Graphite Substrate Wafer Holder yePECVD

Tsanangudzo Pfupi

VET Energy's Graphite Substrate Holder yakagadzirirwa kuchengetedza wafer kurongeka uye kugadzikana mukati meiyo PECVD maitiro, kudzivirira kusvibiswa uye kuderedza njodzi yekukuvara. Iyo Graphite Wafer Holder inopa yakachengeteka, kunyange chikuva, kuve nechokwadi chekuti wafers anonyatso kuratidzwa kune plasma kuti ienderane uye yemhando yepamusoro dhizaini. Nekupisa kwayo kwepamusoro conductivity uye kusimba kwakasarudzika, ichi chibatiso chinobatsira kuvandudza mashandiro ekuita uye kuita kwechigadzirwa.

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VET Energy Graphite Substrate Wafer Holder ndeye chaiyo inotakura yakagadzirirwa PECVD (Plasma Enhanced Chemical Vapor Deposition) maitiro. Iyi yepamusoro-mhando yeGraphite Substrate Holder yakagadzirwa nepamusoro-kuchena, yakakwira-density graphite zvinhu, ine yakanakisa kupisa tembiricha kuramba, corrosion resistance, dimensional kugadzikana uye humwe hunhu. Inogona kupa yakagadzika rutsigiro chikuva chePECVD maitiro uye ive nechokwadi chekufanana uye kupfava kwekuiswa kwefirimu.

VET Energy PECVD process graphite wafer rutsigiro tafura ine zvinotevera maitiro:

▪Kuchena kwepamusoro:zvakanyanyisa kusvibiswa kwemukati, dzivirira kusvibiswa kwefirimu, simbisa mhando yefirimu.

▪High density:high density, high mechanical simba, inogona kumira kupisa kwepamusoro uye high pressure PECVD nharaunda.

▪Good dimensional kugadzikana:diki dimensional shanduko pakupisa kwepamusoro, kuve nechokwadi kugadzikana kwemaitiro.

▪Yakanakisa thermal conductivity:zvinobudirira kutamisa kupisa kudzivirira wafer overheating.

▪Strong corrosion resistance:inogona kudzivisa kukukurwa nemagasi akasiyana-siyana anoparadza uye plasma.

▪Customized service:graphite inotsigira matafura ehukuru hwakasiyana uye maumbirwo anogona kugadzirwa zvinoenderana nezvinodiwa nevatengi.

Product Advantages

▪Natsiridza mhando yefirimu:Ita shuwa yunifomu firimu kuiswa uye kuvandudza firimu mhando.

▪Wedzera hupenyu hwemidziyo:Yakanakisa corrosion kuramba, wedzera hupenyu hwesevhisi yePECVD michina.

▪Deredza mari yekugadzira:High-quality graphite trays inogona kuderedza chirairo uye kuderedza mari yekugadzira.

Graphite zvinhu kubva kuSGL:

Yakajairika parameter: R6510
Index	Test standard	Value	Unit
Avhareji yehukuru hwezviyo	ISO 13320	10	μm
Bulk density	DIN IEC 60413/204	1.83	g/cm³
Open porosity	DIN66133	10	%
Medium pore size	DIN66133	1.8	μm
Permeability	DIN 51935	0.06	cm²/s
Rockwell kuoma HR5/100	DIN IEC60413/303	90	HR
Yakananga magetsi resistivity	DIN IEC 60413/402	13	μΩm
Flexural simba	DIN IEC 60413/501	60	MPa
Kudzvinyirira simba	DIN 51910	130	MPa
Young's modulus	DIN 51915	11.5 × 10³	MPa
Kuwedzera kupisa (20-200 ℃)	DIN 51909	4.2X10^-6	K^-1
Thermal conductivity (20 ℃)	DIN 51908	105	Wm^-1K^-1

Iyo yakanyatso kugadzirirwa yakakwirira-inoshanda solar cell kugadzira, inotsigira G12 hombe-saizi wafer processing. Yakakwenenzverwa mutakuri dhizaini inowedzera zvakanyanya throughput, ichigonesa yakakwirira goho uye yakaderera mutengo wekugadzira.

Item	Type	Nhamba mutakuri wewafer
PEVCD Grephite chikepe - Iyo 156 yakatevedzana	156-13 grephite chikepe	144
	156-19 grephite chikepe	216
	156-21 grephite chikepe	240
	156-23 graphite boat	308
PEVCD Grephite chikepe - Iyo 125 yakatevedzana	125-15 grephite chikepe	196
	125-19 grephite chikepe	252
	125-21 grphite chikepe	280