PECVD Graphite Wafer Inkunga

Ibisobanuro bigufi:

Byashizweho kugirango bisobanurwe neza kandi bikore neza, VET Ingufu za Graphite Wafer Inkunga nigikoresho cyiza cyo gukoresha mugutunganya wafer igezweho, aho ihindagurika ryinshi ryumuriro hamwe nibikorwa bihoraho nibyingenzi. Waba ukorana na waferi ya semiconductor cyangwa izindi substrate zoroshye, iyi nkunga yo mu rwego rwohejuru ya grafite izamura inzira yawe yizewe hamwe nubwiza bwibicuruzwa, bikore ikintu cyingenzi mubikorwa byubu.

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Ibicuruzwa birambuye

Ibicuruzwa

VET Ingufu za PECVD inzira ya grafite wafer ni ingirakamaro ikoreshwa kuri PECVD (plasma yongerewe imbaraga za pompe ziva mumashanyarazi). Iki gicuruzwa gikozwe mubikoresho byera cyane, bifite ubucucike bukabije bwa grafite, hamwe nubushyuhe buhebuje bwo kurwanya ubushyuhe, kurwanya ruswa, guhagarara neza hamwe nibindi biranga, birashobora gutanga urubuga ruhamye rwibikorwa bya PECVD, kugirango habeho uburinganire nuburinganire bwa firime.

Igishushanyo cya "igishushanyo mbonera" cya VET Ingufu za grafite wafer ntishobora gushyigikira neza wafer gusa, ahubwo inatanga ituze ryumuriro mubushyuhe bwinshi hamwe n’umuvuduko mwinshi wa PECVD kugirango umutekano uhamye.

VET Ingufu za PECVD gahunda ya grafite wafer ifite ibimenyetso bikurikira:

▪Isuku ryinshi:ibintu bike cyane byanduye, irinde kwanduza firime, kugirango umenye neza film.

▪Ubucucike bukabije:ubucucike bukabije, imbaraga za mashini nyinshi, burashobora kwihanganira ubushyuhe bwinshi hamwe n’umuvuduko mwinshi ibidukikije bya PECVD.

▪Iterambere ryiza:impinduka ntoya mubushyuhe bwo hejuru kugirango tumenye neza inzira.

▪Amashanyarazi meza cyane:kwimura neza ubushyuhe kugirango wirinde ubushyuhe bwa wafer.

▪Kurwanya ruswa ikomeye:Abasha kurwanya isuri imyuka itandukanye yangiza na plasma.

▪Serivisi yihariye:Imbonerahamwe ishigikira imbonerahamwe yubunini nuburyo butandukanye irashobora gutegurwa ukurikije ibyo abakiriya bakeneye.

Igishushanyo mbonera cya SGL:

Ibipimo bisanzwe: R6510
Ironderero	Ikizamini	Agaciro	Igice
Impuzandengo y'ingano	ISO 13320	10	μm
Ubucucike bwinshi	DIN IEC 60413/204	1.83	g / cm³
Fungura ubwoba	DIN66133	10	%
Ingano ya pore yo hagati	DIN66133	1.8	μm
Uruhushya	DIN 51935	0.06	cm² / s
Gukomera kwa Rockwell HR5 / 100	DIN IEC60413 / 303	90	HR
Kurwanya amashanyarazi yihariye	DIN IEC 60413/402	13	μΩm
Imbaraga zoroshye	DIN IEC 60413/501	60	MPa
Imbaraga zo guhonyora	DIN 51910	130	MPa
Modulus	DIN 51915	11.5 × 10³	MPa
Kwiyongera k'ubushyuhe (20-200 ℃)	DIN 51909	4.2X10^-6	K^-1
Amashanyarazi (20 ℃)	DIN 51908	105	Wm^-1K^-1

Yashizweho muburyo bwihariye bwo gukora imirasire y'izuba ikora neza, ishyigikira G12 nini yo gutunganya wafer. Igishushanyo mbonera cyabatwara ibicuruzwa byongera cyane ibicuruzwa byinjira, bigafasha umusaruro mwinshi nigiciro gito cyumusaruro.

Ingingo	Andika	Umubare wafer
PEVCD Ubwato bwa Grephite - Urukurikirane rwa 156	156-13 ubwato bwa grephite	144
	156-19 ubwato bwa grephite	216
	156-21 ubwato bwa grephite	240
	156-23 ubwato bwa grafite	308
PEVCD Ubwato bwa Grephite - Urukurikirane 125	125-15 ubwato bwa grephite	196
	125-19 ubwato bwa grephite	252
	125-21 ubwato bwa grphite	280