Features:
· Yakanakisa Thermal Shock Resistance
· Yakanakisa Physical Shock Resistance
· Yakanakisa Chemical Resistance
· Super High Kuchena
· Kuwanikwa muComplex Shape
·Inoshandiswa pasi peOxidizing Atmosphere
Application:
Zvigadzirwa uye Zvakanakira:
1. Superior Thermal Resistance:Nekuchena kwepamusoroSiC coating, iyo substrate inomira kutonhora kwakanyanya, kuve nechokwadi chekushanda kwakafanana munzvimbo dzinoda senge epitaxy uye semiconductor kugadzira.
2. Enhanced Durability:Iyo SiC yakavharwa magirafu zvikamu zvakagadzirirwa kuramba makemikari ekuora uye oxidation, ichiwedzera hupenyu hweiyo substrate kana ichienzaniswa neyakajairwa graphite substrates.
3. Vitreous Coated Graphite:Iyo yakasarudzika vitreous chimiro cheSiC coatinginopa yakanakisa kuoma kwepamusoro, kuderedza kusakara uye kubvarura panguva yekupisa-yepamusoro kugadzirisa.
4. High Purity SiC Coating:Yedu substrate inovimbisa kushomeka kusvibiswa mune inonzwisisika semiconductor maitiro, ichipa kuvimbika kune maindasitiri anoda kusimba kwezvinhu kuchena.
5. Wide Market Application:TheSiC yakavharwa graphite susceptormusika unoramba uchikura sekudiwa kwezvigadzirwa zvepamberi zveSiC zvakavharwa mukugadzira semiconductor zvichiwedzera, ichimisa iyi substrate sechinhu chakakosha mumusika wegraphite wafer carrier musika uye silicon carbide yakavharwa graphite trays musika.
Yakajairika Properties yeBase Graphite Material:
Inooneka Density: | 1.85 g/cm3 |
Electrical Resistivity: | 11 μΩm |
Flexural Strenth: | 49 MPa (500kgf/cm2) |
Shore Hardness: | 58 |
Madota: | <5ppm |
Thermal Conductivity: | 116 W/mK (100 kcal/mhr-℃) |
CVD SiC薄膜基本物理性能 Basic zvemuviri zvimiro zveCVD SiCcoating | |
性质 / Property | 典型数值 / Typical Value |
晶体结构 / Crystal Structure | FCC β phase 多晶,主要為(111)取向) |
密度 / Density | 3.21 g/cm³ |
硬度 / Kuoma | 2500 维氏硬度 (500g mutoro) |
晶粒大小 / Grain SiZe | 2~10μm |
纯度 / Chemical Purity | 99.99995% |
热容 / Heat Capacity | 640 J·kg-1·K-1 |
升华温度 / Sublimation Temperature | 2700 ℃ |
抗弯强度 / Flexural Strength | 415 MPa RT 4-poindi |
杨氏模量 / Young's Modulus | 430 Gpa 4pt bend, 1300 ℃ |
导热系数 / Thermal Conductivity | 300Wm-1·K-1 |
热膨胀系数 / Thermal Expansion(CTE) | 4.5 × 10-6K-1 |
VET Energy ndiyo chaiyo inogadzira yakagadziridzwa magirafu uye silicon carbide zvigadzirwa zvine machira akasiyana seSiC coating, TaC coating, girazi kabhoni coating, pyrolytic kabhoni coating, nezvimwewo, inogona kupa akasiyana akagadziridzwa zvikamu zve semiconductor uye photovoltaic indasitiri.
Chikwata chedu chehunyanzvi chinobva kumasangano epamusoro ekutsvagisa dzimba, anogona kukupa mamwe hunyanzvi zvigadziriso zvekushandisa kwauri.
Isu tinoramba tichigadzira maitiro epamberi ekupa zvimwe zvepamberi zvinhu, uye takagadzira yakasarudzika tekinoroji, iyo inogona kuita kuti chisungo pakati pekupotera neiyo substrate ive yakasimba uye isinganyanye kubatwa.
Tikugashirei noushamwari kuti ushanyire fekitari yedu, ngativei neimwe hurukuro!