PECVD Yipakurura Gariyamoshi Graphite Tray

Ibisobanuro bigufi:

VET Ingufu za PECVD Loading Tray yagenewe gutanga umutekano ndetse no gushyigikirwa na wafers mugihe cyo kubitsa, kunoza ubuziranenge nubwiza bwibikorwa byo kubitsa. Nubushyuhe bwayo buhebuje, Graphite Tray ifasha kubungabunga ibidukikije bigenzurwa mubyumba bya PECVD, kugabanya ibyago byo kwanduza no gukora neza.

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Ibicuruzwa birambuye

Ibicuruzwa

VET Ingufu za PECVD zipakurura tray nisosiyete itomoye yagenewe inzira ya PECVD (plasma yongerewe imbaraga mumashanyarazi). Iyi grafitike yo mu rwego rwohejuru yo mu bwoko bwa grafite tray ikozwe mu bikoresho byera cyane. Ifite ubushyuhe buhanitse bwo kurwanya ubushyuhe, kurwanya ruswa, guhagarara neza nibindi biranga. Irashobora gutanga urubuga ruhamye rwimikorere ya PECVD kandi ikemeza uburinganire nuburinganire bwa firime.

VET Ingufu za PECVD zipakurura zikoreshwa cyane muri semiconductor, Photovoltaic, LED nizindi nzego. Urugero:

▪ Semiconductor: Gahunda ya PECVD kubikoresho bya semiconductor nka silicon wafer na epitaxial wafers.

▪ Photovoltaic: PECVD inzira ya selile yizuba ya firime.

LED: Inzira ya PECVD ya chip ya LED.

Ibyiza byibicuruzwa

▪Kunoza ireme rya firime:Menya neza ko filime ishyirwa hamwe no kuzamura ireme rya firime.

▪Ongera ibikoresho ubuzima:Kurwanya ruswa nziza, kwagura ubuzima bwa serivisi yibikoresho bya PECVD.

▪Kugabanya ibiciro by'umusaruro:Inzira nziza ya grafite irashobora kugabanya igipimo cyakuweho no kugabanya ibiciro byumusaruro.

Igishushanyo mbonera cya SGL:

Ibipimo bisanzwe: R6510
Ironderero	Ikizamini	Agaciro	Igice
Impuzandengo y'ingano	ISO 13320	10	μm
Ubucucike bwinshi	DIN IEC 60413/204	1.83	g / cm³
Fungura ubwoba	DIN66133	10	%
Ingano ya pore yo hagati	DIN66133	1.8	μm
Uruhushya	DIN 51935	0.06	cm² / s
Gukomera kwa Rockwell HR5 / 100	DIN IEC60413 / 303	90	HR
Kurwanya amashanyarazi yihariye	DIN IEC 60413/402	13	μΩm
Imbaraga zoroshye	DIN IEC 60413/501	60	MPa
Imbaraga zo guhonyora	DIN 51910	130	MPa
Modulus	DIN 51915	11.5 × 10³	MPa
Kwiyongera k'ubushyuhe (20-200 ℃)	DIN 51909	4.2X10^-6	K^-1
Amashanyarazi (20 ℃)	DIN 51908	105	Wm^-1K^-1

Yashizweho muburyo bwihariye bwo gukora imirasire y'izuba ikora neza, ishyigikira G12 nini yo gutunganya wafer. Igishushanyo mbonera cyabatwara ibicuruzwa byongera cyane ibicuruzwa byinjira, bigafasha umusaruro mwinshi nigiciro gito cyumusaruro.

Ingingo	Andika	Umubare wafer
PEVCD Ubwato bwa Grephite - Urukurikirane rwa 156	156-13 ubwato bwa grephite	144
	156-19 ubwato bwa grephite	216
	156-21 ubwato bwa grephite	240
	156-23 ubwato bwa grafite	308
PEVCD Ubwato bwa Grephite - Urukurikirane 125	125-15 ubwato bwa grephite	196
	125-19 ubwato bwa grephite	252
	125-21 ubwato bwa grphite	280