Lelei sili Silicon Carbide RBSIC / SISIC Cantilever Paddle Fa'aaogaina i le Solar Photovoltaic Industry

Lelei sili Silicon Carbide RBSIC/SISIC Cantilever Foe Fa'aaogaina ile Solar Photovoltaic Alamanuia Fa'aaliga Ata

Fa'amatalaga Puupuu:

O faʻamanuiaga faʻapitoa o le matou SiC-coated graphite susceptors e aofia ai le mama maualuga, faʻapipiʻi tutusa ma se olaga sili ona lelei. E iai fo'i le maualuga o le kemikolo ma le mautu o le vevela.

Matou te fa'atumauina le fa'apalepale vavalalata pe a fa'aogaina le SiC coating, fa'aogaina le fa'aogaina o masini maualuga e fa'amautinoa ai se fa'ailoga susceptor toniga. Matou te gaosia fo'i mea e iai mea fa'aeletise lelei mo le fa'aogaina i faiga fa'avevela. O vaega uma ua mae'a o lo'o sau fa'atasi ma se tusi fa'amaonia mama ma fa'atatau.

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Fa'amatalaga Oloa

Faailoga o oloa

Mea faigaluega lelei fa'atautaia, auva'a fa'apolofesa fa'apitoa, ma mea e sili atu pe a uma ona fa'atau atu oloa ma auaunaga; Ua avea foi i matou o se toʻalua tele ma fanau, o tagata uma e pipii atu i le kamupani manuia "faʻatasi, tuuto, faapalepale" mo le lelei sili Silicon Carbide RBSIC / SISIC Cantilever Paddle Faʻaaogaina i le Solar Photovoltaic Industry, Matou te faʻafeiloaia ma le faʻamaoni le lua mai fafo ma totonu. pisinisi pisinisi soa, ma faʻamoemoe e galulue faʻatasi ma oe i se taimi lata mai!
Mea faigaluega lelei fa'atautaia, auva'a fa'apolofesa fa'apitoa, ma mea e sili atu pe a uma ona fa'atau atu oloa ma auaunaga; O i matou foi o se toʻalua sili ma le fanau, o tagata uma e pipii i le kamupani manuia "faʻatasi, tuuto, faapalepale" moSaina Refractory sima ma sima kiln, Ina ia fa'amalieina mana'oga o tagata fa'atau tagata fa'atau mo 'au'aunaga sili atu ta'itasi ma mea lelei mautu. Matou te faʻafeiloaʻi ma le faʻafeiloaʻi tagata faʻatau i le lalolagi atoa e asiasi mai ia i matou, faʻatasi ai ma a matou felagolagomai e tele-faceted, ma atinaʻe faʻatasi maketi fou, fatuina se lumanaʻi matagofie!

SiC faʻapipiʻiina / faʻapipiʻiina o le mea faʻapipiʻi Graphite mo Semiconductor

Susceptors taofi ma faʻavevela semiconductor wafers i le faagasologa o le vevela. O se susceptor e faia i se mea e mitiia ai le malosi e ala i le induction, conduction, ma/poʻo le faʻavevela ma faʻamafanafanaina le wafer. O lona tete'e fa'avevela vevela, fa'avevela vevela, ma le mama e taua tele i le fa'avaveina o le vevela (RTP). Silicon carbide coated graphite, silicon carbide (SiC), ma le silicon (Si) e masani ona faʻaaogaina mo susceptors e faʻatatau i le siosiomaga vevela ma vailaʻau. PureSiC® CVD SiC ma ClearCarbon ™ mea e sili ona mama lea e maua ai le mautu maualuga o le vevela, teteʻe o le pala, ma le tumau.

Fa'amatalaga o oloa

SiC coating of Graphite substrate mo Semiconductor talosaga e maua ai se vaega e sili atu le mama ma tetee atu i oxidizing atemosifia.
O le CVD SiC poʻo le CVI SiC o loʻo faʻaogaina i le Graphite o vaega faigofie pe lavelave mamanu. O le ufiufi e mafai ona faʻaoga i le mafiafia eseese ma i vaega tetele.

SiC faʻapipiʻiina / faʻapipiʻiina o le mea faʻapipiʻi Graphite mo Semiconductor

O ceramics faʻapitoa o se filifiliga masani mo semiconductor thermal processing applications e aofia ai le RTP (Rapid Thermal Processing), Epi (Epitaxial), faʻasalalau, faʻamaʻi, ma le faʻafefe. CoorsTek o loʻo tuʻuina atu mea faʻapitoa e faʻatulagaina faapitoa e tatalia ai faʻateʻa vevela ma maualuga-mama, malosi, toe faʻaaogaina mo le maualuga o le vevela.

Vaega:
· Lelei le Tete'e Te'i Te'i
· Sili Fa'aletino Fa'ate'ia Tete'e
· Tete'e Sili Vailaau
· Mamalu Maualuga Maualuga
· Avanoa i Faiga Lavelave
· Faʻaaogaina i lalo ole Oxidizing Atmosphere

talosaga:

E mana'omia ona uia e le wafer ni laasaga se tele a'o le'i sauni mo le fa'aoga i masini fa'aeletoroni. O se tasi o faiga taua o le silicon epitaxy, lea o loʻo faʻapipiʻiina ai le graphite susceptors. O meatotino ma le lelei o susceptors e iai sona aafiaga taua i le lelei o le epitaxial layer o le wafer.

Meatotino masani o mea fa'avae kalafi:

E aliali mai le To'atele:	1.85 g/cm3
Tete'e eletise:	11 μΩm
Malosi fa'afoliga:	49 MPa (500kgf/cm2)
Maa'a o le matafaga:	58
Lefulefu:	<5ppm
Amioga vevela:	116 W/mK (100 kcal/mhr-℃)