Lihlahisoa tse Ncha tse Chesang ka Plasma e ntlafalitsoeng ea CVD Tube Furnace bakeng sa ho beha lifilimi tse thata tsa boleng bo holimo.

Tlhaloso e Khutšoanyane:


Lintlha tsa Sehlahisoa

Li-tag tsa Sehlahisoa

Ho fumana khotsofalo ea bareki ke morero oa k'hamphani ea rona ka ho sa feleng. Re tla etsa matsapa a makatsang a ho fumana litharollo tse ncha le tsa boleng bo holimo, ho kopana le lintlha tsa hau tse ikhethileng, 'me re u fe bafani ba thekiso ea pele, ba rekisetsoang le ka mor'a ho rekisoa bakeng sa Hot New Products Plasma Enhanced CVD Tube Furnace for Deposition of High- Lifilimi tse Thata tsa Boleng, Amohela potso ea hau, litšebeletso tse ntle haholo li tla fanoa ka pelo e felletseng.
Ho fumana khotsofalo ea bareki ke morero oa k'hamphani ea rona ka ho sa feleng. Re tla etsa matsapa a matla a ho fumana litharollo tse ncha le tsa boleng bo holimo, ho kopana le litlhaloso tsa hau tse ikhethileng le ho u fa barekisi ba pele ba thekiso, ba rekisoang le ba morao-rao ba fanang ka litšebeletso tsa bona.China CVD Tube Furnace le CVD Tube Furnace Chemical Vapor Deposition, 'marakeng o ntseng o eketseha oa tlhōlisano, Ka thepa ea boleng bo phahameng ea tšebeletso e tšepahalang le botumo bo loketseng, kamehla re fa bareki tšehetso linthong le mekhoa ea ho finyella tšebelisano ea nako e telele. Ho phela ka boleng, nts'etsopele ka mokitlane ke sepheo sa rona sa ka ho sa feleng, Re lumela ka tieo hore kamora ketelo ea hau re tla ba balekane ba nako e telele.

Tlhaloso ea Sehlahisoa

Lisebelisoa tsa carbon / carbon(eo ka mor'a moo e bitsoang "C / C kapa CFC") ke mofuta oa lintho tse entsoeng ka motsoako o thehiloeng holim'a carbon le ho matlafatsoa ke carbon fiber le lihlahisoa tsa eona (carbon fiber preform). E na le inertia ea carbon le matla a phahameng a carbon fiber. E na le thepa e ntle ea mochini, ho hanyetsa mocheso, ho hanyetsa kutu, ho fokotsa likhohlano le litšobotsi tsa motlakase le tsa motlakase.

CVD-SiCbarbotage na le litšobotsi tsa sebopeho junifomo, thepa diseke ee, phahameng mocheso hanyetsa, khanyetso oxidation, bohloeki phahameng, acid & alkali ho hanyetsa le reagent manyolo, le thepa e tsitsitseng 'meleng le lik'hemik'hale.

Ha ho bapisoa le lisebelisoa tse phahameng tsa graphite, graphite e qala ho oxidize ho 400C, e tla baka tahlehelo ea phofo ka lebaka la oxidation, e leng se bakang tšilafalo ea tikoloho ho lisebelisoa tsa peripheral le likamore tsa vacuum, le ho eketsa litšila tsa tikoloho e hloekileng.

Leha ho le joalo, ho roala ha SiC ho ka boloka botsitso ba 'mele le lik'hemik'hale ka likhato tse 1600, E sebelisoa haholo indastering ea sejoale-joale, haholo indastering ea semiconductor.

Khamphani ea rona e fana ka lits'ebeletso tsa ts'ebetso ea ho roala SiC ka mokhoa oa CVD holim'a graphite, li-ceramics le lisebelisoa tse ling, e le hore likhase tse khethehileng tse nang le carbon le silicon li sebetsane le mocheso o phahameng ho fumana limolek'hule tsa SiC tse hloekileng, limolek'hule tse behiloeng holim'a thepa e koahetsoeng, ho etsa lera la tšireletso la SIC. SIC e entsoeng e tlamahane ka thata ho setsi sa graphite, e fana ka lisebelisoa tse khethehileng tsa graphite, kahoo e etsa hore bokaholimo ba graphite bo kopane, bo se ke ba e-ba le Porosity, ho hanyetsa mocheso o phahameng, ho hanyetsa kutu le ho hanyetsa oxidation.

 SiC coating process on graphite surface MOCVD susceptors

Lintlha tse ka sehloohong:

1. Ho hanyetsa mocheso o phahameng oa oxidation:

khanyetso ea oxidation e ntse e le ntle haholo ha mocheso o le holimo ho 1600 C.

2. Bohloeki bo phahameng: bo entsoeng ka ho kenngoa ha mouoane oa lik'hemik'hale tlas'a boemo bo phahameng ba mocheso oa chlorination.

3. Ho hanyetsa khoholeho ea mobu: boima bo phahameng, bokaholimo bo kopanetsoeng, likaroloana tse ntle.

4. Ho hanyetsa kutu: acid, alkali, letsoai le li-reagents tse phelang.

 

Lintlha tse ka sehloohong tsa CVD-SIC Coatings:

SiC-CVD

Botenya

(g/cc)

3.21

Matla a flexural

(Mpa)

470

Katoloso ea mocheso

(10-6/K)

4

Thermal conductivity

(W/mK)

300

Litšoantšo tse qaqileng

SiC coating process on graphite surface MOCVD susceptorsSiC coating process on graphite surface MOCVD susceptorsSiC coating process on graphite surface MOCVD susceptorsSiC coating process on graphite surface MOCVD susceptorsSiC coating process on graphite surface MOCVD susceptors

Lintlha tsa Khampani

111

Lisebelisoa tsa Feme

222

Sebaka sa polokelo

333

Setifikeiti

Setifikeiti22

 


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