Khadka wax soo saarka VET Energy kuma koobna waferrada silikoon. Waxa kale oo aanu bixinaa agabka substrate-ka ee kala duwan, oo ay ku jiraan SiC Substrate, SOI Wafer, SiN Substrate, Epi Wafer, iwm., iyo sidoo kale agabka cusub ee bandgap semiconductor sida Gallium Oxide Ga2O3 iyo AlN Wafer. Alaabooyinkani waxay dabooli karaan baahida codsiga macaamiisha kala duwan ee korontada, inta jeer ee raadiyaha, dareemayaasha iyo goobaha kale.
Goobaha codsiga:
•Wareegyada isku dhafan:Sida maaddada aasaasiga ah ee wax soo saarka isku-dhafka ah ee isku-dhafka ah, P-nooca silikoon wafers ayaa si ballaaran loogu isticmaalaa wareegyada macquulka ah ee kala duwan, xusuusta, iwm.
•Qalabka korontadaWaferrada silikoon ee nooca P-ga ah waxaa loo isticmaali karaa in lagu sameeyo aaladaha korontada sida transistor-ka korontada iyo diodka.
•Dareemayaasha:Waferrada Silikon ee nooca P-ga ah waxaa loo isticmaali karaa in lagu sameeyo noocyo kala duwan oo dareemayaasha, sida dareemayaasha cadaadiska, dareemayaasha heerkulka, iwm.
•Unugyada qorraxda:Waferrada silikon ee nooca P waa qayb muhiim ah oo ka mid ah unugyada qorraxda.
Tamarta VET waxay siisaa macaamiisha xalal loo habeeyey, waxayna u habayn kartaa waferrada leh iska caabin kala duwan, oksijiin kala duwan, dhumuc kala duwan iyo tilmaamo kale iyadoo loo eegayo baahiyaha gaarka ah ee macaamiisha. Intaa waxaa dheer, waxaan sidoo kale ku siin taageero farsamo xirfadeed iyo adeegga iibka ka dib si ay u caawiyaan macaamiisha xaliyaan dhibaatooyin kala duwan oo ay la kulmaan habka wax soo saarka.
QEEXIDDA WAFERING
*n-Pm=n-nooca Pm-Grade,n-Ps=n-nooca Ps-Grade,Sl=Semi-lnsulating
Shayga | 8-inch | 6-inch | 4-inji | ||
nP | n-Pm | n-Ps | SI | SI | |
TTV(GBIR) | ≤6um | ≤6um | |||
Qaanso(GF3YFCD) -Qiimaha saxda ah | ≤15μm | ≤15μm | ≤25μm | ≤15μm | |
Warp(GF3YFER) | ≤25μm | ≤25μm | ≤40μm | ≤25μm | |
LTV(SBIR)-10mmx10mm | <2μm | ||||
Wafer Edge | Beveling |
DHULKA DHAMMAAN
*n-Pm=n-nooca Pm-Grade,n-Ps=n-nooca Ps-Grade,Sl=Semi-lnsulating
Shayga | 8-inch | 6-inch | 4-inji | ||
nP | n-Pm | n-Ps | SI | SI | |
Dhamaystir dusha sare | Polish indhaha laba-geesoodka ah,Si- Waji CMP | ||||
Dusha sareynta | (10um x 10um) Si-FaceRa≤0.2nm | (5umx5um) Si-Face Ra≤0.2nm | |||
Chips Edge | Midna Lama ogola (dhererka iyo ballaca≥0.5mm) | ||||
Indents | Midna lama ogola | ||||
xoqid (Si-Waji) | Qty.≤5, Wadar ah | Qty.≤5, Wadar ah | Qty.≤5, Wadar ah | ||
dildilaaca | Midna lama ogola | ||||
Ka saarida gees | 3mm |