MOCVD Substrate HeaterLintho tse futhumatsang bakeng sa MOCVD,
heater ea graphite, Semiconductor ea graphite, heater, MOCVD Substrate Heater,
MOCVD Substrate Heater, Lisebelisoa tsa ho futhumatsa bakeng sa MOCVD
Graphiteheater:
Theheater ea graphitelikarolo li sebelisoa seboping se phahameng sa mocheso se nang le mocheso o fihlileng ho likhato tse 2200 sebakeng sa vacuum le likhato tse 3000 sebakeng sa khase e nang le deoxidized le e kentsoeng.
Likarolo tse ka sehloohong tsaheater ea graphite:
1. ho tšoana ha mohaho oa ho futhumatsa.
2. conductivity e ntle ea motlakase le mojaro o phahameng oa motlakase.
3. ho hanyetsa kutu.
4. inoxidizability.
5. bohloeki bo phahameng ba lik'hemik'hale.
6. matla a phahameng a mechine.
Molemo ke matla a matla, boleng bo phahameng le tlhokomelo e tlaase.
Re ka hlahisa anti-oxidation le nako e telele ea bophelo ba graphite crucible, hlobo ea graphite le likarolo tsohle tsa heater ea graphite.
Lintlha tse ka sehloohong tsa heater ea graphite:
Tlhaloso ea Setsebi | VET-M3 |
Boima ba Bongata (g/cm3) | ≥1.85 |
Litaba tsa molora (PPM) | ≤500 |
Bothata ba Lebopo | ≥45 |
Khanyetso e Khethehileng (μ.Ω.m) | ≤12 |
Flexural Strength (Mpa) | ≥40 |
Compressive Strength (Mpa) | ≥70 |
Max. Boholo ba Mabele (μm) | ≤43 |
Coefficient of Thermal Katoloso Mm/°C | ≤4.4 * 10-6 |
Mofuthu oa graphite bakeng sa sebōpi sa motlakase o na le thepa ea ho hanyetsa mocheso, ho hanyetsa oxidation, conductivity e ntle ea motlakase le matla a molemo a mochine. Re ka sebelisa mefuta e fapaneng ea heater ea graphite ho latela meralo ea bareki.
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