CVD Silicon Carbide Coated Graphite Ring

Fa'amatalaga Puupuu:

VET Energy silicon carbide coated graphite ring o se oloa maualuga fa'atinoga ua fuafuaina e maua ai le fa'atinoga faifaipea ma fa'atuatuaina mo se vaitaimi umi. E sili atu le lelei o le vevela ma le tutusa o le vevela, maualuga le mama, teteʻe o le tafia, ma avea ai ma vaifofo lelei mo le gaosiga o talosaga.

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Fa'amatalaga Oloa

Faailoga o oloa

Meatotino masani o mea fa'avae kalafi:

E aliali mai le To'atele:	1.85 g/cm3
Tete'e eletise:	11 μΩm
Malosi fa'afoliga:	49 MPa (500kgf/cm2)
Maa'a o le matafaga:	58
Lefulefu:	<5ppm
Amioga vevela:	116 W/mK (100 kcal/mhr-℃)

Matou te tuʻuina atu susceptors eseese ma vaega graphite mo reactors epitaxy uma o iai nei. O a matou oloa e aofia ai pusa paʻu mo iunite LPE, pancake susceptors mo LPE, CSD, ma Gemini iunite, ma susceptors tasi-wafer mo iunite faʻaoga ma ASM.

E ala i le tu'ufa'atasia o faiga fa'apa'aga malosi ma ta'ita'i OEM, tomai fa'apitoa ma le gaosiga o tomai, e ofoina atu e le foma'i le mamanu sili ona lelei mo lau talosaga.

VET Malosiaga o o legaosi moni o graphite faʻapitoa ma oloa kalisika carbide faʻatasi ma le CVD coating,mafai ona sapalaieseesevaega fa'apitoa mo semiconductor ma photovoltaic alamanuia. Our vaega faʻapitoa e sau mai faʻalapotopotoga suʻesuʻe pito i luga, e mafai ona tuʻuina atu faʻamatalaga faʻapitoa faʻapitoamo oe.

Ftulaga oa tatou oloa:

1. maualuga le vevela oxidation tetee atu i le 1700℃.
2. maualuga mama matutusa vevela
3. Lelei le fa'afefeteina: acid, alkali, masima ma meaola fa'aola.
4. Maaa maualuga, faʻapipiʻi luga, vaega laiti.
5. Le soifua tautua umi ma sili atu le umi

CVD SiC薄膜基本物理性能 Meatino fa'aletino autu o le CVD SiCufiufi
性质 / Meatotino	典型数值 / Taua masani
晶体结构 / Fa'a tioata	FCC β vaega多晶，主要为（111）取向
密度 / Malosi	3.21 g/cm³
硬度 / Maaa	2500 维氏硬度（500g uta）
晶粒大小 / Saito Tele	2~10μm
纯度 / Vailaau Mama	99.99995%
热容 / Malosiaga vevela	640 J·kg^-1·K^-1
升华温度 / Sulimation Temperature	2700 ℃
抗弯强度 / Malosi Fa'alilolilo	415 MPa RT 4-point
杨氏模量 / Young's Modulus	430 Gpa 4pt pi'o, 1300 ℃
导热系数 / ThermalConductivity	300W·m^-1·K^-1
热膨胀系数 / Fa'alauteleina o le vevela(CTE)	4.5×10^-6K^-1