VET EnergyPECVD process graphite carrier ndeyepamusoro-mhando inodyiwa yakagadzirirwa PECVD (plasma yakagadziridzwa kemikari vapor deposition) maitiro. Iyi girafu inotakura yakagadzirwa nepamusoro-kuchena, yakakwirira-density graphite zvinhu, ine yakanakisa kupisa kwekushisa kwepamusoro, corrosion resistance, dimensional kugadzikana uye humwe hunhu, inogona kupa yakagadzikana inotakura chikuva chePECVD process, kuve nechokwadi chekufanana uye kupfava kwefirimu rakatetepa. deposition.
Graphite vatakuri vePECVD maitiro vane zvinotevera maitiro:
▪ Kuchena kwepamusoro: kuderera kwakanyanya kwetsvina, kudzivirira kusvibiswa kwefirimu uye kuve nechokwadi chemhando yefirimu.
▪ High density: high density, high mechanical simba, inokwanisa kutsungirira kupisa kwepamusoro uye high pressure PECVD environment.
▪ Good dimensional kugadzikana: diki dimensional shanduko pakupisa kwepamusoro, kuve nechokwadi chekugadzikana kwemaitiro.
▪ Yakanakisa thermal conductivity: zvinobudirira kutamisa kupisa kudzivirira wafer overheating.
▪ Kusaora kwakasimba: kukwanisa kudzivisa kukukurwa nemagasi akasiyana-siyana anoparadza uye plasma.
▪ Sevhisi yakagadziridzwa: vatakuri vegraphite vehukuru hwakasiyana uye maumbirwo vanogona kugadzirwa maererano nezvinodiwa nevatengi.
Graphite zvinhu kubva kuSGL:
Yakajairika parameter: R6510 | |||
Index | Test standard | Value | Unit |
Avhareji yehukuru hwezviyo | ISO 13320 | 10 | μm |
Bulk density | DIN IEC 60413/204 | 1.83 | g/cm3 |
Open porosity | DIN66133 | 10 | % |
Medium pore size | DIN66133 | 1.8 | μm |
Permeability | DIN 51935 | 0.06 | cm²/s |
Rockwell kuoma HR5/100 | DIN IEC60413/303 | 90 | HR |
Yakananga magetsi resistivity | DIN IEC 60413/402 | 13 | μΩm |
Flexural simba | DIN IEC 60413/501 | 60 | MPa |
Kudzvinyirira simba | DIN 51910 | 130 | MPa |
Young's modulus | DIN 51915 | 11.5 × 10³ | MPa |
Kuwedzera kupisa (20-200 ℃) | DIN 51909 | 4.2X10-6 | K-1 |
Thermal conductivity (20 ℃) | DIN 51908 | 105 | Wm-1K-1 |
Iyo yakanyatso kugadzirirwa yakakwirira-inoshanda solar cell kugadzira, inotsigira G12 hombe-saizi wafer processing. Yakakwenenzverwa mutakuri dhizaini inowedzera zvakanyanya throughput, ichigonesa yakakwirira goho uye yakaderera mutengo wekugadzira.
Item | Type | Nhamba mutakuri wewafer |
PEVCD Grephite chikepe - Iyo 156 yakatevedzana | 156-13 grephite chikepe | 144 |
156-19 grephite chikepe | 216 | |
156-21 grephite chikepe | 240 | |
156-23 graphite boat | 308 | |
PEVCD Grephite chikepe - Iyo 125 yakatevedzana | 125-15 grephite chikepe | 196 |
125-19 grephite chikepe | 252 | |
125-21 grphite chikepe | 280 |