CVD Silicon Carbide Coating MOCVD Susceptor

Tlhaloso e Khutšoanyane:

VET Energy SiC Coated MOCVD Susceptor ke sehlahisoa se sebetsang hantle se etselitsoeng ho fana ka ts'ebetso e tsitsitseng le e tšepahalang ka nako e telele. E na le ho hanyetsa mocheso o motle haholo le ho tšoana ha mocheso, bohloeki bo phahameng, ho hanyetsa khoholeho ea mobu, e leng se etsang hore e be tharollo e phethahetseng bakeng sa lisebelisoa tsa ho lokisa li-wafer.

Sebaka sa Tšimoloho:Zhejiang, China (Bohareng)

Nomoro ea Mohlala:Boat3002

Sebopeho sa Lik'hemik'hale:SiC e koahetsoeng ka graphite

Ho hanyetsa Motlakase:11 μΩm

Bothata ba Lebōpo: 58

Thermal Conductivity:116 W/mK (100 kcal/mhr-℃)

Mohlala:E fumaneha

Khoutu ea HS:6903100000

Lebitso la Brand:VET

Tekano:1.85 g/cm3

Flexural Strength:49 MPa

Molora: <5ppm

Boleng:E phethahetseng

Kopo:Semiconductor /Photovoltaic

Re romelle lengolo-tsoibila Khoasolla e le PDF

Lintlha tsa Sehlahisoa

Li-tag tsa Sehlahisoa

Matla a VETSiC Coated MOCVD Susceptorke sehlahisoa se sebetsang hantle haholo se etselitsoeng ts'ebetso e ts'oanang le e ts'epahalang lits'ebetsong tsa ts'ebetso ea wafer. E na le motho ea phahamengHo roala ha SiC, e fana ka khanyetso e ikhethang ea mocheso, ho tšoana ha mocheso, le ho hanyetsa ho bola. E loketseng bakeng saLisebelisoa tsa MOCVD, senasusceptor e entsoeng ka silicon carbidee etsa bonnete ba hore e nepahetsesephaphathakholo le ho atolosoa ha lisebelisoa tsa bophelo.

Lintlha tsa Sehlahisoa:

1. Mocheso o phahameng oa ho hanyetsa oxidation ho fihlela ho 1700 ℃: Seaparo sa rona sa SiC se fana ka botsitso bo ikhethang ba mocheso, esita le libakeng tse hlokang ka ho fetisisa tsa MOCVD.

2. Bohloeki bo phahameng le ho tšoana ha mocheso: The silicon carbide susceptor e tiisa litšila tse fokolang le ho futhumatsa ho tsitsitseng ho pholletsa le sephaphatha, ho netefatsa boleng bo phahameng ba kristale.

3. Excellent corrosion resistance: E hanana le li-acids, alkalis, matsoai le li-organic reagents, susceptor ea rona e boloka botšepehi ba eona libakeng tse fapaneng tsa lik'hemik'hale.

4. Ho thatafala ho phahameng, bokaholimo bo teteaneng, le likaroloana tse ntle: Thepa ena e kenya letsoho bophelong bo bolelele ba ts'ebeletso le ho tšoarella ho matlafalitsoeng.

Melemo le Likopo tsa rona tsa CVD silicon carbide

Li-susceptors tsa MOCVD li fana ka melemo ea bohlokoa tlhahisong ea semiconductor. Ho roala ha SiC ho ntlafatsa boleng ba wafer, ho fokotsa likoli, le ho ntlafatsa katleho ea tlhahiso. VET Energy e fana ka mefuta e mengata ea lihlahisoa tsa silicon carbide tse lumellanang le litlhoko tse khethehileng tsa indasteri ea semiconductor le photovoltaic.

Tlhahiso ea Sehlahisoa le Tšehetso ea Theknoloji

E le moetsi ea ka sehloohong oa silicon carbide le lihlahisoa tsa graphite, VET Energy e fana ka litharollo tse ikhethileng ka liphahlo tse fapaneng tse kang SiC, TaC, carbony carbon, le pyrolytic carbon. Sehlopha sa rona se nang le boiphihlelo se ka fana ka tataiso ea litsebi le ts'ehetso bakeng sa ts'ebeliso ea hau e ikhethileng.