VET Energy 12-inch SOI wafer jẹ ohun elo sobusitireti semikondokito ti o ga julọ, eyiti o jẹ ojurere pupọ fun awọn ohun-ini itanna ti o dara julọ ati eto alailẹgbẹ. Agbara VET nlo awọn ilana iṣelọpọ SOI wafer ti ilọsiwaju lati rii daju pe wafer ni lọwọlọwọ jijo kekere pupọ, iyara giga ati resistance itankalẹ, pese ipilẹ to lagbara fun awọn iyika iṣọpọ iṣẹ ṣiṣe giga rẹ.
Laini ọja VET Energy ko ni opin si awọn wafers SOI. A tun pese ọpọlọpọ awọn ohun elo sobusitireti semikondokito, pẹlu Si Wafer, SiC Substrate, SiN Substrate, Epi Wafer, ati bẹbẹ lọ, bakanna bi awọn ohun elo onijagidijagan jakejado bandgap tuntun bii Gallium Oxide Ga2O3 ati AlN Wafer. Awọn ọja wọnyi le pade awọn iwulo ohun elo ti awọn alabara oriṣiriṣi ni ẹrọ itanna agbara, RF, awọn sensọ ati awọn aaye miiran.
Ifojusi lori didara julọ, awọn wafers SOI wa tun lo awọn ohun elo to ti ni ilọsiwaju gẹgẹbi gallium oxide Ga2O3, awọn kasẹti ati AlN wafers lati rii daju pe igbẹkẹle ati ṣiṣe ni gbogbo ipele iṣẹ. Gbẹkẹle Agbara VET lati pese awọn solusan gige-eti ti o pa ọna fun ilosiwaju imọ-ẹrọ.
Ṣe ifilọlẹ agbara iṣẹ akanṣe rẹ pẹlu iṣẹ giga ti VET Energy 12-inch SOI wafers. Ṣe alekun awọn agbara ĭdàsĭlẹ rẹ pẹlu awọn wafers ti o ṣe afihan didara, konge ati ĭdàsĭlẹ, fifi ipilẹ fun aṣeyọri ni aaye agbara ti imọ-ẹrọ semikondokito. Yan Agbara VET fun awọn solusan wafer SOI Ere ti o kọja awọn ireti.
WAFERING ni pato
*n-Pm=n-iru Pm-Grade,n-Ps=n-iru Ps-Grade,Sl=Ogbede-lnsulating
Nkan | 8-inch | 6-inch | 4-inch | ||
nP | n-Pm | n-Ps | SI | SI | |
TTV(GBIR) | ≤6um | ≤6um | |||
Teriba (GF3YFCD) -Iye to peye | ≤15μm | ≤15μm | ≤25μm | ≤15μm | |
Warp(GF3YFER) | ≤25μm | ≤25μm | ≤40μm | ≤25μm | |
LTV (SBIR) -10mmx10mm | <2μm | ||||
Wafer eti | Beveling |
Ipari dada
*n-Pm=n-iru Pm-Grade,n-Ps=n-iru Ps-Grade,Sl=Ogbede-lnsulating
Nkan | 8-inch | 6-inch | 4-inch | ||
nP | n-Pm | n-Ps | SI | SI | |
Dada Ipari | Polish Optical ẹgbẹ meji, Si- Face CMP | ||||
SurfaceRoughness | (10um x 10um) Si-FaceRa≤0.2nm | (5umx5um) Si-Face Ra≤0.2nm | |||
Awọn eerun eti | Ko si Gbigbanilaaye (ipari ati iwọn≥0.5mm) | ||||
Indents | Ko si Iyọọda | ||||
Awọn idọti (Si-Face) | Qty.≤5, Akopọ | Qty.≤5, Akopọ | Qty.≤5, Akopọ | ||
Awọn dojuijako | Ko si Iyọọda | ||||
Iyasoto eti | 3mm |