Graphite Wafer Boat for Deposition

Tsanangudzo Pfupi

VET Energy graphite wafer boat ndeye yepamusoro-mhando inodyiwa yakagadzirirwa deposition maitiro mune semiconductor, photovoltaic uye mamwe maindasitiri. Yakagadzirwa nepamusoro-kuchena, yakakwira-density graphite zvinhu, chigadzirwa ichi chine yakanakisa tembiricha yekudzivirira, corrosion resistance, dimensional kugadzikana uye humwe hunhu, uye inogona kupa yakagadzika inotakura chikuva cheiyo deposition process kuti ive nechokwadi chekufanana uye kupfava kwekutetepa kwefirimu deposition. .

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Iyo PECVD graphite boat kubva kuVET Energy inogadzirwa nepamusoro-kuchena isostatic graphite, ine porosity iri pasi pe15% uye kushata kwepamusoro Ra≤1.6μm. Iyo yepamusoro dimensional kugadzikana uye yekupisa conductivity inovimbisa yunifomu yefirimu kuiswa uye kuwedzera kushanda kwesero.

Graphite zvinhu kubva kuSGL:

Yakajairika parameter: R6510
Index	Test standard	Value	Unit
Avhareji yehukuru hwezviyo	ISO 13320	10	μm
Bulk density	DIN IEC 60413/204	1.83	g/cm³
Open porosity	DIN66133	10	%
Medium pore size	DIN66133	1.8	μm
Permeability	DIN 51935	0.06	cm²/s
Rockwell kuoma HR5/100	DIN IEC60413/303	90	HR
Yakananga magetsi resistivity	DIN IEC 60413/402	13	μΩm
Flexural simba	DIN IEC 60413/501	60	MPa
Kudzvinyirira simba	DIN 51910	130	MPa
Young's modulus	DIN 51915	11.5 × 10³	MPa
Kuwedzera kupisa (20-200 ℃)	DIN 51909	4.2X10^-6	K^-1
Thermal conductivity (20 ℃)	DIN 51908	105	Wm^-1K^-1

Iyo yakanyatso kugadzirirwa yakakwirira-inoshanda solar cell kugadzira, inotsigira G12 hombe-saizi wafer processing. Yakakwenenzverwa mutakuri dhizaini inowedzera zvakanyanya throughput, ichigonesa yakakwirira goho uye yakaderera mutengo wekugadzira.

Item	Type	Nhamba mutakuri wewafer
PEVCD Grephite chikepe - Iyo 156 yakatevedzana	156-13 grephite chikepe	144
	156-19 grephite chikepe	216
	156-21 grephite chikepe	240
	156-23 graphite boat	308
PEVCD Grephite chikepe - Iyo 125 yakatevedzana	125-15 grephite chikepe	196
	125-19 grephite chikepe	252
	125-21 grphite chikepe	280