E Tsoetseng PeleSiC Cantilever Paddlebakeng sa Wafer Processing e entsoeng ke vet-china e fana ka tharollo e babatsehang bakeng sa tlhahiso ea semiconductor. Seketsoana sena sa cantilever se entsoe ka thepa ea SiC (silicon carbide), 'me ho thatafala ha eona ho phahameng le ho hanyetsa mocheso ho etsa hore e boloke ts'ebetso e ntle haholo mochesong o phahameng le libakeng tse senyang. Moqapi oa Cantilever Paddle o lumella sephaphatha hore se tšehetsoe ka mokhoa o ts'eptjoang nakong ea ts'ebetso, ho fokotsa kotsi ea ho arohana le ho senyeha.
SiC Cantilever Paddleke karolo e ikhethileng e sebelisoang lisebelisoa tsa tlhahiso ea semiconductor joalo ka sebopi sa oxidation, sebōpi sa diffusion, le sebōpi sa annealing, ts'ebeliso ea mantlha ke ho kenya le ho laolla liphaephe, ho ts'ehetsa le ho tsamaisa liphaphatha nakong ea ts'ebetso ea mocheso o phahameng.
Mehaho e tloaelehilengeaSiCcantileverptlatseletsa: mohaho oa cantilever, o tsitsitseng pheletsong e 'ngoe' me o lokolohile ho e 'ngoe, hangata o na le moralo o bataletseng le o kang oa paddle.
VET Energy e sebelisa lisebelisoa tse phahameng tsa silicon carbide tse hloekileng ho netefatsa boleng.
| Thepa ea 'mele ea Recrystallized Silicon Carbide | |
| Thepa | Boleng bo Tlwaelehileng |
| Mocheso oa ho sebetsa (°C) | 1600°C (ka oksijene), 1700°C (ho fokotsa tikoloho) |
| Likahare tsa SiC | 99.96% |
| Free Si content | <0.1% |
| Boima ba bongata | 2.60-2.70 g/cm3 |
| porosity e bonahalang | <16% |
| Matla a ho hatella | > 600MPa |
| Matla a ho kobeha a batang | 80-90 MPa (20°C) |
| Matla a ho kobeha a chesang | 90-100 MPa (1400°C) |
| Katoloso ea mocheso @1500°C | 4.70 10-6/°C |
| Thermal conductivity @1200°C | 23W/m•K |
| Elastic modulus | 240 GPA |
| Ho hanyetsa mocheso oa mocheso | E ntle haholo |
Melemo ea VET Energy's Advanced SiC Cantilever Paddle for Wafer Processing ke:
-Botsitso bo phahameng ba mocheso: bo ka sebelisoa libakeng tse ka holimo ho 1600 ° C;
- Coefficient e tlase ea katoloso ea mocheso: e boloka botsitso ba sebopeho, e fokotsa kotsi ea wafer warpage;
-Bohloeki bo phahameng: kotsi e tlaase ea ho silafala ha tšepe;
-Irtness ea lik'hemik'hale: e thibelang kutu, e loketse libaka tse fapaneng tsa khase;
-Matla a phahameng le boima ba 'mele: Ho se sebetse, bophelo bo bolelele ba tšebeletso;
-Mocheso o motle oa mocheso: o thusa ho futhumala ka mokhoa o ts'oanang oa sephaphatha.
-
6 Inch N Mofuta oa SiC Wafer
-
Ho roala ha Tantalum carbide: ho sa senyehe, ho phahameng ...
-
24v Hydrogen Fuel Cell Pemfc Stack 1000w Hydrog...
-
Sesebelisoa sa Phepelo ea Matla a Hydrogen 220W Fuel Cel...
-
Hydrogen Fuel Cell 2000w Pemfc Stack 25v Drone ...
-
Metsoako e Tloaelehileng ea Matla a Phahameng a C/C (CFC)