4 inch GaN oo saaran SiC Wafer

Sharaxaad Gaaban:

VET Energy's 4-inch GaN on wafer SiC waa wax soo saarka kacaanka ee goobta korontada. Waferkan waxa uu isku daraa kulaylka wanaagsan ee silikoon carbide (SiC) oo leh cufnaanta awooda sare iyo luminta gallium nitride (GaN), taas oo ka dhigaysa doorasho ku haboon samaynta soo noqnoqoshada sare, aaladaha awooda sare leh. Tamarta VET waxay hubisaa waxqabadka wanaagsan iyo joogteynta waferka iyada oo loo marayo tignoolajiyada sare ee MOCVD epitaxial.

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Faahfaahinta Alaabta

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Khadka wax soo saarka VET Energy kuma koobna GaN ee waferrada SiC. Waxaan sidoo kale bixinnaa agabyo kala duwan oo ah substrate-ka, oo ay ku jiraan Si Wafer, Substrate SiC, SOI Wafer, SiN Substrate, Epi Wafer, iwm. Wafer, si loo daboolo baahida warshadaha elektiroonigga mustaqbalka ee aaladaha waxqabadka sare.

VET Energy waxay bixisaa adeegyo is-beddelid dabacsan, waxayna habayn kartaa lakabyada epitaxial GaN ee dhumucdooda kala duwan, noocyada kala duwan ee doping-ka, iyo cabbirrada waferka ee kala duwan iyadoo loo eegayo baahiyaha gaarka ah ee macaamiisha. Intaa waxaa dheer, waxaan sidoo kale bixinnaa taageero farsamo oo xirfad leh iyo adeegga iibka kadib si aan uga caawino macaamiisha inay si dhakhso ah u horumariyaan qalabka elektiroonigga ah ee wax-qabadka sare leh.

QEEXIDDA WAFERING

*n-Pm=n-nooca Pm-Grade,n-Ps=n-nooca Ps-Grade,Sl=Semi-lnsulating

Shayga	8-inch	6-inch			4-inji
Shayga	nP	n-Pm	n-Ps	SI	SI
TTV(GBIR)	≤6um	≤6um
Qaanso(GF3YFCD) -Qiimaha saxda ah	≤15μm	≤15μm	≤25μm		≤15μm
Warp(GF3YFER)	≤25μm	≤25μm	≤40μm		≤25μm
LTV(SBIR)-10mmx10mm	<2μm
Wafer Edge	Beveling

DHULKA DHAMMAAN

*n-Pm=n-nooca Pm-Grade,n-Ps=n-nooca Ps-Grade,Sl=Semi-lnsulating

Shayga	8-inch	6-inch			4-inji
	nP	n-Pm	n-Ps	SI	SI
Dhamaystir dusha sare	Polish indhaha laba-geesoodka ah,Si- Waji CMP
Dusha sareynta	(10um x 10um) Si-FaceRa≤0.2nm C-Waji Ra≤ 0.5nm			(5umx5um) Si-Face Ra≤0.2nm C-Face Ra≤0.5nm
Chips Edge	Midna Lama ogola (dhererka iyo ballaca≥0.5mm)
Indents	Midna lama ogola
xoqid (Si-Waji)	Qty.≤5, Wadar ah Dhererka≤0.5× dhexroorka wafer	Qty.≤5, Wadar ah Dhererka≤0.5× dhexroorka wafer			Qty.≤5, Wadar ah Dhererka≤0.5× dhexroorka wafer
dildilaaca	Midna lama ogola
Ka saarida gees	3mm