Silicon Carbide (SiC) Epitaxial Wafer

Ibisobanuro bigufi:

Silicon Carbide (SiC) Epitaxial Wafer ivuye muri VET Ingufu ni substrate ikora cyane igenewe guhuza ibisabwa byingufu zizakurikiraho hamwe nibikoresho bya RF. VET Ingufu zemeza ko buri wafer ya epitaxial yakozwe muburyo bwitondewe kugirango itange ubushyuhe bwumuriro mwinshi, voltage yamenetse, hamwe nubwikorezi bwabatwara, bigatuma biba byiza mubisabwa nk'imodoka zikoresha amashanyarazi, itumanaho rya 5G, hamwe na elegitoroniki ikora neza.


Ibicuruzwa birambuye

Ibicuruzwa

VET Ingufu za silicon karbide (SiC) epitaxial wafer nigikoresho kinini cyagutse cya bandgap semiconductor hamwe nubushyuhe buhebuje bwo hejuru, ubushyuhe bwinshi nibiranga ingufu nyinshi. Nibisobanuro byiza kubisekuru bishya byibikoresho bya elegitoroniki. Ingufu za VET zikoresha tekinoroji ya MOCVD igezweho kugirango ikure ibice byiza bya SiC epitaxial kurwego rwa SiC, byemeza imikorere myiza kandi ihamye ya wafer.

Silicon Carbide (SiC) Epitaxial Wafer itanga ubwuzuzanye buhebuje hamwe nibikoresho bitandukanye bya semiconductor birimo Si Wafer, SiC Substrate, SOI Wafer, na SiN Substrate. Hamwe na epitaxial layer ikomeye, ishyigikira inzira ziterambere nko gukura kwa Epi Wafer no guhuza ibikoresho nka Gallium Oxide Ga2O3 na AlN Wafer, bigatuma ikoreshwa muburyo butandukanye muburyo butandukanye. Yashizweho kugirango ihuze ninganda-isanzwe ya Cassette ikora sisitemu, itanga imikorere inoze kandi yoroheje mubikorwa bya semiconductor.

Umurongo wibicuruzwa bya VET ntabwo bigarukira gusa kuri waf epitaxial wafers. Dutanga kandi ibikoresho byinshi bya semiconductor substrate, harimo Si Wafer, SiC Substrate, SOI Wafer, SiN Substrate, Epi Wafer, nibindi. Byongeye kandi, turimo guteza imbere cyane ibikoresho bishya bigari bya semiconductor, nka Gallium Oxide Ga2O3 na AlN Wafer, kugirango uhuze ejo hazaza ingufu za elegitoroniki yinganda zikenewe kubikoresho bikora neza.

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KUBONA UMWIHARIKO

* n-Pm = n-ubwoko bwa Pm-Urwego, n-Ps = n-ubwoko bwa Ps-Urwego, Sl = Semi-lnsulating

Ingingo

8-Inch

6-Inch

4-Inch

nP

n-Pm

n-Zab

SI

SI

TTV (GBIR)

≤6um

≤6um

Umuheto (GF3YFCD) -Agaciro keza

≤15μm

≤15μm

≤25μm

≤15μm

Intambara (GF3YFER)

≤25μm

≤25μm

≤40μm

≤25μm

LTV (SBIR) -10mmx10mm

<2 mm

Wafer Edge

Beveling

BURUNDU

* n-Pm = n-ubwoko bwa Pm-Urwego, n-Ps = n-ubwoko bwa Ps-Urwego, Sl = Semi-lnsulating

Ingingo

8-Inch

6-Inch

4-Inch

nP

n-Pm

n-Zab

SI

SI

Kurangiza

Impande ebyiri Optical Polonye, ​​Si- Isura CMP

Ubuso

(10um x 10um) Si-FaceRa≤0.2nm
C-Isura Ra≤ 0.5nm

(5umx5um) Si-Isura Ra≤0.2nm
C-Isura Ra≤0.5nm

Imipira

Nta na kimwe cyemewe (uburebure n'ubugari≥0.5mm)

Ibimenyetso

Nta na kimwe cyemewe

Igishushanyo (Si-Isura)

Qty.≤5, Guhuriza hamwe
Uburebure≤0.5 × wafer diameter

Qty.≤5, Guhuriza hamwe
Uburebure≤0.5 × wafer diameter

Qty.≤5, Guhuriza hamwe
Uburebure≤0.5 × wafer diameter

Ibice

Nta na kimwe cyemewe

Guhezwa

3mm

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