PECVD Graphite Wafer Support

Tlhaloso e Khutšoanyane:

E etselitsoe ho nepahala le ts'ebetso, Ts'ehetso ea Graphite Wafer ea VET Energy ke sesebelisoa se loketseng ho sebelisoa ts'ebetsong e tsoetseng pele ea liphaephe, moo botsitso bo phahameng ba mocheso le ts'ebetso e tsitsitseng li leng bohlokoa. Hore na o sebetsa ka li-wafers tsa semiconductor kapa li-substrates tse ling tse pshatlehang, ts'ehetso ena ea boleng bo holimo ea graphite e tla ntlafatsa ts'epo ea ts'ebetso ea hau le boleng ba sehlahisoa, e e etse karolo ea bohlokoa bakeng sa tlhahiso ea sejoale-joale.

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Lintlha tsa Sehlahisoa

Li-tag tsa Sehlahisoa

VET Energy PECVD process graphite wafer support is a core consumable for PECVD (plasma enhanced chemical vapor deposition) tshebetso. Sehlahisoa sena se entsoe ka lisebelisoa tse phahameng tsa graphite tse nang le bohloeki bo phahameng, tse nang le mocheso o phahameng o phahameng oa ho hanyetsa, ho hanyetsa kutu, botsitso ba dimensional le litšoaneleho tse ling, li ka fana ka sethala sa tšehetso se tsitsitseng bakeng sa ts'ebetso ea PECVD, ho etsa bonnete ba ho lumellana le ho bata ha filimi.

Moralo oa "graphite support" oa tšehetso ea VET Energy graphite wafer e ke ke ea ts'ehetsa sephaphatha ka katleho feela, empa hape e fana ka botsitso ba mocheso mochesong o phahameng le khatello e phahameng ea PECVD ho netefatsa botsitso ba ts'ebetso.

Ts'ehetso ea VET Energy PECVD ea graphite wafer e na le litšobotsi tse latelang:

▪Bohloeki bo phahameng:lintho tse litšila tse tlase haholo, qoba ho silafala ha filimi, ho netefatsa boleng ba filimi.

▪Boima bo phahameng:phahameng segokanyipalo, phahameng mechine matla, ka mamella mocheso phahameng le khatello e phahameng PECVD tikoloho.

▪Botsitso bo botle ba dimensional:liphetoho tse nyane tsa dimensional mocheso o phahameng ho netefatsa botsitso ba ts'ebetso.

▪Thermal conductivity e ntle haholo:ka katleho fetisetsa mocheso ho thibela sephaphatha overheating.

▪Khanyetso e matla ea kutu:E khona ho hanela khoholeho ka likhase tse fapaneng tse senyang le plasma.

▪Litšebeletso tse ikhethileng:Litafole tsa tšehetso tsa graphite tsa boholo bo fapaneng le libopeho li ka etsoa ho latela litlhoko tsa bareki.

Lintho tsa graphite tse tsoang ho SGL:

Paramethara e tloaelehileng: R6510
Index	Tekanyetso ea teko	Boleng	Yuniti
Karolelano ea boholo ba lijo-thollo	ISO 13320	10	μm
Boima ba bongata	DIN IEC 60413/204	1.83	g/cm³
Porosity e bulehileng	DIN66133	10	%
Boholo ba pore e mahareng	DIN66133	1.8	μm
Permeability	DIN 51935	0.06	cm²/s
Rockwell hardness HR5/100	DIN IEC60413/303	90	HR
Resistivity e khethehileng ea motlakase	DIN IEC 60413/402	13	μΩm
Matla a flexural	DIN IEC 60413/501	60	MPa
Matla a hatellang	DIN 51910	130	MPa
Module oa bacha	DIN 51915	11.5×10³	MPa
Katoloso ea mocheso (20-200 ℃)	DIN 51909	4.2X10^-6	K^-1
Thermal conductivity (20 ℃)	DIN 51908	105	Wm^-1K^-1

E etselitsoe ka ho khetheha bakeng sa tlhahiso ea lisele tsa letsatsi tse sebetsang hantle haholo, tse tšehetsang ts'ebetso ea G12 ea boholo bo boholo. Moralo o ntlafalitsoeng oa sepalangoang o eketsa ts'ebetso haholo, o nolofalletsa litefiso tse phahameng tsa tlhahiso le litšenyehelo tse tlase tsa tlhahiso.

Ntho	Mofuta	Nomoro ea sepalangoang
PEVCD Grephite sekepe - Letoto la 156	156-13 sekepe sa grephite	144
	156-19 sekepe sa grephite	216
	156-21 sekepe sa grephite	240
	156-23 sekepe sa graphite	308
PEVCD Grephite sekepe - Letoto la 125	125-15 sekepe sa grephite	196
	125-19 sekepe sa grephite	252
	125-21 sekepe sa grphite	280