Graphite Substrate Wafer Ufite PECVD

Igishushanyo cya Substrate Wafer Ifata kuri PECVD Ishusho Yihariye

Ibisobanuro bigufi:

VET Ingufu za Graphite Substrate Holder yashizweho kugirango ikomeze guhuza wafer no gutuza muri gahunda ya PECVD, irinde kwanduza no kugabanya ibyago byangirika. Graphite Wafer Holder itanga umutekano, ndetse na platifomu, yemeza ko wafers ihuye neza na plasma kugirango ibike kandi ihamye. Hamwe nubushyuhe bwo hejuru bwumuriro nimbaraga zidasanzwe, uyifashe afasha kunoza imikorere muri rusange nibikorwa byibicuruzwa.

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Ibicuruzwa birambuye

Ibicuruzwa

VET Ingufu Graphite Substrate Wafer Holder niyitwara neza yagenewe PECVD (Plasma Enhanced Chemical Vapor Deposition). Iyi Graphite yo mu rwego rwohejuru ifite ibikoresho bikozwe neza, bifite ubucucike bukabije bwa grafite, hamwe nubushyuhe buhanitse bwo hejuru, kurwanya ruswa, guhagarara neza nibindi biranga. Irashobora gutanga urubuga ruhamye rwimikorere ya PECVD kandi ikemeza uburinganire nuburinganire bwa firime.

VET Ingufu PECVD itunganya igishushanyo mbonera cya grafite wafer ifite ibintu bikurikira:

▪Isuku ryinshi:ibintu bike byanduye cyane, irinde kwanduza firime, urebe neza ubwiza bwa film.

▪Ubucucike bukabije:ubucucike bukabije, imbaraga za mashini nyinshi, burashobora kwihanganira ubushyuhe bwinshi hamwe n’umuvuduko mwinshi ibidukikije bya PECVD.

▪Iterambere ryiza:impinduka ntoya mubushyuhe bwo hejuru, yemeza inzira ihamye.

▪Amashanyarazi meza cyane:kwimura neza ubushyuhe kugirango wirinde ubushyuhe bwa wafer.

▪Kurwanya ruswa ikomeye:Irashobora kurwanya isuri na gaze zitandukanye zibora na plasma.

▪Serivisi yihariye:Imbonerahamwe ishigikira imbonerahamwe yubunini nuburyo butandukanye irashobora gutegurwa ukurikije ibyo abakiriya bakeneye.

Ibyiza byibicuruzwa

▪Kunoza ireme rya firime:Menya neza ko filime ishyirwa hamwe no kuzamura ireme rya firime.

▪Ongera ibikoresho ubuzima:Kurwanya ruswa nziza, kwagura ubuzima bwa serivisi yibikoresho bya PECVD.

▪Kugabanya ibiciro by'umusaruro:Inzira nziza ya grafite irashobora kugabanya igipimo cyakuweho no kugabanya ibiciro byumusaruro.

Igishushanyo mbonera cya SGL:

Ibipimo bisanzwe: R6510
Ironderero	Ikizamini	Agaciro	Igice
Impuzandengo y'ingano	ISO 13320	10	μm
Ubucucike bwinshi	DIN IEC 60413/204	1.83	g / cm³
Fungura ubwoba	DIN66133	10	%
Ingano ya pore yo hagati	DIN66133	1.8	μm
Uruhushya	DIN 51935	0.06	cm² / s
Gukomera kwa Rockwell HR5 / 100	DIN IEC60413 / 303	90	HR
Kurwanya amashanyarazi yihariye	DIN IEC 60413/402	13	μΩm
Imbaraga zoroshye	DIN IEC 60413/501	60	MPa
Imbaraga zo guhonyora	DIN 51910	130	MPa
Modulus	DIN 51915	11.5 × 10³	MPa
Kwiyongera k'ubushyuhe (20-200 ℃)	DIN 51909	4.2X10^-6	K^-1
Amashanyarazi (20 ℃)	DIN 51908	105	Wm^-1K^-1

Yashizweho muburyo bwihariye bwo gukora imirasire y'izuba ikora neza, ishyigikira G12 nini yo gutunganya wafer. Igishushanyo mbonera cyabatwara ibicuruzwa byongera cyane ibicuruzwa byinjira, bigafasha umusaruro mwinshi nigiciro gito cyumusaruro.

Ingingo	Andika	Umubare wafer
PEVCD Ubwato bwa Grephite - Urukurikirane rwa 156	156-13 ubwato bwa grephite	144
	156-19 ubwato bwa grephite	216
	156-21 ubwato bwa grephite	240
	156-23 ubwato bwa grafite	308
PEVCD Ubwato bwa Grephite - Urukurikirane 125	125-15 ubwato bwa grephite	196
	125-19 ubwato bwa grephite	252
	125-21 ubwato bwa grphite	280