TaC Coated Susceptor mo Meafaigaluega Epitaxy

Fa'amatalaga Puupuu:

E tu'uina atu e le VET ni fa'alavalava tantalum carbide (TaC) fa'apitoa mo vaega eseese ma felauaiga. O le fa'agasologa o le fa'auluina o le VET e mafai ai e tantalum carbide (TaC) fa'apipi'i ona ausia le mama maualuga, maualuga le vevela ma le maualuga o le fa'apalepale o vaila'au, fa'aleleia le tulaga lelei o le SIC/GAN tioata ma le EPI, ma fa'alauteleina le ola o vaega autu o le reactor. O le faʻaogaina o le tantalum carbide TaC coating o le foia lea o le faʻafitauli o le pito ma faʻaleleia le lelei o le tuputupu aʻe tioata, ma o le VET ua faʻataunuʻuina le tantalum carbide coating technology (CVD), e oʻo atu i le tulaga maualuga faavaomalo.


Fa'amatalaga Oloa

Faailoga o oloa

TaC ua ufiufisubstrate o se ata manifinifi e faia itantalum carbidemeafaitino, lea e faʻaaogaina i luga o le mea e faʻaogaina ai meafaigaluega epitaxial.TaC fa'apipi'ie tele mea e sili ona lelei, ma avea ai ma filifiliga sili.

TaC coating o se ituaiga o tantalum carbide (TaC) faʻapipiʻiina saunia e ala i tekinolosi faʻaogaina o le ausa, o loʻo i ai uiga nei:

1. Maaa maualuga: TaC coating hardness e maualuga, e masani lava e mafai ona oʻo atu i le 2500-3000HV, o se faʻamalo sili ona lelei.

2. Faʻaofuofu teteʻe: TaC coating e matua ofuina lava, lea e mafai ona faʻaitiitia lelei le ofuina ma le faʻaleagaina o vaega faʻainisinia aʻo faʻaaogaina.

3. Lelei maualuga le tete'e o le vevela: TaC coating e mafai foi ona faatumauina lona tulaga sili ona lelei i lalo o le siosiomaga vevela maualuga.

4. Faʻamautu lelei vailaʻau: TaC coating e lelei le mautu vailaʻau ma e mafai ona tetee atu i le tele o vailaʻau, e pei o acids ma faʻavae.

6 (3)
6 (1)

碳化钽涂层物理特性物理特性

Meatotino faaletino o TaC ufiufi

密度/ Malosi

14.3 (g/cm³)

比辐射率 / Emisi fa'apitoa

0.3

热膨胀系数 / Fa'aalili fa'alauteleina o le vevela

6.3 10-6/K

努氏硬度/ Malosi (HK)

2000 HK

电阻 / Tetee

1×10-5 Ohm*cm

热稳定性 / Mausali le vevela

<2500℃

石墨尺寸变化 / Suiga le tele o le kalafi

-10~-20um

涂层厚度 / Ufiufi mafiafia

≥20um tau masani (35um±10um)

 

Ningbo VET Malosiaga Tekonolosi Co., Ltd o se atinaʻe faʻatekonolosi maualuga e taulaʻi i le gaosiga ma le faʻatau atu o mea maualuga maualuga, meafaitino ma tekinolosi e aofia ai graphite, carbide silicon, ceramics, togafitiga luga ma isi. O oloa e faʻaaogaina lautele i photovoltaic, semiconductor, malosi fou, metallurgy, ma isi.

O la matou 'au fa'atekinisi e sau mai fa'alapotopotoga su'esu'e fa'apitonu'u pito i luga, e mafai ona tu'uina atu fa'afitauli fa'apitoa fa'apitoa mo oe.

Faʻafeiloaʻi faʻafeiloaʻi oe e asiasi i la matou falegaosimea, seʻi o tatou faia nisi talanoaga!

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