Isikhephe seGraphite C / C Carrier For Silicon Wafer PECVD

Isikhephe segraphite esisetyenziswa kwi-PECVD yomgca wokuvelisa iiseli zelanga

Ukuveliswa kweeseli zelanga kufuna iinkqubo ezintandathu eziphambili: ukuthungwa, ukusabalalisa, ukubethelwa, ukugquma, ukuprintwa kwesikrini kunye ne-sintering.Ukwenziwa kweeseli zelanga, inkqubo yokugquma iityhubhu ye-PECVD isebenzisa isikhephe segraphite njengomzimba osebenzayo.Inkqubo yokugquma isebenzisa iplasma eyomeleziweyo yokubeka umphunga wekhemikhali ukufaka ifilimu yesilicon nitride ngaphambili kwesilicon wafer ukunciphisa ukukhanya kwelanga kunye nomphezulu wesilicon wafer.

Iimpawu zesikhephe sethu segraphite sePECVD:
1).Yamkelwa ukuphelisa " Imibala yemibala " iteknoloji , ukuqinisekisa ngaphandle kwe "coloe lens" ngexesha lenkqubo yexesha elide.
2).Yenziwe ngemathiriyeli yegraphite engenisiweyo ngokucoceka okuphezulu, umxholo ophantsi wokungcola kunye namandla aphezulu.
3).Ukusebenzisa i-99.9% ye-ceramic kwindibano ye-ceramic kunye nokusebenza okuqinileyo kwe-corrosion kunye nobungqina be-brust.
4).Ukusebenzisa izixhobo zokulungisa ezichanekileyo ukuqinisekisa ukuchaneka kwendawo nganye.

Inkcazo

I-Ningbo VET Energy Technology Co., Ltd lishishini lobugcisa obuphezulu obugxile kwimveliso kunye nokuthengiswa kwezinto eziphezulu eziphezulu, izixhobo kunye nobuchwepheshe obubandakanya igraphite, i-silicon carbide, i-ceramics, unyango olungaphezulu olufana ne-SiC coating, i-TaC yokwambathisa, ikhabhoni yeglasi. i-coating, i-pyrolytic carbon coating, njl., ezi mveliso zisetyenziswa ngokubanzi kwi-photovoltaic, semiconductor, amandla amatsha, isinyithi, njl.

Iqela lethu lobuchwephesha livela kumaziko aphezulu ophando lwasekhaya, kwaye liphuhlise iitekhnoloji ezininzi ezinelungelo elilodwa lomenzi wokuqinisekisa ukusebenza kwemveliso kunye nomgangatho, linokubonelela abathengi ngezisombululo zemathiriyeli yobungcali.