SiC Coating Carrier YeRTP/RTA

Tsanangudzo Pfupi:

VET Energy SiC Coating Carrier YeRTP/RTA chigadzirwa chepamusoro chakagadzirirwa kupa kunoenderana uye kwakavimbika kuita kwenguva yakareba. Iyo ine yakanyanya kunaka kupisa kupisa uye kufananidzwa kwekupisa, kuchena kwepamusoro, kusamira kwevhu, zvichiita kuti ive mhinduro yakakwana yewafer processing application.

 

 


  • Nzvimbo Yekwakabva:China
  • Chimiro cheCrystal:FCCβphase
  • Density :3.21 g/cm;
  • Kuoma :2500 Vickers;
  • Saizi yezviyo:2~10μm;
  • Chemical Purity:99.99995%;
  • Heat Capacity :640J·kg-1·K-1;
  • Sublimation Temperature :2700 ℃;
  • Felexural Strength:415 Mpa (RT 4-Point);
  • Young's Modulus:430 Gpa (4pt bend, 1300 ℃);
  • Kuwedzera kweThermal (CTE):4.5 10-6K-1;
  • Thermal Conductivity:300 (W/MK);
  • Product Detail

    Product Tags

    SiC Coating Carrier YeRTP/RTA chinhu chakakosha chinoshandiswa mukugadzira semiconductor maitirwo anonzi Rapid Thermal Processing & Annealing, isu tinoshandisa tekinoroji yedu ine patent kugadzira iyo silicon carbide inotakura nekuchena kwakanyanya, kupfeka kwakanaka kuwirirana uye hupenyu hwesevhisi hwakanakisa, se pamwe nekukwirira kwemakemikari kusagadzikana uye kupisa kwekugadzikana kwezvinhu.

    Zvimiro zvezvigadzirwa zvedu:

    1. High tembiricha oxidation kuramba kusvika 1700 ℃.
    2. Kuchena kwepamusoro uye kufanana kwekupisa
    3. Yakanakisa corrosion resistance: acid, alkali, munyu uye organic reagents.

    4. Kuoma kwepamusoro, compact surface, yakanaka particles.
    5. Hupenyu hurefu hwebasa uye hunogara kwenguva refu

    CVD SiC薄膜基本物理性能

    Basic zvemuviri zvimiro zveCVD SiCcoating

    性质 / Property

    典型数值 / Typical Value

    晶体结构 / Crystal Mamiriro

    FCC β chikamu多晶,主要為(111)取向

    密度 / Density

    3.21 g/cm³

    硬度 / Kuoma

    2500 维氏硬度 (500g mutoro)

    晶粒大小 / Zviyo SiZe

    2~10μm

    纯度 / Kemikari Kuchena

    99.99995%

    热容 / Kupisa Kugona

    640 J·kg-1·K-1

    升华温度 / Sublimation Temperature

    2700 ℃

    抗弯强度 / Flexural Simba

    415 MPa RT 4-poindi

    杨氏模量 / Young's Modulus

    430 Gpa 4pt bend, 1300 ℃

    导热系数 / ThermalConductivity

    300Wm-1·K-1

    热膨胀系数 / Kuwedzera Kupisa (CTE)

    4.5 × 10-6K-1

    1

    2

    VET Energy ndiyo chaiyo inogadzira yakagadziridzwa magirafu uye silicon carbide zvigadzirwa zvine machira akasiyana seSiC coating, TaC coating, girazi kabhoni coating, pyrolytic kabhoni coating, nezvimwewo, inogona kupa akasiyana akagadziridzwa zvikamu zve semiconductor uye photovoltaic indasitiri.

    Chikwata chedu chehunyanzvi chinobva kumasangano epamusoro ekutsvagisa dzimba, anogona kukupa mamwe hunyanzvi zvigadziriso zvekushandisa kwauri.

    Isu tinoramba tichigadzira maitiro epamberi ekupa zvimwe zvepamberi zvinhu, uye takagadzira yakasarudzika tekinoroji, iyo inogona kuita kuti chisungo pakati pekupotera neiyo substrate ive yakasimba uye isinganyanye kubatwa.

    Tikugashirei noushamwari kuti ushanyire fekitari yedu, ngativei neimwe hurukuro!

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