Fa'asao fa'amalama fa'afuina SIC mo le MOCVD K465i, fa'avevela fa'amalama mo le epitaxy.

Fa'asao Fa'asao Fa'asalaina SIC mo le MOCVD K465i, Fa'avevela fa'amalama mo le epitaxy Ata Fa'aalia

Fa'amatalaga Puupuu:

Kemiki Graphite

Tulaga lelei: maualuga le vevela

Talosaga: MOCVD/Ogaumu mama/Vavela Sone

Malosi tele:1.68-1.91g/cm3

Malosi fa'alanotonu: 30-46Mpa

Resistivity: 7-12μΩm

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Fa'amatalaga Oloa

Faailoga o oloa

Ola umiSIC fa'apipi'i fa'avevela kalafimo MOCVD K465i, Graphite Heater mo epitaxy,
fa'avevela graphite, Fa'avevela Graphite mo MOCVD, fa'avevela, SIC fa'apipi'i fa'avevela kalafi,

MOCVD Substrate Heater, Elemene Fa'avevela mo MOCVD

kalafifa'avevela:
O lefa'avevela graphitevaega o loʻo faʻaaogaina i totonu o le ogaumu vevela maualuga ma le vevela na oʻo i le 2200 tikeri i le vacuum environment ma le 3000 tikeri i le siosiomaga kesi deoxidized ma faʻaofi.
Autu autu o le graphitefa'avevela:
1. tutusa o fausaga faamafanafana.
2. conductivity lelei eletise ma le mamafa eletise maualuga.
3. tete'e corrosion.
4. inoxidizability.
5. mama maualuga kemikolo.
6. malosi faʻainisinia maualuga.
O le lelei o le malosi lelei, maualuga le tau ma maualalo le tausiga.
E mafai ona tatou gaosia le anti-oxidation ma le umi o le ola o le graphite crucible, graphite mold ma vaega uma o le graphite heater.
Fa'ailoga autu ole fa'avevela graphite:

Fa'amatalaga Fa'apitoa	VET-M3
To'atele (g/cm3)	≥1.85
Fuafua (PPM)	≤500
Maaa o le matafaga	≥45
Fa'ate'e Fa'apitoa (μ.Ω.m)	≤12
Malosi fa'afoliga (Mpa)	≥40
Malosi fa'amalosi (Mpa)	≥70
Max. Tele o Saito (μm)	≤43
Coefficient o le fa'alauteleina o le vevela Mm/°C	≤4.4*10-6

O le faʻavevela o le graphite mo le ogaumu eletise o loʻo i ai meatotino o le vevela, faʻamaʻi faʻamaʻiina, lelei eletise eletise ma sili atu le malosi faʻainisinia. E mafai ona matou masini ituaiga eseese o faʻavevela graphite e tusa ai ma mamanu a tagata faʻatau.