The AdvancedSiC Cantilever PaddleyeWafer Processing yakagadzirwa nevet-china inopa yakanakisa mhinduro yekugadzira semiconductor. Iyi cantilever paddle yakagadzirwa neSiC (silicon carbide) zvinhu, uye kuoma kwayo kwepamusoro uye kudzivirira kupisa kunoigonesa kuchengetedza kuita kwakanakisa mukupisa kwakanyanya uye nharaunda dzinoparadza. Dhizaini yeCantilever Paddle inobvumira wafer kuti itsigirwe zvakavimbika panguva yekugadziriswa, kuderedza njodzi yekutsemuka uye kukuvara.
SiC Cantilever Paddlechinhu chakasarudzika chinoshandiswa mumichina yekugadzira semiconductor senge oxidation vira, diffusion furnace, uye annealing vira, iyo inonyanya kushandiswa ndeye wafer kurodha uye kuburitsa, inotsigira uye kutakura mawafer panguva yekupisa kwepamusoro maitiro.
Common structuresyeSiCcantileverpaddle: cantilever structure, yakagadziriswa kune imwe mugumo uye yakasununguka kune imwe, inowanzo ine flat uye paddle-like design.
VET Energy shandisa yakakwira kuchena yakadzokorodza silicon carbide zvinhu kuvimbisa mhando.
| Zvenyama zvimiro zveRecrystallized Silicon Carbide | |
| Property | Typical Value |
| Tembiricha yekushanda (°C) | 1600°C (neokisijeni), 1700°C (inoderedza nharaunda) |
| SiC content | > 99.96% |
| Free Si content | <0.1% |
| Bulk density | 2.60-2.70 g/cm3 |
| Inooneka porosity | <16% |
| Kumanikidza simba | > 600MPa |
| Kutonhora kukotama simba | 80-90 MPa (20°C) |
| Simba rekukotama rinopisa | 90-100 MPa (1400°C) |
| Kuwedzera kupisa @1500°C | 4.70 10-6/°C |
| Thermal conductivity @1200°C | 23W/m•K |
| Elastic modulus | 240 GPA |
| Thermal shock resistance | Kunyanya kunaka |
Zvakanakira zveVET Energy's Advanced SiC Cantilever Paddle yeWafer Processing ndeiyi:
-Kugadzikana kwekushisa kwepamusoro: kushandiswa munzvimbo dziri pamusoro pe1600 ° C;
-Low thermal yekuwedzera coefficient: inochengetedza dimensional kugadzikana, kuderedza wafer warpage njodzi;
-Kuchena kwepamusoro: njodzi yakaderera yekusvibiswa kwesimbi;
-Chemical inertness: corrosion-resistant, yakakodzera kune akasiyana gasi nharaunda;
-Kusimba kwepamusoro uye kuoma: Kupfeka-kusagadzikana, hupenyu hurefu hwebasa;
-Good thermal conductivity: inobatsira mukudziya kweuniform wafer.
