VET Ingufu za grafite wafer ubwato nubwiza buhanitse bushobora gukoreshwa muburyo bwo kubitsa muri semiconductor, Photovoltaic nizindi nganda. Igicuruzwa gikozwe neza cyane, gifite ubucucike bukabije bwa grafite, iki gicuruzwa gifite ubushyuhe buhanitse bwo guhangana nubushyuhe bwo hejuru, kurwanya ruswa, guhagarara neza hamwe nibindi biranga, kandi birashobora gutanga urubuga ruhamye rwimikorere yo kubitsa kugirango harebwe uburinganire nuburinganire bwa firime yoroheje. .
Ubwato bwa PECVD buturuka muri VET Ingufu zakozwe hamwe na grafitike isostatike isukuye cyane, igaragaramo ububobere buri munsi ya 15% hamwe nubuso bwa Ra≤1.6μm. Isumbabyose iringaniye hamwe nubushyuhe bwumuriro byemeza ko firime imwe hamwe no kongera imikorere ya selile.
Igishushanyo mbonera cya SGL:
Ibipimo bisanzwe: R6510 | |||
Ironderero | Ikizamini | Agaciro | Igice |
Impuzandengo y'ingano | ISO 13320 | 10 | μm |
Ubucucike bwinshi | DIN IEC 60413/204 | 1.83 | g / cm3 |
Fungura ubwoba | DIN66133 | 10 | % |
Ingano ya pore yo hagati | DIN66133 | 1.8 | μm |
Uruhushya | DIN 51935 | 0.06 | cm² / s |
Gukomera kwa Rockwell HR5 / 100 | DIN IEC60413 / 303 | 90 | HR |
Kurwanya amashanyarazi yihariye | DIN IEC 60413/402 | 13 | μΩm |
Imbaraga zoroshye | DIN IEC 60413/501 | 60 | MPa |
Imbaraga zo guhonyora | DIN 51910 | 130 | MPa |
Modulus | DIN 51915 | 11.5 × 10³ | MPa |
Kwiyongera k'ubushyuhe (20-200 ℃) | DIN 51909 | 4.2X10-6 | K-1 |
Amashanyarazi (20 ℃) | DIN 51908 | 105 | Wm-1K-1 |
Yashizweho muburyo bwihariye bwo gukora imirasire y'izuba ikora neza, ishyigikira G12 nini yo gutunganya wafer. Igishushanyo mbonera cyabatwara ibicuruzwa byongera cyane ibicuruzwa byinjira, bigafasha umusaruro mwinshi nigiciro gito cyumusaruro.
Ingingo | Andika | Umubare wafer |
PEVCD Ubwato bwa Grephite - Urukurikirane rwa 156 | 156-13 ubwato bwa grephite | 144 |
156-19 ubwato bwa grephite | 216 | |
156-21 ubwato bwa grephite | 240 | |
156-23 ubwato bwa grafite | 308 | |
PEVCD Ubwato bwa Grephite - Urukurikirane 125 | 125-15 ubwato bwa grephite | 196 |
125-19 ubwato bwa grephite | 252 | |
125-21 ubwato bwa grphite | 280 |