I-PECVD iLayisha iTreyi yokuBeka iTreyi yeGraphite

Inkcazelo emfutshane:

I-VET Energy's PECVD Loading Tray yenzelwe ukubonelela ngokukhuselekileyo kunye nenkxaso yeewafers ngexesha lokubekwa, ukuphucula ukungaguquguquki kunye nomgangatho wenkqubo yokubekwa. Ngokuchasana nobushushu obugqwesileyo, i-Graphite Tray inceda ukugcina indawo elawulwayo ngaphakathi kwamagumbi e-PECVD, ukunciphisa umngcipheko wokungcola kunye nokuqinisekisa ukusebenza kakuhle kwenkqubo.

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Iinkcukacha zeMveliso

Iithegi zeMveliso

I-VET Amandla I-PECVD yokulayisha itreyi ngumthuthi ochanekileyo owenzelwe i-PECVD (i-plasma yokuphucula ukufakwa komphunga wekhemikhali) inkqubo. Le itreyi yegraphite ekumgangatho ophezulu yenziwe ngezinto ezicocekileyo, ezixineneyo zegraphite. Inokumelana nobushushu obuphezulu, ukumelana nomhlwa, ukuzinza komda kunye nezinye iimpawu. Inokubonelela ngeqonga elizinzileyo lomthwali wenkqubo ye-PECVD kunye nokuqinisekisa ukufana kunye nokunyanzeliswa kwefilimu.

I-VET Energy PECVD iitreyi zokulayisha zisetyenziswa ngokubanzi kwi-semiconductor, i-photovoltaic, i-LED kunye nezinye iindawo. Umzekelo:

▪ I-Semiconductor: Inkqubo ye-PECVD yemathiriyeli ye-semiconductor efana ne-silicon wafers kunye ne-epitaxial wafers.

▪ I-Photovoltaic: Inkqubo ye-PECVD yeefilim ezibhityileyo zeeseli zelanga.

▪ I-LED: Inkqubo ye-PECVD yee-chips ze-LED.

Iinzuzo zeMveliso

▪Phucula umgangatho wefilimu:Qinisekisa ukufakwa kwefilimu efanayo kunye nokuphucula umgangatho wefilimu.

▪Yandisa ubomi besixhobo:Ukumelana nokugqwesa okugqwesileyo, ukwandisa ubomi benkonzo yezixhobo ze-PECVD.

▪Nciphisa iindleko zemveliso:Iitreyi zegraphite ezikumgangatho ophezulu zinokucutha izinga lokulahlwa kunye nokunciphisa iindleko zemveliso.

Imathiriyeli yeGrafite evela kwi-SGL:

Iparameter eqhelekileyo: R6510
Isalathiso	Umgangatho wovavanyo	Ixabiso	Iyunithi
Ubungakanani obuphakathi kweenkozo	ISO 13320	10	μm
Unizi lolwapho kuyiwa khona	I-DIN IEC 60413/204	1.83	g/cm³
I-porosity evulekile	DIN66133	10	%
Ubungakanani bepore obuphakathi	DIN66133	1.8	μm
Ukufikeleleka	DIN 51935	0.06	cm²/s
Ubunzima be-Rockwell HR5/100	I-DIN IEC60413/303	90	HR
Ukuxhatshazwa kombane okuthe ngqo	I-DIN IEC 60413/402	13	μΩm
Amandla e-Flexural	I-DIN IEC 60413/501	60	MPa
Amandla acinezelayo	DIN 51910	130	MPa
Imodyuli yolutsha	DIN 51915	11.5×10³	MPa
Ukwandiswa kweThermal(20-200℃)	DIN 51909	4.2X10^-6	K^-1
I-Thermal conductivity (20℃)	DIN 51908	105	Wm^-1K^-1

Yenzelwe ngokukodwa ukwenziwa komgangatho ophezulu wokwenziwa kweeseli zelanga, ezixhasa i-G12 ubungakanani obukhulu be-wafer processing. Uyilo oluphuculweyo lomthwali wonyusa kakhulu umthamo, uvumela amazinga esivuno aphezulu kunye neendleko eziphantsi zemveliso.

Into	Uhlobo	Inombolo yomphathi wewafer
PEVCD Grephite iphenyane - The 156 series	156-13 isikhephe segrephite	144
	156-19 isikhephe segrephite	216
	156-21 isikhephe segrephite	240
	156-23 isikhephe segraphite	308
PEVCD Grephite iphenyane - The 125 series	125-15 isikhephe segrephite	196
	125-19 isikhephe segrephite	252
	125-21 isikhephe se-grphite	280