Fa'asao fa'amalama fa'afuina SIC mo le MOCVD K465i, fa'avevela fa'amalama mo le epitaxy.

Fa'amatalaga Puupuu:

Kemiki Graphite

A'oa'oga: Maualuluga le vevela

Talosaga: MOCVD/Ogaumu mama/Vavela Sone

Malosi tele:1.68-1.91g/cm3

Malosi fa'afoliga: 30-46Mpa

Resistivity: 7-12μΩm


Fa'amatalaga Oloa

Faailoga o oloa

Ola umiSIC fa'apipi'i fa'avevela kalafimo MOCVD K465i, Graphite Heater mo epitaxy,
fa'avevela graphite, Fa'avevela Graphite mo MOCVD, fa'avevela, SIC fa'apipi'i fa'avevela kalafi,

MOCVD Substrate Heater, Elemene Fa'avevela mo MOCVD

kafitefa'avevela:
O lefa'avevela graphitevaega o loʻo faʻaaogaina i totonu o le ogaumu vevela maualuga ma le vevela na oʻo i le 2200 tikeri i le vacuum environment ma le 3000 tikeri i le siosiomaga kesi deoxidized ma faʻaofi.
Vaega autu ofa'avevela graphite:
1. tutusa o fausaga faamafanafana.
2. conductivity lelei eletise ma le mamafa eletise maualuga.
3. tete'e corrosion.
4. inoxidizability.
5. mama maualuga kemikolo.
6. malosi faʻainisinia maualuga.
O le lelei o le malosi lelei, maualuga le tau ma maualalo le tausiga.
E mafai ona tatou gaosia le anti-oxidation ma le umi o le ola graphite crucible, graphite mold ma vaega uma o graphitefa'avevela.
Fa'ailoga autu ole fa'avevela graphite:

Fa'amatalaga Fa'apitoa

VET-M3

To'atele (g/cm3)

≥1.85

Fuafua (PPM)

≤500

Maaa o le matafaga

≥45

Tete'e Fa'apitoa (μ.Ω.m)

≤12

Malosi fa'afoliga (Mpa)

≥40

Malosi fa'amalosi (Mpa)

≥70

Max.Tele o Saito (μm)

≤43

Coefficient o le fa'alauteleina o le vevela Mm/°C

≤4.4*10-6

O le faʻavevela graphite mo le ogaumu eletise o loʻo i ai meatotino o le vevela, faʻamaʻi faʻamaʻi, lelei eletise eletise ma sili atu le malosi faʻainisinia.E mafai ona matou masini ituaiga eseese o faʻavevela graphite e tusa ai ma fuafuaga a tagata faʻatau.

MOCVD Substrate Heater, Elemene Fa'avevela mo MOCVDMOCVD Substrate Heater, Elemene Fa'avevela mo MOCVD


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