I-Graphite Wafer Boat for Deposition

Inkcazelo emfutshane:

I-VET Energy graphite wafer boat ngumgangatho ophezulu osetyenziswayo olungiselelwe iinkqubo zokubeka kwi-semiconductor, photovoltaic kunye namanye amashishini. Yenziwe ngobunyulu obuphezulu, ubuninzi bezinto zegraphite, le mveliso inokumelana nobushushu obuphezulu, ukumelana nokugqwala, ukuzinza komgangatho kunye nezinye iimpawu, kwaye inokubonelela ngeqonga elizinzileyo lokuthwala inkqubo yenkqubo yokubekwa ukuze kuqinisekiswe ukufana kunye nokuthe tyaba kokubekwa kwefilimu encinci. .

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Iinkcukacha zeMveliso

Iithegi zeMveliso

I-PECVD yesikhephe segraphite esivela kwi-VET Energy senziwa nge-high-purity isostatic graphite, equkethe i-porosity engaphantsi kwe-15% kunye nobunzima bomhlaba u-Ra≤1.6μm. Uzinzo oluphezulu lwe-dimensional kunye ne-thermal conductivity iqinisekisa ukufakwa kwefilimu efanayo kunye nokuphucula ukusebenza kakuhle kweeseli.

Imathiriyeli yeGrafite evela kwi-SGL:

Iparameter eqhelekileyo: R6510
Isalathiso	Umgangatho wovavanyo	Ixabiso	Iyunithi
Ubungakanani obuphakathi kweenkozo	ISO 13320	10	μm
Unizi lolwapho kuyiwa khona	I-DIN IEC 60413/204	1.83	g/cm³
I-porosity evulekile	DIN66133	10	%
Ubungakanani bepore obuphakathi	DIN66133	1.8	μm
Ukufikeleleka	DIN 51935	0.06	cm²/s
Ubunzima be-Rockwell HR5/100	I-DIN IEC60413/303	90	HR
Ukuxhatshazwa kombane okuthe ngqo	I-DIN IEC 60413/402	13	μΩm
Amandla e-Flexural	I-DIN IEC 60413/501	60	MPa
Amandla acinezelayo	DIN 51910	130	MPa
Imodyuli yolutsha	DIN 51915	11.5×10³	MPa
Ukwandiswa kweThermal(20-200℃)	DIN 51909	4.2X10^-6	K^-1
I-Thermal conductivity (20℃)	DIN 51908	105	Wm^-1K^-1

Yenzelwe ngokukodwa ukwenziwa komgangatho ophezulu wokwenziwa kweeseli zelanga, ezixhasa i-G12 ubungakanani obukhulu be-wafer processing. Uyilo oluphuculweyo lomthwali wonyusa kakhulu umthamo, uvumela amazinga esivuno aphezulu kunye neendleko eziphantsi zemveliso.

Into	Uhlobo	Inombolo yomphathi wewafer
PEVCD Grephite iphenyane - The 156 series	156-13 isikhephe segrephite	144
	156-19 isikhephe segrephite	216
	156-21 isikhephe segrephite	240
	156-23 isikhephe segraphite	308
PEVCD Grephite iphenyane - The 125 series	125-15 isikhephe segrephite	196
	125-19 isikhephe segrephite	252
	125-21 isikhephe se-grphite	280