CVD SiC Yashizwemo Carbone-karubone Igizwe na CFC Ubwato

Ibisobanuro bigufi:

VET Ingufu SiC yatwikiriye CFC ubwato / mold nigicuruzwa cyiza cyane cyagenewe gutanga imikorere ihamye kandi yizewe mugihe kinini. Ifite ubushyuhe bwiza cyane hamwe nubushyuhe bwumuriro, ubuziranenge bwinshi, kurwanya isuri, bigatuma biba igisubizo cyiza kubisabwa gutunganya wafer.


Ibicuruzwa birambuye

Ibicuruzwa

Ibisobanuro ku bicuruzwa

Carbone / karubone(aha ni ukuvuga "C / C cyangwa CFC ") ni ubwoko bwibintu byinshi bishingiye kuri karubone kandi bigashimangirwa na fibre karubone nibicuruzwa byayo (karuboni fibre preform). Ifite inertia ya karubone n'imbaraga nyinshi za fibre fibre. Ifite imiterere yubukanishi, kurwanya ubushyuhe, kurwanya ruswa, kugabanya ubukana hamwe nubushyuhe bwumuriro n amashanyarazi

CVD-SiCigifuniko gifite ibiranga imiterere imwe, ibintu byegeranye, birwanya ubushyuhe bwinshi, birwanya okiside, isuku nyinshi, aside & alkali irwanya na organic reagent, hamwe nibintu bihamye byumubiri nubumara.

Ibyingenzi byingenzi:

1. Kurwanya ubushyuhe bukabije bwa okiside:kurwanya okiside biracyari byiza cyane mugihe ubushyuhe buri hejuru ya 1600 C.
2. Isuku ryinshi: bikozwe nubumara bwa chimique munsi yubushyuhe bwo hejuru bwa chlorine.
3. Kurwanya isuri: gukomera kwinshi, hejuru yuzuye, ibice byiza.
4. Kurwanya ruswa: aside, alkali, umunyu na reagent.

CVD SiC薄膜基本物理性能

Ibyingenzi bifatika bya CVD SiCgutwikira

性质 / Umutungo

典型数值 / Agaciro gasanzwe

/ Imiterere ya Crystal

FCC β icyiciro 多晶,主要为( 111 )取向

Ubucucike

3.21 g / cm³

硬度 / Gukomera

2500 维氏硬度( 500g umutwaro)

晶粒大小 / Ingano SiZe

2 ~ 10 mm

纯度 / Ubuziranenge bwa Shimi

99.99995%

热容 / Ubushyuhe

640 J · kg-1· K.-1

升华温度 / Ubushyuhe bwo hejuru

2700 ℃

抗弯强度 / Imbaraga zidasanzwe

415 MPa RT amanota 4

Mod Modulus

430 Gpa 4pt yunamye, 1300 ℃

导热系数 / Ubushyuhe bwumuriro

300W · m-1· K.-1

热膨胀系数 / Kwagura Ubushyuhe (CTE)

4.5 × 10-6K-1

1

2

VET Ingufu nukuri gukora ibicuruzwa byabugenewe byabugenewe bya grafite na silicon karbide hamwe nububiko butandukanye nka SiC coating, TaC coating, carbone carbone coating, pyrolytic carbone coating, nibindi, birashobora gutanga ibice bitandukanye byabigenewe kubice bya semiconductor ninganda zifotora.

Itsinda ryacu rya tekinike rituruka mubigo byubushakashatsi bwo murugo, birashobora kuguha ibisubizo byumwuga kubwawe.

Dukomeje guteza imbere inzira ziterambere kugirango dutange ibikoresho byinshi byateye imbere, kandi twakoze tekinoroji yihariye yemewe, ishobora gutuma isano iri hagati yikingirizo na substrate ikomera kandi idakunda gutandukana.

Murakaza neza cyane gusura uruganda rwacu, reka tuganire kubindi biganiro!

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