Seketsoana sa kristale sa Silicon Carbide bakeng sa indasteri ea semiconductor

Tlhaloso e Khutšoanyane:

VET Energy Recrystallized Silicon Carbide Crystal Boat ke sehlahisoa se sebetsang hantle se etselitsoeng ho fana ka ts'ebetso e tsitsitseng le e tšepahalang ka nako e telele.E na le ho hanyetsa mocheso o motle haholo le ho tšoana ha mocheso, bohloeki bo phahameng, ho hanyetsa khoholeho ea mobu, e leng se etsang hore e be tharollo e phethahetseng bakeng sa lisebelisoa tsa ho lokisa li-wafer.


Lintlha tsa Sehlahisoa

Li-tag tsa Sehlahisoa

Thepa ea recrystallized silicon carbide

Recrystallized silicon carbide (R-SiC) ke sesebelisoa se sebetsang hantle se nang le boima ba bobeli ho daemane, se entsoeng ka mocheso o phahameng ka holimo ho 2000 ℃.E na le lisebelisoa tse ngata tse ntle tsa SiC, joalo ka matla a mocheso o phahameng, khanyetso e matla ea kutu, khanyetso e ntle ea oxidation, ho hanyetsa mocheso o motle joalo-joalo.

● Lintho tse entsoeng ka bokhabane.Recrystallized silicon carbide e na le matla a phahameng le ho satalla ho feta carbon fiber, khanyetso e matla, e ka bapala ts'ebetso e ntle maemong a mocheso o feteletseng, e ka bapala ts'ebetso e ntle ea ho hanyetsa maemong a fapaneng.Ho phaella moo, e boetse e na le ho feto-fetoha ha maemo hantle 'me ha e senyehe habonolo ka ho otlolla le ho koba, e leng ho ntlafatsang haholo ts'ebetso ea eona.

● Ho hanyetsa ho bola ho hoholo.Recrystallized silicon carbide e na le khanyetso e phahameng ea kutu ho mefuta e fapaneng ea mecha ea litaba, e ka thibela khoholeho ea mefuta e mengata ea mecha ea phatlalatso e senyang, e ka boloka thepa ea eona ea mechine ka nako e telele, e na le ho khomarela ka matla, e le hore e be le bophelo bo bolelele ba tšebeletso.Ho phaella moo, e boetse e na le botsitso bo botle ba mocheso, e ka ikamahanya le mefuta e itseng ea liphetoho tsa mocheso, e ntlafatsa phello ea eona ea kopo.

● Sintering ha e fokotsehe.Hobane ts'ebetso ea sintering ha e fokotsehe, ha ho khatello e setseng e tla baka deformation kapa ho phunyeha ha sehlahisoa, 'me likarolo tse nang le libopeho tse rarahaneng le ho nepahala ho phahameng li ka lokisoa.

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重结晶碳化硅物理特性

Thepa ea 'mele ea Recrystallized Silicon Carbide

性质 / Thepa

典型数值 / Boleng bo Tlwaelehileng

使用温度/ Mocheso oa ho sebetsa (°C)

1600°C (ka oksijene), 1700°C (ho fokotsa tikoloho)

SiC含量/ Likahare tsa SiC

99.96%

自由Si含量/ Likahare tsa Si mahala

<0.1%

体积密度/Boima ba bongata

2.60-2.70 g/cm3

气孔率/ Porosity e bonahalang

<16%

抗压强度/ Matla a ho hatella

> 600MPa

常温抗弯强度/Matla a ho kobeha a batang

80-90 MPa (20°C)

高温抗弯强度Matla a ho kobeha a chesang

90-100 MPa (1400°C)

热膨胀系数/ Katoloso ea mocheso @1500°C

4.70 10-6/°C

导热系数/Thermal conductivity @1200°C

23W/m•K

杨氏模量/ Modulase wa mothapo

240 GPA

抗热震性/ Ho hanyetsa mocheso oa mocheso

E ntle haholo

VET Energy ke moetsi oa 'nete oa lihlahisoa tse ikhethileng tsa graphite le silicon carbide tse nang le CVD coating, e ka fanang ka likarolo tse fapaneng tse ikhethileng bakeng sa indasteri ea semiconductor le photovoltaic.Sehlopha sa rona sa tekheniki se tsoa litsing tse phahameng tsa lipatlisiso tsa lapeng, se ka u fa litharollo tsa lisebelisoa tse eketsehileng bakeng sa hau.

Re ntse re tsoela pele ho nts'etsapele lits'ebetso tse tsoetseng pele ho fana ka lisebelisoa tse tsoetseng pele, 'me re entse theknoloji e ikhethileng e nang le tokelo ea molao, e ka etsang hore maqhama lipakeng tsa pente le substrate e tiee le hore e se ke ea oela habonolo.

Re u amohela ka mofuthu hore u etele feme ea rona, ha re buisaneng ka ho eketsehileng!

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