Nubuhe buryo bwo gutegura nibikorwa biranga CVD silicon karbide?

CVD (Depical Chemical Vapor Deposition) nuburyo busanzwe bukoreshwa mugutegura silicon karbide.CVD silicon karbidebifite imikorere myinshi idasanzwe. Iyi ngingo izerekana uburyo bwo gutegura CVD silicon carbide coating hamwe nibikorwa byayo.

1. Uburyo bwo kwitegura bwaCVD silicon karbide

Uburyo bwa CVD buhindura gaze ibanziriza imyuka ya silicon karbide yuzuye mubihe by'ubushyuhe bwinshi. Ukurikije ibyerekezo bitandukanye bya gaze, irashobora kugabanywamo icyiciro cya gaze CVD nicyiciro cya CVD.

1. Icyuka cyumuyaga CVD

Icyuka cyumuyaga CVD ikoresha ibyuka bya gaze, mubisanzwe ibinyabuzima bya organosilicon, kugirango bigere kumikurire ya firime ya karubide ya silicon. Ibikoresho bikoreshwa cyane muri organosilicon harimo methylsilane, dimethylsilane, monosilane, nibindi, bigizwe na firime ya karubide ya silicon kumyuma yicyuma itwara ibyuka bya gaze mubyumba byubushyuhe bwo hejuru. Ubushyuhe bwo hejuru mucyumba cya reaction busanzwe butangwa no gushyushya induction cyangwa gushyushya birwanya.

2. Icyiciro cyamazi CVD

Amazi yo mu cyiciro cya CVD akoresha prursor yamazi, mubisanzwe umusemburo kama urimo silikoni hamwe nuruvange rwa silanol, ushyushye kandi ugahumeka mubyumba byabigenewe, hanyuma firime ya karibide ya silicon ikorwa kuri substrate ikoresheje reaction ya chimique.

2. Ibiranga imikorere yaCVD silicon karbide

1.Ubushuhe buhebuje bwo gukora ubushyuhe

CVD silicon karbidetanga ubushyuhe buhebuje bwo hejuru hamwe no kurwanya okiside. Irashoboye gukora mubushyuhe bwo hejuru kandi irashobora kwihanganira ibihe bikabije kubushyuhe bwinshi.

2.Ibikoresho byiza bya mashini

CVD silicon karbideifite ubukana bwinshi kandi irwanya kwambara neza. Irinda insimburangingo zicyuma kutangirika no kwangirika, byongerera igihe cyo gukora ibikoresho.

3. Umutimanama mwiza cyane

CVD silicon karbidebirwanya cyane imiti isanzwe nka acide, alkalis n'umunyu. Irwanya ibitero byimiti no kwangirika kwa substrate.

4. Coefficient de friction yo hasi

CVD silicon karbideifite coefficente nkeya kandi nziza yo kwisiga. Igabanya guterana no kwambara no kunoza imikorere yo gukoresha ibikoresho.

5.Ubushyuhe bwiza bwumuriro

CVD silicon karbide itwikiriye ifite imiterere myiza yumuriro. Irashobora kuyobora vuba ubushyuhe no kunoza ubushyuhe bwo gukwirakwiza ibyuma byibanze.

6.Ibikoresho byiza byamashanyarazi

CVD silicon karbide itwikiriye ifite amashanyarazi meza kandi irashobora gukumira imyanda. Irakoreshwa cyane mukurinda insulasiyo ibikoresho bya elegitoroniki.

7. Guhindura umubyimba hamwe nibigize

Mugucunga imiterere mugihe cya CVD hamwe nubunini bwa preursor, ubunini hamwe nibigize firime ya silicon karbide irashobora guhinduka. Ibi bitanga amahitamo menshi kandi byoroshye kubikorwa bitandukanye.

Muri make, CVD silicon karbide itwikiriye ifite ubushyuhe buhebuje bwo hejuru, imiterere yubukanishi bwiza, imiterere ihamye yimiti, coefficient de fraisse nkeya, imiyoboro myiza yumuriro hamwe nubushakashatsi bwamashanyarazi. Iyi mitungo ituma CVD silicon carbide yambarwa ikoreshwa cyane mubice byinshi, harimo ibikoresho bya elegitoroniki, optique, ikirere, inganda zikora imiti, nibindi.