I-SiC Cantilever Paddle ekwiNqanaba yokuLungiselela iWafer

ISiC ekwiNqanaba yeCantilever ekwiNqanaba yokuPhathwa kweWafer eFanelekileyo

Inkcazelo emfutshane:

I-Advanced SiC Cantilever Paddle ye-Wafer Processing eqaliswe yi-vet-china isebenzisa izixhobo ze-SiC eziphezulu zobugcisa ukuphucula ukusebenza kunye nokuchaneka kwe-wafer processing. I-Vet-china's cantilever paddle ibonakalisa ukumelana nobushushu obugqwesileyo kunye nokumelana nokugqwala, iqinisekisa ukusebenza ngokuzinzileyo kwe-wafer kwindawo yokuvelisa, iyenza ibe lolona khetho lufanelekileyo lokuphucula isivuno semveliso.

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Iinkcukacha zeMveliso

Iithegi zeMveliso

I-AdvancedISiC Cantilever Paddlekwi-Wafer Processing eyenziwe yi-vet-china ibonelela ngesisombululo esihle kakhulu sokwenziwa kwe-semiconductor. Le paddle cantilever yenziwe ngezinto zeSiC (silicon carbide), kunye nokuqina kwayo okuphezulu kunye nokumelana nobushushu kuyenza ikwazi ukugcina ukusebenza okugqwesileyo kubushushu obuphezulu kunye neendawo ezinobungozi. Uyilo lweCantilever Paddle luvumela i-wafer ukuba ixhaswe ngokuthembekileyo ngexesha lokucubungula, ukunciphisa umngcipheko wokuqhekeka kunye nomonakalo.

ISiC Cantilever Paddlelicandelo elikhethekileyo elisetyenziswa kwizixhobo zokuvelisa i-semiconductor ezifana ne-oxidation furnace, i-diffusion furnace, kunye nesithando somlilo, eyona nto isetyenziswayo kukulayishwa kwe-wafer kunye nokukhulula, ukuxhasa kunye nokuthutha ama-wafers ngexesha leenkqubo zokushisa okuphezulu.

Izakhiwo eziqhelekileyoyeSiCcantileverpukongeza: isakhiwo se-cantilever, esisisigxina kwelinye icala kwaye sikhululekile kwelinye, ngokuqhelekileyo sinoyilo olucaba kunye ne-paddle-like.

Amandla e-VET asebenzisa ukucoceka okuphezulu kwakhona kwe-silicon carbide izinto zokuqinisekisa umgangatho.

Iimpawu ezibonakalayo zeRecrystallized Silicon Carbide
Ipropati	Ixabiso eliqhelekileyo
Ubushushu bokusebenza (°C)	1600°C (neoksijini), 1700°C (ukunciphisa okusingqongileyo)
Umxholo weSiC	> 99.96%
Isiqulatho sasimahla Si	< 0.1%
Unizi lolwapho kuyiwa khona	2.60-2.70 g / cm³
I-porosity ebonakalayo	< 16%
Amandla oxinzelelo	> 600MPa
Amandla okugoba okubandayo	80-90 MPa (20°C)
Amandla okugoba ashushu	90-100 MPa (1400°C)
Ukwandiswa kweThermal @1500°C	4.70 10^-6/°C
I-Thermal conductivity @1200°C	23W/m•K
Imodyuli ye-elastic	240 GPA
Ukuxhathisa ukothuka kwe-thermal	Ulunge kakhulu