Tantalum carbide ufiufi susceptor mo wafer

Fa'amatalaga Puupuu:

Semicera o se ta'ita'i i tekinolosi e puipuia ai le vevela maualuga ma matou te mitamita e fa'alauiloa oloa fa'apipi'i CVD Tantalum Carbide (TaC) e tu'uina atu ai le puipuiga fa'atuatuaina o le vevela mo au mea fa'apipi'i kalafi.O le graphite o se mea e sili ona lelei e teteʻe ai i le vevela, ae e faigofie ona faʻamaʻiina i le maualuga o le vevela, lea e le mafai ona 'alofia atoatoa e oʻo lava i totonu o se ogaumu gaogao.O la matou CVD Tantalum Carbide (TaC) faʻapipiʻi e mafai ona puipuia lelei le faʻamaʻiina o le graphite substrate aʻo faʻatumauina lona tulaga sili ona lelei o le vevela.O le TaC foi o se mea e le mafai ona tetee atu i gaioiga ma kasa e pei ole argon ma le hydrogen.Fa'afeso'ota'i Semicera i aso nei e a'oa'o atili e uiga ia matou Tantalum Carbide CVD fa'apipi'i susceptors EPI ina ia mautinoa le mautu ma le fa'amaoni o au talosaga maualuga vevela.


Fa'amatalaga Oloa

Faailoga o oloa

TaC coating o se ituaiga o tantalum carbide (TaC) faʻapipiʻiina saunia e ala i tekinolosi faʻaogaina o le ausa, o loʻo i ai uiga nei:

1. Maaa maualuga: TaC coating hardness e maualuga, e masani lava e mafai ona oʻo atu i le 2500-3000HV, o se faʻamalo sili ona lelei.

2. Faʻaofuofu teteʻe: TaC faʻapipiʻi e matua faʻafefeteina, lea e mafai ona faʻaitiitia lelei le ofuina ma le faʻaleagaina o vaega faʻainisinia aʻo faʻaaogaina.

3. Lelei maualuga le tete'e o le vevela: TaC coating e mafai foi ona faatumauina lona tulaga sili ona lelei i lalo o le siosiomaga vevela maualuga.

4. Faʻamautu lelei vailaʻau: TaC coating e lelei le mautu vailaʻau ma e mafai ona tetee atu i le tele o vailaʻau, e pei o acids ma faʻavae.

6 (3)
Tantalum Carbide CVD Coating EPI Susceptor_Semicera (1)

碳化钽涂层物理特性物理特性

Meatotino faaletino o TaC ufiufi

密度/ Malosi

14.3 (g/cm³)

比辐射率 / Emisi fa'apitoa

0.3

热膨胀系数 / Fa'aalili fa'alauteleina o le vevela

6.3 10-6/K

努氏硬度/ Malosi (HK)

2000 HK

电阻 / Tetee

1×10-5 Ohm*cm

热稳定性 / Mausali le vevela

<2500℃

石墨尺寸变化 / Suiga le tele o le kalafi

-10~-20um

涂层厚度 / Ufiufi mafiafia

≥20um tau masani (35um±10um)

 

Ningbo VET Malosiaga Tekonolosi Co., Ltd o se atinaʻe faʻatekonolosi maualuga e taulaʻi i le gaosiga ma le faʻatau atu o mea maualuga maualuga, meafaitino ma tekinolosi e aofia ai graphite, carbide silicon, ceramics, togafitiga luga ma isi.O oloa e faʻaaogaina lautele i photovoltaic, semiconductor, malosi fou, metallurgy, ma isi.

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