PECVD Graphite Wafer Support

Tsanangudzo Pfupi

Yakagadzirirwa kunyatsoita uye kuita, VET Energy's Graphite Wafer Tsigiro ndiyo yakanakira zvinhu zvekushandisa mukufambiswa kwewafesi yepamusoro, uko kugadzikana kwakanyanya kwekushisa uye kuita kusingachinji kwakakosha. Kunyangwe iwe uri kushanda nema semiconductor wafers kana mamwe akatetepa substrates, iyi yemhando yepamusoro girafu rutsigiro inosimudzira yako maitiro kuvimbika uye kunaka kwechigadzirwa, zvichiita kuti ive chinhu chakakosha pakugadzira kwemazuva ano.

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VET Energy PECVD process graphite wafer rutsigiro chinhu chakakosha chinobatika chakagadzirirwa PECVD (plasma yakagadziridzwa kemikari vapor deposition) maitiro. Ichi chigadzirwa chakagadzirwa nepamusoro-kuchena, high-density graphite material, ine yakanakisa kupisa kwekushisa kwepamusoro, corrosion resistance, dimensional stability uye humwe hunhu, inogona kupa yakagadzika rutsigiro rwepuratifomu yePECVD process, kuve nechokwadi chekufanana uye kupfava kwekuiswa kwefirimu.

Iyo "graphite tsigiro" dhizaini yeVET Energy graphite wafer rutsigiro haingogone kutsigira zvinobudirira, asi zvakare inopa kugadzikana kwekupisa mukupisa kwepamusoro uye kudzvanywa kwePECVD nharaunda kuve nechokwadi kugadzikana kwemaitiro.

VET Energy PECVD process graphite wafer rutsigiro ine zvinotevera maitiro:

▪Kuchena kwepamusoro:yakaderera zvakanyanya kusvibiswa kwemukati, dzivirira kusvibiswa kwefirimu, kuve nechokwadi chemhando yefirimu.

▪High density:high density, high mechanical simba, inogona kumira kupisa kwepamusoro uye high pressure PECVD nharaunda.

▪Good dimensional kugadzikana:diki dimensional shanduko pakupisa kwepamusoro kuve nechokwadi kugadzikana kwemaitiro.

▪Yakanakisa thermal conductivity:zvinobudirira kutamisa kupisa kudzivirira wafer overheating.

▪Strong corrosion resistance:Kugona kuramba kukukurwa nemagasi akasiyana-siyana anoodza uye plasma.

▪Customized service:Graphite inotsigira matafura ehukuru hwakasiyana uye maumbirwo anogona kugadzirwa zvinoenderana nezvinodiwa nevatengi.

Graphite zvinhu kubva kuSGL:

Yakajairika parameter: R6510
Index	Test standard	Value	Unit
Avhareji yehukuru hwezviyo	ISO 13320	10	μm
Bulk density	DIN IEC 60413/204	1.83	g/cm³
Open porosity	DIN66133	10	%
Medium pore size	DIN66133	1.8	μm
Permeability	DIN 51935	0.06	cm²/s
Rockwell kuoma HR5/100	DIN IEC60413/303	90	HR
Yakananga magetsi resistivity	DIN IEC 60413/402	13	μΩm
Flexural simba	DIN IEC 60413/501	60	MPa
Kudzvinyirira simba	DIN 51910	130	MPa
Young's modulus	DIN 51915	11.5 × 10³	MPa
Kuwedzera kupisa (20-200 ℃)	DIN 51909	4.2X10^-6	K^-1
Thermal conductivity (20 ℃)	DIN 51908	105	Wm^-1K^-1

Iyo yakanyatso kugadzirirwa yakakwirira-inoshanda solar cell kugadzira, inotsigira G12 hombe-saizi wafer processing. Yakakwenenzverwa mutakuri dhizaini inowedzera zvakanyanya throughput, ichigonesa yakakwirira goho uye yakaderera mutengo wekugadzira.

Item	Type	Nhamba mutakuri wewafer
PEVCD Grephite chikepe - Iyo 156 yakatevedzana	156-13 grephite chikepe	144
	156-19 grephite chikepe	216
	156-21 grephite chikepe	240
	156-23 graphite boat	308
PEVCD Grephite chikepe - Iyo 125 yakatevedzana	125-15 grephite chikepe	196
	125-19 grephite chikepe	252
	125-21 grphite chikepe	280