PECVD Inorodha Tray Deposition Graphite Tray

PECVD Loading Tray Deposition Graphite Tray Featured Image

Tsanangudzo Pfupi

VET Energy's PECVD Loading Tray yakagadzirirwa kupa yakachengeteka uye kunyangwe tsigiro yewafers panguva yekuisa, kuvandudza kuenderana uye kunaka kweiyo deposition process. Nekupikisa kwayo kwakanyanya kupisa, iyo Graphite Tray inobatsira kuchengetedza nharaunda inodzorwa mukati memakamuri ePECVD, kuderedza njodzi yekusvibiswa uye kuve nechokwadi chepamusoro mashandiro ekuita.

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Product Detail

Product Tags

VET Energy PECVD yekurodha tireyi ndeye chaiyo inotakura yakagadzirirwa PECVD (plasma yakagadziridzwa kemikari vapor deposition) maitiro. Iyi yepamusoro-mhando yekuisa graphite tray yakagadzirwa nepamusoro-kuchena, yakakwirira-density graphite zvinhu. Iyo ine yakanakisa kupisa tembiricha kuramba, corrosion kuramba, dimensional kugadzikana uye humwe hunhu. Iyo inogona kupa yakagadzikana inotakura chikuva yePECVD maitiro uye ive nechokwadi chekufanana uye kupfava kwekuiswa kwefirimu.

VET Energy PECVD yekurodha matireyi anoshandiswa zvakanyanya mu semiconductor, photovoltaic, LED uye mamwe minda. Semuyenzaniso:

▪ Semiconductor: PECVD process ye semiconductor zvinhu zvakadai sesilicon wafers uye epitaxial wafers.

▪ Photovoltaic: PECVD process ye solar cell thin films.

▪ LED: PECVD maitiro e LED chips.

Product Advantages

▪Natsiridza mhando yefirimu:Ita shuwa yunifomu firimu kuiswa uye kuvandudza firimu mhando.

▪Wedzera hupenyu hwemidziyo:Yakanakisa corrosion kuramba, wedzera hupenyu hwesevhisi yePECVD michina.

▪Deredza mari yekugadzira:High-quality graphite trays inogona kuderedza chirairo uye kuderedza mari yekugadzira.

Graphite zvinhu kubva kuSGL:

Yakajairika parameter: R6510
Index	Test standard	Value	Unit
Avhareji yehukuru hwezviyo	ISO 13320	10	μm
Bulk density	DIN IEC 60413/204	1.83	g/cm³
Open porosity	DIN66133	10	%
Medium pore size	DIN66133	1.8	μm
Permeability	DIN 51935	0.06	cm²/s
Rockwell kuoma HR5/100	DIN IEC60413/303	90	HR
Yakananga magetsi resistivity	DIN IEC 60413/402	13	μΩm
Flexural simba	DIN IEC 60413/501	60	MPa
Kudzvinyirira simba	DIN 51910	130	MPa
Young's modulus	DIN 51915	11.5 × 10³	MPa
Kuwedzera kupisa (20-200 ℃)	DIN 51909	4.2X10^-6	K^-1
Thermal conductivity (20 ℃)	DIN 51908	105	Wm^-1K^-1

Iyo yakanyatso kugadzirirwa yakakwirira-inoshanda solar cell kugadzira, inotsigira G12 hombe-saizi wafer processing. Yakakwenenzverwa mutakuri dhizaini inowedzera zvakanyanya throughput, ichigonesa yakakwirira goho uye yakaderera mutengo wekugadzira.

Item	Type	Nhamba mutakuri wewafer
PEVCD Grephite chikepe - Iyo 156 yakatevedzana	156-13 grephite chikepe	144
	156-19 grephite chikepe	216
	156-21 grephite chikepe	240
	156-23 graphite boat	308
PEVCD Grephite chikepe - Iyo 125 yakatevedzana	125-15 grephite chikepe	196
	125-19 grephite chikepe	252
	125-21 grphite chikepe	280