ati AlN Wafer le ṣee lo ni apapo pẹlu awọn wafers SiC wọnyi, n pese irọrun paapaa ni awọn ẹrọ itanna ti o ga julọ. Awọn wafers jẹ apẹrẹ fun isọpọ ailopin pẹlu awọn ọna ṣiṣe mimu-iwọn ile-iṣẹ bii awọn eto kasẹti, ni idaniloju irọrun ti lilo ni awọn eto iṣelọpọ pupọ.
Agbara VET nfunni ni akojọpọ okeerẹ ti awọn sobusitireti semikondokito, pẹlu Si Wafer, SiC Substrate, SOI Wafer, SiN Substrate, Epi Wafer, Gallium Oxide Ga2O3, ati AlN Wafer. Laini ọja oniruuru n ṣakiyesi awọn iwulo ti ọpọlọpọ awọn ohun elo itanna, lati ẹrọ itanna agbara si RF ati optoelectronics.
6 inch ologbele-idabobo SiC wafer nfunni ni awọn anfani pupọ:
Foliteji didenukole giga: Bandgap jakejado ti SiC ngbanilaaye awọn foliteji didenukole ti o ga, gbigba fun iwapọ diẹ sii ati awọn ẹrọ agbara daradara.
Iṣiṣẹ iwọn otutu ti o ga julọ: Imudaniloju igbona ti o dara julọ ti SiC jẹ ki iṣẹ ṣiṣẹ ni awọn iwọn otutu ti o ga, imudarasi igbẹkẹle ẹrọ.
Low on-resistance: Awọn ẹrọ SiC ṣe afihan kekere lori resistance, idinku awọn adanu agbara ati imudarasi ṣiṣe agbara.
Agbara VET nfunni awọn wafers SiC isọdi lati pade awọn ibeere rẹ pato, pẹlu awọn sisanra oriṣiriṣi, awọn ipele doping, ati awọn ipari dada. Ẹgbẹ iwé wa n pese atilẹyin imọ-ẹrọ ati iṣẹ lẹhin-tita lati rii daju aṣeyọri rẹ.
WAFERING ni pato
*n-Pm=n-iru Pm-Grade,n-Ps=n-iru Ps-Grade,Sl=Ogbede-lnsulating
| Nkan | 8-inch | 6-inch | 4-inch | ||
| nP | n-Pm | n-Ps | SI | SI | |
| TTV(GBIR) | ≤6um | ≤6um | |||
| Teriba(GF3YFCD) -Iye pipe | ≤15μm | ≤15μm | ≤25μm | ≤15μm | |
| Warp(GF3YFER) | ≤25μm | ≤25μm | ≤40μm | ≤25μm | |
| LTV (SBIR) -10mmx10mm | <2μm | ||||
| Wafer eti | Beveling | ||||
Ipari dada
*n-Pm=n-iru Pm-Grade,n-Ps=n-iru Ps-Grade,Sl=Ogbede-lnsulating
| Nkan | 8-inch | 6-inch | 4-inch | ||
| nP | n-Pm | n-Ps | SI | SI | |
| Dada Ipari | Polish Optical ẹgbẹ meji, Si- Face CMP | ||||
| SurfaceRoughness | (10um x 10um) Si-FaceRa≤0.2nm | (5umx5um) Si-Face Ra≤0.2nm | |||
| Awọn eerun eti | Ko si Gbigbanilaaye (ipari ati iwọn≥0.5mm) | ||||
| Indents | Ko Si Iyọọda | ||||
| Awọn idọti (Si-Face) | Qty.≤5, Akopọ | Qty.≤5, Akopọ | Qty.≤5, Akopọ | ||
| Awọn dojuijako | Ko Si Iyọọda | ||||
| Iyasoto eti | 3mm | ||||
